DE29823857U1 - Optical micro lens with variable focal length - Google Patents

Optical micro lens with variable focal length

Info

Publication number
DE29823857U1
DE29823857U1 DE29823857U DE29823857U DE29823857U1 DE 29823857 U1 DE29823857 U1 DE 29823857U1 DE 29823857 U DE29823857 U DE 29823857U DE 29823857 U DE29823857 U DE 29823857U DE 29823857 U1 DE29823857 U1 DE 29823857U1
Authority
DE
Germany
Prior art keywords
chamber
optical microlens
microlens according
channel
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29823857U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut fuer Physikalische Hochtechnologie eV
Original Assignee
Institut fuer Physikalische Hochtechnologie eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut fuer Physikalische Hochtechnologie eV filed Critical Institut fuer Physikalische Hochtechnologie eV
Priority to DE29823857U priority Critical patent/DE29823857U1/en
Publication of DE29823857U1 publication Critical patent/DE29823857U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (14)

1. Optische Mikrolinse mit variabler Brennweite, bestehend aus wenigstens einem plattenförmigen Substrat (2), in das mittels mikrosystemtechnischer Methoden wenigstens eine kreisrunde Ausnehmung zur Bildung einer Kammer (3) eingebracht ist, an die sich, in der Ebene des Substrats (2) liegend, wenigstens ein dünner Kanal (7) anschließt, genannte Kammer (3) beidseitig mit je einer optisch transparenten Membran (4, 41, 42), von denen zumindest eine als flexible Membran ausgebildet ist, derart abgedeckt und verschlossen ist, daß die den Kammerwandungsumfangsbereich (31) erfassenden Bereiche der Membran (4, 41, 42) mit diesem in eine formschlüssige Verbindung gebracht sind und im übrigen auch den Kanal (7) und stehengebliebene Bereiche des Substrats (2) erfassen, wobei zumindest der Kanal (7) mit einer weiteren steifen Abdeckung (20) versehen ist und die Kammer (3) vollständig und der Kanal (7) zumindest zum überwiegenden Teil mit einem optisch transparenten fluidischen Medium (5) gefüllt sind und das kammerabseitige Ende (70) des Kanals (7) mit druckbeaufschlagenden Mitteln (10) in Verbindung gebracht ist.1. Optical microlens with variable focal length, consisting of at least one plate-shaped substrate ( 2 ), in which at least one circular recess is made by means of microsystem technology methods to form a chamber ( 3 ), which lies in the plane of the substrate ( 2 ) , at least one thin channel ( 7 ) connects said chamber ( 3 ) on both sides with an optically transparent membrane ( 4 , 41 , 42 ), at least one of which is designed as a flexible membrane, is covered and closed in such a way that the chamber wall circumference region ( 31 ) sensing areas of the membrane ( 4 , 41 , 42 ) are brought into a positive connection therewith and also capture the channel ( 7 ) and remaining areas of the substrate ( 2 ), at least the channel ( 7 ) with a Another rigid cover ( 20 ) is provided and the chamber ( 3 ) completely and the channel ( 7 ) at least for the most part with an optically transparent arent fluid medium ( 5 ) are filled and the chamber-side end ( 70 ) of the channel ( 7 ) is connected to pressurizing means ( 10 ). 2. Optische Mikrolinse nach Anspruch 1, dadurch gekennzeichnet, daß das die wenigstens eine Kammer (3) und den wenigstens einen Kanal (7) aufnehmende Substrat (2) zusätzlich mit wenigstens emer weiteren Kammer (9) zur Aufnahme von druckbeaufschlagenden Mitteln versehen ist.2. Optical microlens according to claim 1, characterized in that the at least one chamber ( 3 ) and the at least one channel ( 7 ) receiving substrate ( 2 ) is additionally provided with at least one further chamber ( 9 ) for receiving pressurizing means. 3. Optische Mikrolinse nach Anspruch 1 und 2, dadurch gekennzeichnet, daß die druckbeaufschlagenden Mittel (10) durch einen regelbaren Widerstandsheizkörper (6) gebildet sind, der mit dem Boden der weiteren Kammer (9) in Verbindung gebracht ist.3. Optical microlens according to claim 1 and 2, characterized in that the pressurizing means ( 10 ) are formed by an adjustable resistance heater ( 6 ) which is connected to the bottom of the further chamber ( 9 ). 4. Optische Mikrolinse nach Anspruch 4, dadurch gekennzeichnet, daß das der Widerstandsheizkörper als Dünnschichtwiderstand ausgeführt ist. 4. Optical microlens according to claim 4, characterized in that the resistance radiator is designed as a thin-film resistor is.   5. Optische Mikrolinse nach Anspruch 1, dadurch gekennzeichnet, daß die vorgesehene optisch transparente und flexible Membran durch eine Polymerfolie gebildet ist, die kovalent an die Oberfläche des Substrats (2) gebunden ist.5. Optical microlens according to claim 1, characterized in that the provided optically transparent and flexible membrane is formed by a polymer film which is covalently bound to the surface of the substrate ( 2 ). 6. Optische Mikrolinse nach Anspruch 5, dadurch gekennzeichnet, daß der Polymerfolie eine Dicke in der Größenordnung von 1-20 µm gegeben ist.6. Optical microlens according to claim 5, characterized in that the polymer film has a thickness of the order of 1-20 microns given is. 7. Optische Mikrolinse nach Anspruch 5 und 6, dadurch gekennzeichnet, daß die Polymerfolie einen Elastizitätsmodul in der Größenordnung von 1 MFa bis 10 GPa aufweist.7. Optical microlens according to claim 5 and 6, characterized in that that the polymer film has a modulus of elasticity in the order of magnitude from 1 MFa to 10 GPa. 8. Optische Mikrolinse nach Anspruch 1, dadurch gekennzeichnet, daß die druckbeaufschlagenden Mittel (10) durch einen fluiddurchströmten Mikrokanal (10a) gebildet sind.8. Optical microlens according to claim 1, characterized in that the pressurizing means ( 10 ) are formed by a fluid-flow microchannel ( 10 a). 9. Optische Mikrolinse nach Anspruch 1, dadurch gekennzeichnet, daß die druckbeaufschlagenden Mittel (10) durch eine Druckkammer (10b) gebildet sind.9. Optical microlens according to claim 1, characterized in that the pressurizing means ( 10 ) are formed by a pressure chamber ( 10 b). 10. Optische Mikrolinse nach Anspruch 1, dadurch gekennzeichnet, daß die steife Abdeckung (20) mit einer den Membranbereich (4, 41, 42) erfassenden kreisrunden Ausnehmung (21) versehen ist, welche die effektive Apertur der Mikrolinse festlegt.10. Optical microlens according to claim 1, characterized in that the rigid cover ( 20 ) with a membrane area ( 4 , 41 , 42 ) is provided with a circular recess ( 21 ) which defines the effective aperture of the microlens. 11. Optische Mikrolinse nach Anspruch 10, dadurch gekennzeichnet, daß die steife Abdeckung (20) auswechselbar ist.11. Optical microlens according to claim 10, characterized in that the rigid cover ( 20 ) is replaceable. 12. Optische Mikrolinse nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, daß mehrere Mikrolinsen (1) in einer Ebene zu einem Linsenarray angeordnet sind. 12. Optical microlens according to one of the preceding claims, characterized in that a plurality of microlenses ( 1 ) are arranged in one plane to form a lens array. 13. Optische Mikrolinse nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, daß wenigstens zwei Mikrolinsen (1) übereinander mit sich einseitig erfassenden Membranfläche (41, 42) angeordnet sind.13. Optical microlens according to one of the preceding claims, characterized in that at least two microlenses ( 1 ) are arranged one above the other with a membrane surface ( 41 , 42 ) which detects on one side. 14. Verwendung einer optischen Mikrolinse nach einem der vorstehenden Ansprüche als Drucksensor derart, daß wenigstens eine Mikrolinse (1) mit ihrem kammerabseitigen Ende (70) an ein beliebig geartetes Druckgefäß oder einen von einem fluidischen Medium durchströmten Kanal angeschlossen ist, wobei die Mikrolinse (1) beleuchtet wird und Detektionsmittel (D) die Intensität des Lichtstrahls in Brennebene in Abhängigkeit vom Fokussierungsgrad erfassen und an Melde-, Steuer- oder Regelungseinrichtungen weiterleiten.14. Use of an optical microlens according to one of the preceding claims as a pressure sensor such that at least one microlens ( 1 ) with its chamber-side end ( 70 ) is connected to any type of pressure vessel or a channel through which a fluidic medium flows, the microlens ( 1 ) is illuminated and detection means (D) detect the intensity of the light beam in the focal plane as a function of the degree of focus and forward it to signaling, control or regulating devices.
DE29823857U 1998-03-27 1998-03-27 Optical micro lens with variable focal length Expired - Lifetime DE29823857U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE29823857U DE29823857U1 (en) 1998-03-27 1998-03-27 Optical micro lens with variable focal length

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29823857U DE29823857U1 (en) 1998-03-27 1998-03-27 Optical micro lens with variable focal length
DE19813552 1998-03-27

Publications (1)

Publication Number Publication Date
DE29823857U1 true DE29823857U1 (en) 2000-01-13

Family

ID=26045012

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29823857U Expired - Lifetime DE29823857U1 (en) 1998-03-27 1998-03-27 Optical micro lens with variable focal length

Country Status (1)

Country Link
DE (1) DE29823857U1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006009514A1 (en) * 2004-07-20 2006-01-26 Agency For Science, Technology And Research Variable focus microlens
CN100443924C (en) * 2006-12-19 2008-12-17 南京邮电大学 Electric tuning micro-fluid control variable focusing lens array chip
ES2332761A1 (en) * 2008-03-11 2010-02-11 Universidad Autonoma De Madrid Flexible membrane for a variable optical lens (Machine-translation by Google Translate, not legally binding)
DE102011113066A1 (en) 2011-09-09 2013-03-14 Rainer Schmidt Controlled optical element is filled with optical liquid and has volume that is formed from base surface and shape-variable top surface and is additionally contains side parts and membrane
DE10358906B4 (en) * 2003-12-16 2021-05-06 Carl Zeiss Meditec Ag Optical element, optical system and optical device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10358906B4 (en) * 2003-12-16 2021-05-06 Carl Zeiss Meditec Ag Optical element, optical system and optical device
WO2006009514A1 (en) * 2004-07-20 2006-01-26 Agency For Science, Technology And Research Variable focus microlens
US7898742B2 (en) 2004-07-20 2011-03-01 Rodriguez Fernandez Isabel Variable focus microlens
US8111466B2 (en) 2004-07-20 2012-02-07 Agency For Science, Technology And Research Variable focus microlens
CN100443924C (en) * 2006-12-19 2008-12-17 南京邮电大学 Electric tuning micro-fluid control variable focusing lens array chip
ES2332761A1 (en) * 2008-03-11 2010-02-11 Universidad Autonoma De Madrid Flexible membrane for a variable optical lens (Machine-translation by Google Translate, not legally binding)
DE102011113066A1 (en) 2011-09-09 2013-03-14 Rainer Schmidt Controlled optical element is filled with optical liquid and has volume that is formed from base surface and shape-variable top surface and is additionally contains side parts and membrane

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20000217

R150 Term of protection extended to 6 years

Effective date: 20010424

R157 Lapse of ip right after 6 years

Effective date: 20041001