DE602008003048D1 - Verfahren und Vorrichtung zur Vermessung einer Objektoberfläche mittels eines Abstandssensors, der den Brennpunkt misst - Google Patents

Verfahren und Vorrichtung zur Vermessung einer Objektoberfläche mittels eines Abstandssensors, der den Brennpunkt misst

Info

Publication number
DE602008003048D1
DE602008003048D1 DE602008003048T DE602008003048T DE602008003048D1 DE 602008003048 D1 DE602008003048 D1 DE 602008003048D1 DE 602008003048 T DE602008003048 T DE 602008003048T DE 602008003048 T DE602008003048 T DE 602008003048T DE 602008003048 D1 DE602008003048 D1 DE 602008003048D1
Authority
DE
Germany
Prior art keywords
measuring
focal point
distance sensor
object surface
sensor measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602008003048T
Other languages
English (en)
Inventor
Mathew David Watson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602008003048D1 publication Critical patent/DE602008003048D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
DE602008003048T 2007-03-21 2008-03-20 Verfahren und Vorrichtung zur Vermessung einer Objektoberfläche mittels eines Abstandssensors, der den Brennpunkt misst Active DE602008003048D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/689,416 US7728961B2 (en) 2006-10-31 2007-03-21 Surface height and focus sensor

Publications (1)

Publication Number Publication Date
DE602008003048D1 true DE602008003048D1 (de) 2010-12-02

Family

ID=39495929

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602008003048T Active DE602008003048D1 (de) 2007-03-21 2008-03-20 Verfahren und Vorrichtung zur Vermessung einer Objektoberfläche mittels eines Abstandssensors, der den Brennpunkt misst

Country Status (4)

Country Link
US (1) US7728961B2 (de)
EP (1) EP1972886B1 (de)
JP (1) JP5079558B2 (de)
DE (1) DE602008003048D1 (de)

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Also Published As

Publication number Publication date
JP2008233088A (ja) 2008-10-02
EP1972886A3 (de) 2008-12-10
JP5079558B2 (ja) 2012-11-21
EP1972886A2 (de) 2008-09-24
US20080100829A1 (en) 2008-05-01
EP1972886B1 (de) 2010-10-20
US7728961B2 (en) 2010-06-01

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