DE69416750D1 - Drehratensensor mit zentral montierter Stimmgabel - Google Patents

Drehratensensor mit zentral montierter Stimmgabel

Info

Publication number
DE69416750D1
DE69416750D1 DE69416750T DE69416750T DE69416750D1 DE 69416750 D1 DE69416750 D1 DE 69416750D1 DE 69416750 T DE69416750 T DE 69416750T DE 69416750 T DE69416750 T DE 69416750T DE 69416750 D1 DE69416750 D1 DE 69416750D1
Authority
DE
Germany
Prior art keywords
rate sensor
tuning fork
rotation rate
centrally mounted
mounted tuning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69416750T
Other languages
English (en)
Other versions
DE69416750T2 (de
Inventor
Piyush K Gupta
Craig E Jenson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New SD Inc
Original Assignee
New SD Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New SD Inc filed Critical New SD Inc
Application granted granted Critical
Publication of DE69416750D1 publication Critical patent/DE69416750D1/de
Publication of DE69416750T2 publication Critical patent/DE69416750T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
DE69416750T 1993-08-02 1994-07-20 Drehratensensor mit zentral montierter Stimmgabel Expired - Lifetime DE69416750T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/100,760 US5396144A (en) 1993-08-02 1993-08-02 Rotation rate sensor with center mounted tuning fork

Publications (2)

Publication Number Publication Date
DE69416750D1 true DE69416750D1 (de) 1999-04-08
DE69416750T2 DE69416750T2 (de) 1999-09-09

Family

ID=22281397

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69416750T Expired - Lifetime DE69416750T2 (de) 1993-08-02 1994-07-20 Drehratensensor mit zentral montierter Stimmgabel

Country Status (4)

Country Link
US (1) US5396144A (de)
EP (1) EP0638783B1 (de)
JP (1) JP2518600B2 (de)
DE (1) DE69416750T2 (de)

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JP3805837B2 (ja) * 1996-08-12 2006-08-09 トヨタ自動車株式会社 角速度検出装置
JP3752737B2 (ja) * 1996-08-12 2006-03-08 トヨタ自動車株式会社 角速度検出装置
US5987987A (en) 1997-04-14 1999-11-23 Denso Corporation Angular velocity sensor, related method for manufacturing the sensor, and piezoelectric vibrator element used in this sensor
US5969249A (en) * 1997-05-07 1999-10-19 The Regents Of The University Of California Resonant accelerometer with flexural lever leverage system
JPH1164004A (ja) * 1997-06-13 1999-03-05 Denso Corp 角速度センサと角速度センサ装置
JPH1164003A (ja) * 1997-06-13 1999-03-05 Denso Corp 角速度センサ
US6186003B1 (en) 1997-10-06 2001-02-13 Ngk Insulators, Ltd. Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
US6651498B1 (en) 1997-10-06 2003-11-25 Ngk Insulators, Ltd. Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
JP2000009469A (ja) * 1998-06-18 2000-01-14 Fujitsu Ltd 圧電ジャイロおよびその駆動方法
US6262520B1 (en) * 1999-09-15 2001-07-17 Bei Technologies, Inc. Inertial rate sensor tuning fork
US7523537B1 (en) 2000-07-13 2009-04-28 Custom Sensors & Technologies, Inc. Method of manufacturing a tuning fork with reduced quadrature errror and symmetrical mass balancing
JP4147784B2 (ja) * 2001-10-09 2008-09-10 富士通株式会社 角速度センサ
JP4001029B2 (ja) * 2002-03-25 2007-10-31 セイコーエプソン株式会社 音叉型圧電振動片及びその製造方法、圧電デバイス
JP4075833B2 (ja) 2003-06-04 2008-04-16 セイコーエプソン株式会社 圧電振動ジャイロ素子、その製造方法、及び圧電振動ジャイロセンサ
JP4352975B2 (ja) 2003-07-25 2009-10-28 セイコーエプソン株式会社 圧電振動片、圧電振動片の支持構造、圧電振動子及び振動型圧電ジャイロスコープ
JP2005070030A (ja) * 2003-08-04 2005-03-17 Seiko Epson Corp ジャイロ振動子及び電子機器
US7237169B2 (en) * 2004-07-26 2007-06-26 Bei Technologies, Inc. Cross-monitoring sensor system and method
US7124632B2 (en) * 2004-07-26 2006-10-24 Bei Technologies, Inc. Electronically configurable rate sensor circuit and method
DE102005008352B4 (de) * 2005-02-23 2007-10-11 Universität des Saarlandes Drehratensensor
JP5037819B2 (ja) * 2005-03-04 2012-10-03 ソニー株式会社 電子機器
WO2007033326A2 (en) * 2005-09-14 2007-03-22 Welch Allyn, Inc. Medical apparatus comprising and adaptive lens
US8027095B2 (en) * 2005-10-11 2011-09-27 Hand Held Products, Inc. Control systems for adaptive lens
US7813047B2 (en) * 2006-12-15 2010-10-12 Hand Held Products, Inc. Apparatus and method comprising deformable lens element
US8027096B2 (en) 2006-12-15 2011-09-27 Hand Held Products, Inc. Focus module and components with actuator polymer control
JP2008157810A (ja) * 2006-12-25 2008-07-10 Tdk Corp 角速度センサ素子および角速度センサ装置
JP2008249489A (ja) * 2007-03-30 2008-10-16 Tdk Corp 角速度センサ素子および角速度センサ装置
US7571648B2 (en) * 2007-05-23 2009-08-11 Seiko Epson Corporation Piezoelectric vibration angular velocity sensor
JP5185650B2 (ja) * 2008-02-14 2013-04-17 セイコーインスツル株式会社 圧電振動片の製造方法及びウエハ
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
CN101666646B (zh) * 2009-10-16 2011-03-16 中国人民解放军国防科学技术大学 一种倾斜双端音叉式硅微机械陀螺及其制作方法
WO2012081457A1 (ja) * 2010-12-15 2012-06-21 株式会社村田製作所 振動ジャイロ
JP5772286B2 (ja) 2011-06-24 2015-09-02 セイコーエプソン株式会社 屈曲振動片及び電子機器
JP2013192052A (ja) * 2012-03-14 2013-09-26 Nippon Dempa Kogyo Co Ltd 水晶デバイス及びその製造方法。
JP6003150B2 (ja) 2012-03-28 2016-10-05 セイコーエプソン株式会社 振動片およびジャイロセンサー並びに電子機器および移動体
JP6007541B2 (ja) 2012-03-28 2016-10-12 セイコーエプソン株式会社 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
JP5987426B2 (ja) 2012-04-06 2016-09-07 セイコーエプソン株式会社 振動片、振動片の製造方法、センサーユニット、電子機器

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SU125821A1 (ru) * 1959-06-15 1959-11-30 П.Г. Поздняков Пьезоэлектрический резонатор
US3354413A (en) * 1961-11-13 1967-11-21 Kokusai Electric Co Ltd Electromechanical filter for low frequencies
US3206985A (en) * 1963-01-04 1965-09-21 Western Electric Co Apparatus for simultaneously sensing movement of a body around a plurality of mutually perpendicular axes
DE2009379C3 (de) * 1970-02-27 1975-01-30 Gebrueder Junghans Gmbh, 7230 Schramberg Piezoelektrischer Oszillator in Form einer Stimmgabel als Zeitnormal für zeithaltende Geräte
US3697789A (en) * 1970-06-23 1972-10-10 Citizen Watch Co Ltd Mechanical oscillator
JPS5239391A (en) * 1975-09-25 1977-03-26 Citizen Watch Co Ltd Composite vibrator for watches
JPS5521679A (en) * 1978-08-04 1980-02-15 Seiko Epson Corp Crystal oscillator of composite mode h type
FR2464595A1 (fr) * 1979-08-31 1981-03-06 Ebauches Sa Procede de detection d'asymetrie de resonateurs a cristal piezoelectrique en forme de diapason et resonateurs pour sa mise en oeuvre
GB2067009A (en) * 1979-12-17 1981-07-15 Ebauches Sa Encapsulated piezo-electric resonator
US4368402A (en) * 1980-07-02 1983-01-11 Fuji Electrochemical Co., Ltd. H-Type ceramic resonator
JPS57188126A (en) * 1981-05-15 1982-11-19 Citizen Watch Co Ltd Composite quartz oscillator
US4654663A (en) * 1981-11-16 1987-03-31 Piezoelectric Technology Investors, Ltd. Angular rate sensor system
GB2124021A (en) * 1982-07-16 1984-02-08 Philips Electronic Associated Piezo-electric resonator or filter
US4538461A (en) * 1984-01-23 1985-09-03 Piezoelectric Technology Investors, Inc. Vibratory angular rate sensing system
USRE32931E (en) * 1984-01-23 1989-05-30 Piezoelectric Technology Investors, Inc. Vibratory angular rate sensor system
US4524619A (en) * 1984-01-23 1985-06-25 Piezoelectric Technology Investors, Limited Vibratory angular rate sensor system
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US4742260A (en) * 1986-02-06 1988-05-03 Hiroshi Shimizu Piezoelectrically driving device
JPS62217115A (ja) * 1986-03-19 1987-09-24 Tokyo Keiki Co Ltd ジヤイロ装置
JPS62217114A (ja) * 1986-03-19 1987-09-24 Tokyo Keiki Co Ltd ジヤイロ装置
US5166571A (en) * 1987-08-28 1992-11-24 Nec Home Electronics, Ltd. Vibration gyro having an H-shaped vibrator
US4930351A (en) * 1988-03-24 1990-06-05 Wjm Corporation Vibratory linear acceleration and angular rate sensing system
US5056366A (en) * 1989-12-26 1991-10-15 Litton Systems, Inc. Piezoelectric vibratory rate sensor

Also Published As

Publication number Publication date
DE69416750T2 (de) 1999-09-09
US5396144A (en) 1995-03-07
EP0638783A1 (de) 1995-02-15
EP0638783B1 (de) 1999-03-03
JP2518600B2 (ja) 1996-07-24
JPH0755479A (ja) 1995-03-03

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