DE3570514D1 - Clean room constructing system - Google Patents

Clean room constructing system

Info

Publication number
DE3570514D1
DE3570514D1 DE8585904674T DE3570514T DE3570514D1 DE 3570514 D1 DE3570514 D1 DE 3570514D1 DE 8585904674 T DE8585904674 T DE 8585904674T DE 3570514 T DE3570514 T DE 3570514T DE 3570514 D1 DE3570514 D1 DE 3570514D1
Authority
DE
Germany
Prior art keywords
clean room
constructing system
room constructing
clean
room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585904674T
Other languages
English (en)
Inventor
Takayoshi Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Application granted granted Critical
Publication of DE3570514D1 publication Critical patent/DE3570514D1/de
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
DE8585904674T 1984-09-18 1985-09-17 Clean room constructing system Expired DE3570514D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59195072A JPS6172947A (ja) 1984-09-18 1984-09-18 クリ−ンル−ムの形成法およびこの方法に使用する空気調和設備ユニツト
PCT/JP1985/000516 WO1986001879A1 (en) 1984-09-18 1985-09-17 Clean room constructing system

Publications (1)

Publication Number Publication Date
DE3570514D1 true DE3570514D1 (en) 1989-06-29

Family

ID=16335085

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585904674T Expired DE3570514D1 (en) 1984-09-18 1985-09-17 Clean room constructing system

Country Status (10)

Country Link
US (1) US4693175A (de)
EP (1) EP0196333B1 (de)
JP (1) JPS6172947A (de)
KR (1) KR930009610B1 (de)
DE (1) DE3570514D1 (de)
GB (1) GB2176278B (de)
IN (1) IN166273B (de)
PH (1) PH22626A (de)
SG (1) SG22089G (de)
WO (1) WO1986001879A1 (de)

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JP4486727B2 (ja) * 1999-11-25 2010-06-23 高砂熱学工業株式会社 循環型クリーンルーム
DE10029200A1 (de) * 2000-02-21 2001-08-23 Data Disc Robots Gmbh Prozeßklimatisierung
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KR100524875B1 (ko) * 2003-06-28 2005-10-31 엘지.필립스 엘시디 주식회사 청정시스템
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KR101119851B1 (ko) * 2004-09-09 2012-03-16 국립대학법인 홋가이도 다이가쿠 기능소자, 기억소자, 자기기록소자, 태양전지,광전변환소자, 발광소자, 촉매반응창치 및 클린유닛
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US8003067B2 (en) * 2007-09-20 2011-08-23 Applied Materials, Inc. Apparatus and methods for ambient air abatement of electronic manufacturing effluent
US7819935B2 (en) * 2007-12-14 2010-10-26 Ge-Hitachi Nuclear Energy Americas Llc Air filtration for nuclear reactor habitability area
TWI382144B (zh) * 2008-01-04 2013-01-11 Fih Hong Kong Ltd 風淋室
US9048344B2 (en) 2008-06-13 2015-06-02 Kateeva, Inc. Gas enclosure assembly and system
US10442226B2 (en) 2008-06-13 2019-10-15 Kateeva, Inc. Gas enclosure assembly and system
US9604245B2 (en) 2008-06-13 2017-03-28 Kateeva, Inc. Gas enclosure systems and methods utilizing an auxiliary enclosure
US8383202B2 (en) 2008-06-13 2013-02-26 Kateeva, Inc. Method and apparatus for load-locked printing
US10434804B2 (en) 2008-06-13 2019-10-08 Kateeva, Inc. Low particle gas enclosure systems and methods
US8899171B2 (en) 2008-06-13 2014-12-02 Kateeva, Inc. Gas enclosure assembly and system
JP2010017662A (ja) * 2008-07-11 2010-01-28 Hitachi Appliances Inc 空気調和機用フィルタ及びそれを用いた空気調和機
SG172325A1 (en) 2008-12-23 2011-07-28 Xoma Technology Ltd Flexible manufacturing system
JP5401206B2 (ja) * 2009-08-10 2014-01-29 株式会社不二製作所 ブラスト室
US9795957B2 (en) * 2009-08-16 2017-10-24 G-Con Manufacturing, Inc. Modular, self-contained, mobile clean room
IN2012DN01645A (de) 2009-08-16 2015-06-05 G Con Llc
TW201217716A (en) * 2010-10-27 2012-05-01 Hon Hai Prec Ind Co Ltd Container data center
WO2012112775A2 (en) * 2011-02-16 2012-08-23 Fiorita John L Jr Clean room control system and method
FR2987388B1 (fr) * 2012-02-27 2014-03-21 Guy Tajouri Salle propre
NL2008520C2 (nl) * 2012-03-22 2013-09-25 Atrined Cleanair Technology B V Ventilatiesysteem in een plafond van een werkruimte.
EP3087623B1 (de) 2013-12-26 2021-09-22 Kateeva, Inc. Wärmebehandlung von elektronischen vorrichtungen
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JP6461195B2 (ja) 2014-04-30 2019-01-30 カティーバ， インコーポレイテッド 基板コーティングのためのガスクッション装置および技法
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CN107921163A (zh) * 2015-04-20 2018-04-17 塞尼斯有限责任公司 具有稀释过氧化氢(dhp)气体的洁净室及其使用方法
JP6576785B2 (ja) * 2015-10-16 2019-09-18 株式会社 ゼンショーホールディングス 無菌店舗システム
CN107796067A (zh) * 2017-03-06 2018-03-13 江苏嘉合建设有限公司 一种超净洁净室的建造方法
JP2019090576A (ja) * 2017-11-15 2019-06-13 株式会社桜アーク 清浄ユニット
AT520784A1 (de) * 2018-01-04 2019-07-15 Ing Siegfried Manschein Ges M B H Modulares Klimasystem sowie Verfahren zum Klimatisieren eines Innenraums
DE202018000123U1 (de) 2018-01-10 2018-02-07 ZLT Lüftungs- und Brandschutztechnik GmbH akustisch optiemiertes Einbaugehäuse
JP7183567B2 (ja) 2018-05-02 2022-12-06 Tdk株式会社 循環式ｅｆｅｍ
JP7240257B2 (ja) * 2019-05-29 2023-03-15 ダイキン工業株式会社 空調システム
EP3997279B1 (de) * 2019-08-15 2023-03-08 G-CON Manufacturing, Inc. Abnehmbares paneeldach für einen modularen, in sich geschlossenen mobilen reinraum
US20210148600A1 (en) * 2019-11-19 2021-05-20 Patrick D. Moloney HVAC System Air Intake Manager and Method of Using Same
WO2021111550A1 (ja) * 2019-12-04 2021-06-10 日立グローバルライフソリューションズ株式会社 空調システム
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Also Published As

Publication number Publication date
EP0196333A1 (de) 1986-10-08
SG22089G (en) 1989-07-14
GB8610935D0 (en) 1986-06-11
JPH0454140B2 (de) 1992-08-28
GB2176278A (en) 1986-12-17
GB2176278B (en) 1988-10-19
EP0196333A4 (de) 1987-02-12
EP0196333B1 (de) 1989-05-24
KR930009610B1 (ko) 1993-10-07
WO1986001879A1 (en) 1986-03-27
KR880700219A (ko) 1988-02-20
JPS6172947A (ja) 1986-04-15
PH22626A (en) 1988-10-28
IN166273B (de) 1990-04-07
US4693175A (en) 1987-09-15

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee