US4951285A - Laser with adjustable mirror for mode control - Google Patents
Laser with adjustable mirror for mode control Download PDFInfo
- Publication number
- US4951285A US4951285A US07/214,747 US21474788A US4951285A US 4951285 A US4951285 A US 4951285A US 21474788 A US21474788 A US 21474788A US 4951285 A US4951285 A US 4951285A
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- United States
- Prior art keywords
- mirror
- laser
- reflective surface
- shape
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 230000010355 oscillation Effects 0.000 claims abstract description 29
- 230000003287 optical effect Effects 0.000 claims 2
- 230000005284 excitation Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000005350 fused silica glass Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08018—Mode suppression
- H01S3/0804—Transverse or lateral modes
- H01S3/0805—Transverse or lateral modes by apertures, e.g. pin-holes or knife-edges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
Definitions
- the present invention relates to apparatus for control of modes of oscillation in lasers.
- Lasers are characterized by a resonant laser cavity defined by reflective surfaces.
- two mirrors are used.
- a common cavity called near-hemispheric includes a spherical mirror at one end and an optically flat mirror at the other.
- the radius of curvature of the spherical mirror is set so that the center of curvature of the spherical mirror lies beyond the flat mirror.
- This near-hemispheric arrangement avoids many of the problems of alignment suffered by other types of laser cavities. Further, this type of cavity serves as an excellent example for demonstrating the operation of the present invention.
- a given laser including laser medium and a resonant cavity, will generally support a plurality of modes of oscillation. These modes of oscillation will include different wavelengths, for instance, 4579 Angstroms and 5145 Angstroms, (among others) for the argon ion laser. Further, different transverse modes of oscillation clustering around the primary wavelengths, will occur within the same cavity. For many applications, only one transverse mode designated the TEM 00 , or the lowest order mode, is desired. The lowest order mode typically has a smaller and more uniform beam cross-section than higher order modes.
- the size of modes within the laser cavity, called mode size is one characteristic of modes that is used to discriminate between desired and undesired modes.
- the cross-section of lower order modes within the laser cavity is smaller than the cross-section of higher order modes. Also, the cross-sections of the modes of longer wavelengths are greater than the cross-sections of corresponding modes in shorter wavelengths.
- the lowest order modes are essentially cone-shaped with the smaller end of the cone on the flat mirror.
- the cross-sectional size of a given mode at any point within the laser cavity is determined by the radius of curvature of the spherical mirror.
- the present invention provides the ability to adjust dynamically the mode size within a given laser cavity of modes of oscillation.
- a fixed aperture or bore within the laser cavity can be used to suppress unwanted transverse modes of operation even as the bore is eroded or the wavelength of the desired mode is changed. Accordingly, as the bore is eroded in a gas laser, the mode size of the desired mode can be increased to match the increase in the bore size. Also, as a given laser is switched to a different wavelength of oscillation, the mode size of the desired wavelength can be matched with the effective aperture size of the laser cavity to provide optimum transverse mode suppression.
- the present invention is a laser comprising a first mirror having a shape.
- the shape is generally spherical for typical lasers with the shape of the mirror being defined by the radius of curvature of a reflective surface on the mirror.
- a second mirror is provided mounted with the first to define a laser cavity.
- the cross-sectional sizes of the modes of oscillation within the laser cavity are defined by the shapes of the two mirrors, although the mode is changeable upon the shape changes of either or both mirrors.
- An aperture at a given location having a fixed cross-sectional size is mounted within the laser cavity.
- a laser bore which forms an effective aperture at a given location is used.
- a means is mounted with the first mirror in this example for adjusting the shape of the first mirror so that the cross-sectional size of a selected mode at the given location matches the cross-sectional size of the aperture.
- the first mirror comprises a reflective surface on a flexible disc made, for instance, of fused quartz.
- the reflective surface on the fused quartz disc will have an initial radius of curvature.
- a plunger is mounted for applying an adjustable force at a location near the center of the disc opposite the curved surface. As the amount of force applied to the disc is adjusted, the radius of curvature of the curved surface on the disc varies.
- the shape of the mirror is adjusted and the mode size of the desired mode within the laser cavity is modified.
- the laser output can be optimized by suppressing unwanted transverse modes and by ensuring that a maximum volume of the active region of the laser medium is utilized by the desired mode.
- FIG. 1 is a schematic diagram of a laser cavity illustrating the relationship of modes size to the effective aperture size of a laser bore.
- FIG. 2 is a schematic diagram of a laser cavity illustrating the effect on mode size of changing the radius of curvature of a spherical mirror.
- FIG. 3 is a schematic diagram of a laser cavity illustrating selection of wavelengths of light for laser oscillation and the effect on mode size of the wavelength of the mode of oscillation.
- FIG. 4 is a schematic diagram of a laser cavity illustrating mode selection between various wavelengths and the effect of increasing the radius of curvature of the mirror to optimize mode size of a desired wavelength.
- FIG. 5 is a drawing of a preferred embodiment of the apparatus for adjusting the shape of curvature of a mirror.
- FIG. 1 is a schematic diagram of a laser including a first mirror 10 and a second mirror 11.
- the first mirror is spherical, having a radius of curvature R1.
- the second mirror 11 is essentially optically flat, having a high radius of curvature with respect to the length of the laser cavity.
- a laser bore 12 encloses a laser medium such as argon ion gas.
- the bore has an effective aperture size R A at location 13 in the laser cavity.
- the effective aperture size of the bore is typically defined by a plurality of discs or by a continuous bore within a sealed tube, that is used for conducting heat out of the active region of the laser medium.
- the plurality of discs or bore is usually formed of beryllium oxide, graphite, tungsten or other materials which suffer erosion due to sputtering effects within the tube. Accordingly, the effective aperture size R A of a typical gas laser will increase with age of the laser.
- the effect of this increase in aperture size R A is illustrated in FIG. 1 schematically by the presence of two modes of oscillation, M1 and M2.
- the mode M1 is a desired mode.
- the mode M1 will be basically cone-shaped with the narrow end of the cone near the flat mirror 11.
- the laser bore 12 will be placed as close to the spherical mirror 10 as possible in order to maximize the volume of the mode M1 inside the active region of the laser medium.
- the mode M2 is a higher order, unwanted mode of oscillation. It likewise will be basically cone-shaped in the near-hemispheric laser cavity. However, the cross-section of the mode M2 at the position 13 in the laser cavity will be larger than the cross-section of the mode M1 at the same location.
- FIG. 2 illustrates the effect of increasing the radius of curvature of the mirror 10 to a value R2.
- the cross-section of the mode M2 at the location 13 will exceed the effective aperture size R A of the laser bore 12. This will suppress oscillation in mode M2.
- the mode size of the desired mode M1 will increase in order to optimize the volume of the mode M1 in the active region of the laser bore 12.
- FIGS. 3 and 4 schematically illustrate the present invention for wavelength selection.
- FIG. 3 illustrates a laser cavity including a first mirror 20 with a spherical reflective surface having a radius of curvature R1.
- a second mirror 21 is mounted opposite the first mirror 20 in order to define the resonant cavity of the laser.
- a prism 22 is mounted with the second mirror 21 in order to perform wavelength selection among modes of oscillation that can be supported by the laser medium 23.
- an argon ion gas laser medium can support oscillation in a plurality of output wavelengths ⁇ 1 and ⁇ 2.
- the longer wavelength ⁇ 1 will have a larger mode size than the shorter wavelength ⁇ 2.
- the prism 22 will deflect the wavelength ⁇ 2 at an angle different from the deflection of wavelength ⁇ 1.
- the mirror 21 is aligned with prism 22 to support oscillation of wavelength ⁇ 1 in FIG. 3.
- Schematically illustrated in FIG. 3 is an aperture 24 having an effective aperture size of R A at a given location in the laser cavity.
- the mode size of the desired wavelength ⁇ 1 matches the effective aperture R A of the aperture 24 with a spherical mirror 20 having a radius R1.
- the mode size of the wavelength ⁇ 2, at the location of the aperture 24 is much smaller than the effective radius of the aperture R A .
- the radius of curvature of the mirror 20 is increased to the value R2.
- the cross-section of the mode for wavelength ⁇ 2 matches the effective aperture size R A of the aperture 24.
- the mode size of the mode at wavelength ⁇ 1 is increased and is suppressed by the aperture 24.
- the shape of the mirror R2 can be tuned to match the desired mode wavelength ⁇ 2 with precision so that transverse modes associated with the primary mode of wavelength ⁇ 2 can be suppressed by fine adjustments of the shape of mirror 20.
- FIG. 5 illustrates a preferred embodiment of means for adjusting the radius of curvature R M of a mirror 50.
- the means illustrated in FIG. 5 are particularly suited for use with a sealed gas laser and can be adapted for use with all lasers.
- the means illustrated in FIG. 5 is mounted on the support structure 51 of the sealed gas laser.
- the mirror 50 is formed of a flat disc of fused quartz or other flexible material. It is ground to have a radius of curvature (concave with respect to the inside of the laser cavity) on the order of five to eight meters. The thickness of the disc forming the mirror 50 should be on the order of 1/10th of an inch. Experimental results have been obtained using a fused quartz disc of diameter 1.5 cm. ground to form a reflective surface with an eight meter radius of curvature and a thickness of 0.121 inches.
- a mounting bracket 52 engages threads 53 on the structure 51. The mounting bracket supports the mirror 50 with 0-ring 54, providing a vacuum-tight seal for the mirror structure.
- the structure 51 of the laser is ground to provide an optically flat surface 55 on which the mirror 50 is supported. The optically flat surface is required in order to ensure uniform deflection in the shape of the mirror as force is applied.
- the mounting bracket 52 includes a plunger 56 that engages threads on the mounting bracket 52.
- the threads are preferably very fine in order to allow fine adjustment of the force supplied by the plunger 56.
- a small foot 57 formed of nylon or other suitable non-abrasive material, engages the center of the mirror 50.
- the nylon foot is mounted on a spring-loaded ball plunger 58 on the end of the threaded plunger 57. The spring-loaded plunger facilitates supporting the mirror 50 against the surface 55 as the plunger 56 is withdrawn.
- the radius of curvature R M of the mirror 50 in an undeflected state acts under force from plunger 57 as a flat, flexible plate.
- the amount of deflection of the plate formed by the mirror 50 can be predicted using standard formulas for load applied to flat plates, such as provided in Raymond J. Roark, FORMULAS FOR STRESS AND STRAIN, 4th Edition, McGraw-Hill Book Company, 1965, pp 216,217.
- the mirror 50 is expected to behave as a flat plate with edges supported and a generally uniform load applied by the plunger 56 over a circular area defined by the foot 57.
- varying the shape of a mirror in a laser cavity is useful for controlling the mode size of desired modes of laser oscillation.
- the mode size can be optimized to match the active region of the laser medium for any laser using a mirror having an adjustable shape.
- the shape of the mirror in the embodiment described is spherical. Other shapes, such as parabolic, cylindrical or flat, could be used in more complex laser resonant cavities. Further, the embodiment described employs a plunger adapted to be manually adjusted for applying force to change the shape of the mirror. Equivalent systems could use stepper motors to drive the plunger with great precision. Further, other apparatus could be used to apply force, as is well known.
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
Claims (16)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/214,747 US4951285A (en) | 1988-07-05 | 1988-07-05 | Laser with adjustable mirror for mode control |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/214,747 US4951285A (en) | 1988-07-05 | 1988-07-05 | Laser with adjustable mirror for mode control |
Publications (1)
Publication Number | Publication Date |
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US4951285A true US4951285A (en) | 1990-08-21 |
Family
ID=22800273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US07/214,747 Expired - Lifetime US4951285A (en) | 1988-07-05 | 1988-07-05 | Laser with adjustable mirror for mode control |
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US (1) | US4951285A (en) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5095492A (en) * | 1990-07-17 | 1992-03-10 | Cymer Laser Technologies | Spectral narrowing technique |
US5101415A (en) * | 1990-09-14 | 1992-03-31 | Coherent, Inc. | Laser resonator mirror with wavelength selective coatings on two surfaces |
US5237583A (en) * | 1991-10-28 | 1993-08-17 | Lumonics Inc. | Excimer laser assembly and an optic mount therefor |
US5412673A (en) * | 1993-12-22 | 1995-05-02 | Hoya Corporation | Single longitudinal mode laser without seeding |
US5684812A (en) * | 1995-09-12 | 1997-11-04 | Trw Inc. | Laser mode control using external inverse cavity |
US5691999A (en) * | 1994-09-30 | 1997-11-25 | United Technologies Corporation | Compression-tuned fiber laser |
US5825801A (en) * | 1996-08-21 | 1998-10-20 | Mitsubishi Denki Kabushiki Kaisha | Laser apparatus |
US5910963A (en) * | 1997-04-08 | 1999-06-08 | Carl Zeiss Jena Gmbh | Laser resonator design with improved signal-to-noise level (S/N) at the output of a single-mode fiber-coupled multi-wavelength laser providing illumination for a laser scanning microscope |
EP0942306A2 (en) * | 1998-03-12 | 1999-09-15 | Sumitomo Electric Industries, Ltd. | Variable-curvature reflecting mirror |
US5960025A (en) * | 1997-10-06 | 1999-09-28 | Honeywell Inc. | Device and method for achieving beam path alignment of an optical cavity |
US6192064B1 (en) * | 1997-07-01 | 2001-02-20 | Cymer, Inc. | Narrow band laser with fine wavelength control |
US6512781B1 (en) * | 2000-08-31 | 2003-01-28 | Trumpf Lasertechnik Gmbh | Gas laser with mode control |
US20040061260A1 (en) * | 2002-09-30 | 2004-04-01 | Eos Gmbh Electro Optical Systems | Device and method for the manufacturing of three-dimensional objects layer-by-layer |
US6738410B2 (en) | 1999-12-22 | 2004-05-18 | Cymer, Inc. | Line narrowed laser with bidirection beam expansion |
WO2004102251A1 (en) * | 2003-05-14 | 2004-11-25 | Koninklijke Philips Electronics N.V. | Adjustable mirror |
EP1184945B1 (en) * | 2000-08-31 | 2007-03-07 | TRUMPF LASERTECHNIK GmbH | Gaslaser |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3573656A (en) * | 1968-12-23 | 1971-04-06 | Bell Telephone Labor Inc | Laser oscillator with mode selector |
US3731991A (en) * | 1969-03-03 | 1973-05-08 | United Aircraft Corp | Reflecting means for beam control utilizing movable members for adjustment |
US3839684A (en) * | 1971-12-17 | 1974-10-01 | Nippon Electric Co | Method of and mechanism for adjusting the optical axis of a laser resonator by translational movement of the resonator reflector |
-
1988
- 1988-07-05 US US07/214,747 patent/US4951285A/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3573656A (en) * | 1968-12-23 | 1971-04-06 | Bell Telephone Labor Inc | Laser oscillator with mode selector |
US3731991A (en) * | 1969-03-03 | 1973-05-08 | United Aircraft Corp | Reflecting means for beam control utilizing movable members for adjustment |
US3839684A (en) * | 1971-12-17 | 1974-10-01 | Nippon Electric Co | Method of and mechanism for adjusting the optical axis of a laser resonator by translational movement of the resonator reflector |
Non-Patent Citations (2)
Title |
---|
Raymond J. Roark, Formulas for Stress and Strain, Fourth Edition, McGraw Hill, Inc., 1965. * |
Raymond J. Roark, Formulas for Stress and Strain, Fourth Edition, McGraw-Hill, Inc., 1965. |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5095492A (en) * | 1990-07-17 | 1992-03-10 | Cymer Laser Technologies | Spectral narrowing technique |
US5101415A (en) * | 1990-09-14 | 1992-03-31 | Coherent, Inc. | Laser resonator mirror with wavelength selective coatings on two surfaces |
US5237583A (en) * | 1991-10-28 | 1993-08-17 | Lumonics Inc. | Excimer laser assembly and an optic mount therefor |
US5412673A (en) * | 1993-12-22 | 1995-05-02 | Hoya Corporation | Single longitudinal mode laser without seeding |
US5691999A (en) * | 1994-09-30 | 1997-11-25 | United Technologies Corporation | Compression-tuned fiber laser |
US5684812A (en) * | 1995-09-12 | 1997-11-04 | Trw Inc. | Laser mode control using external inverse cavity |
US5825801A (en) * | 1996-08-21 | 1998-10-20 | Mitsubishi Denki Kabushiki Kaisha | Laser apparatus |
US5910963A (en) * | 1997-04-08 | 1999-06-08 | Carl Zeiss Jena Gmbh | Laser resonator design with improved signal-to-noise level (S/N) at the output of a single-mode fiber-coupled multi-wavelength laser providing illumination for a laser scanning microscope |
US6192064B1 (en) * | 1997-07-01 | 2001-02-20 | Cymer, Inc. | Narrow band laser with fine wavelength control |
US5960025A (en) * | 1997-10-06 | 1999-09-28 | Honeywell Inc. | Device and method for achieving beam path alignment of an optical cavity |
EP0942306A2 (en) * | 1998-03-12 | 1999-09-15 | Sumitomo Electric Industries, Ltd. | Variable-curvature reflecting mirror |
EP0942306A3 (en) * | 1998-03-12 | 2001-10-04 | Sumitomo Electric Industries, Ltd. | Variable-curvature reflecting mirror |
US6738410B2 (en) | 1999-12-22 | 2004-05-18 | Cymer, Inc. | Line narrowed laser with bidirection beam expansion |
US6512781B1 (en) * | 2000-08-31 | 2003-01-28 | Trumpf Lasertechnik Gmbh | Gas laser with mode control |
EP1184945B1 (en) * | 2000-08-31 | 2007-03-07 | TRUMPF LASERTECHNIK GmbH | Gaslaser |
US20040061260A1 (en) * | 2002-09-30 | 2004-04-01 | Eos Gmbh Electro Optical Systems | Device and method for the manufacturing of three-dimensional objects layer-by-layer |
WO2004102251A1 (en) * | 2003-05-14 | 2004-11-25 | Koninklijke Philips Electronics N.V. | Adjustable mirror |
US20060262433A1 (en) * | 2003-05-14 | 2006-11-23 | Hendriks Bernardus Hendrikus W | Adjustable mirror |
US7385755B2 (en) | 2003-05-14 | 2008-06-10 | Koninklijke Philips Electronics, N.V. | Adjustable mirror |
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Owner name: SPECTRA-PHYSICS, INC., 3333 NORTH FIRST ST., SAN J Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:COLE, JOHN L.;WRIGHT, DAVID;PETERSEN, ALAN B.;AND OTHERS;REEL/FRAME:004958/0002;SIGNING DATES FROM 19880603 TO 19880625 Owner name: SPECTRA-PHYSICS, INC., A CORP. OF CA,CALIFORNIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:COLE, JOHN L.;WRIGHT, DAVID;PETERSEN, ALAN B.;AND OTHERS;SIGNING DATES FROM 19880603 TO 19880625;REEL/FRAME:004958/0002 |
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Owner name: SPECTRA-PHYSICS LASERS, INC. A DE CORPORATION, CA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:SPECTRA-PHYSICS, INC.;REEL/FRAME:005751/0193 Effective date: 19910604 |
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