CN1950725A - Electrowetting cell and method of manufacturing an electrowetting cell - Google Patents
Electrowetting cell and method of manufacturing an electrowetting cell Download PDFInfo
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- CN1950725A CN1950725A CN 200580014543 CN200580014543A CN1950725A CN 1950725 A CN1950725 A CN 1950725A CN 200580014543 CN200580014543 CN 200580014543 CN 200580014543 A CN200580014543 A CN 200580014543A CN 1950725 A CN1950725 A CN 1950725A
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Abstract
The electrowetting cell (15) comprises an outer wall (90) and an inner wall (80), said outer wall (90) being provided with extensions (85, 86) extending on opposing sides of the inner wall (80). The cell (15) is further provided with a membrane (45) for volume expansion and is sealed through an electroplated layer (95).
Description
The present invention relates to a kind of electric moistening unit that contains the shell of substrate and at least one sidewall, cavity of the common qualification of substrate and sidewall, this cavity contains electric wetting fluid, and this unit also contains the end that at least one is fixed to shell.
The invention still further relates to a kind of method of making electric moistening unit, this unit comprises the shell with substrate and sidewall, cavity that contains the first and second electric wetting fluids of the common qualification of substrate and sidewall.
The electricity moistening unit is the unit that passes through the meniscus refract light between two kinds of unmixing fluids.A kind of fluid in two kinds of fluids is an electrical isolation, and another kind conducts electricity.The shape of meniscus is variable under the influence of voltage between two electrodes, and an electrode in two electrodes is connected to conductive fluid, and another is connected to the surface of housing.This unit is known and for example can be used as lens or display.In the situation of using a unit, has light path by shell.
Electric moistening unit like this is for example known from WO-A 03/069380.This application discloses the lens that a kind of at least one inside surface of side wall is covered by hydrophobic fluid contact layer.When not applying voltage, be different from wetting state with respect to the fluid contact layer of conductive fluid with respect to the wetting state of the fluid contact layer of electrical insulation fluids.The variation of wetting state takes place under the influence that applies voltage.This causes the variation of the contact angle of osculatory place meniscus between fluid contact layer and fluid, the shape of regulating meniscus thus.Therefore, the shape of meniscus depends on the voltage that is applied.
Because electric moistening unit has optical characteristics and comprises fluid, so it is first important for obtaining the operation that fills unit completely and leak fluid is unsuitable like this after closed cell.Disclosed unit does not provide any solution that how to obtain such complete filling and prevent escape of liquid in the prior art.
Therefore first purpose of the present invention provides a kind of electric moistening unit of the classification of mentioning in opening paragraph, and it can be by complete filling and the leakage of fluid after preventing closed-cell.
Second purpose provides the class method for distinguishing of mentioning in opening paragraph, utilize it can obtain with industrial feasible mode complete filling.
Reaching first purpose is that the part of end is an inner wall section, protects end and shell like this, and outer wall has the extension that extends to first opposite side of inwall at the first and second side places because at least one sidewall of shell comprises inner and outer wall.
Obtain second purpose in having the unit of inner and outer wall, described outer wall has first and second extensions that extend at the opposite side place of inwall, said method comprising the steps of:
Provide outer wall and substrate, to form cavity;
Utilize the first and second electric wetting fluid cavity fillings;
Provide the end to make the end be immersed at least a fluid with ideal distance of distance substrate in cavity, part substrate and end and optional interface form described inwall;
The end is fixed to shell, because first extension of outer wall is positioned at the top of end.
Solution of the present invention is the unit with double-walled.Outer wall provides stable and sealing fully, and inwall is made of the element of continuous assembling.Owing to assemble continuously and double-walled, so can provide electric wetting fluid in the front, end.As a result, this end can be immersed in the fluid, is actually the fluid with least density.Some fluids will flow on the end, but still be retained in the outer wall.Immersion causes required complete filling.Because outer wall is present in the opposite side of inwall, reach sealing fully then.Bao Zhuan outer wall will only comprise two kinds of main materials then, and these two kinds of main materials can be connected to each other in reliable mode.Suitable combination is metal and glass.
This substrate can be the part of outer wall, but is preferably the unitary part that a part is an inner wall section.Liner may reside between substrate and the end.This is suitable but dispensable.The advantage of liner be for can have any required surface coating like this, for example above-mentioned fluid contact layer.Advantageously, this liner has the gap in its bottom.This makes the height of unit reduce.
Can imagine several embodiments that are used on the top of end, providing first extension.It for example can be the toughness extension of outer wall.Interchangeable scheme is to locate metal level by deposition technique under the help that instrument is exerted pressure.
In preferred embodiments, first extension be on the top of end as the clamping housing of independent sector assembling, and (simultaneously or continuously) is connected on the outer wall.This provides an effective assembly method.With machinery and chemical mode, for example locking member, additional bail (clamp), adhesive phase and confining bed are realized being connected reliably.Advantageously, use the connection and the protective seam of on described surface, growing.Grown layer is attached to the surface with chemical mode.Grown layer has identical thermal expansivity and is insensitive for non-resilient and irreversible expansion under Temperature Influence.Grown layer can grow into required thickness, so smoothly fall gap and height difference.Yet such grown layer is complete inertia, if be complete inertia when especially having oxide (can be native oxide).At last, grown layer is insensitive and do not have opening or a porous structure that allows molecular diffusion for the corrosion of any electric wetting fluid.Utilize such sealing, especially with the substrate of glass and the sealing of end, the unit that obtains seals hermetically.
In this specially suitable technology is to electroplate.This technology has such advantage: can use this technology on bulk level by complete unit is immersed in the electroplating bath.Yet the immersion of whole unit has the advantage that grown layer extends on complete outer wall and two extensions at the inwall either side like this.So strengthen the outer wall clutch features.
In another embodiment, at substrate and place, end, will fix on the opposite side place of cavity with first and second electric limits that at least a electric wetting fluid contacts.In electric moistening unit, need at least two electrodes, set the needed voltage of meniscus shape so that apply.At the opposite side place of meniscus, can apply this electrode at the inwall place.In this embodiment however, electrode exists at place, end and substrate place.This reality allows to use Metal Packaging rather than isolates for an electrode and connects.
Preferably, this substrate has an aperture, has described electrode in its end.This electrode can located to exist in the face of the substrate surface place of meniscus with away from the apparent surface of meniscus.The latter's improvement is most preferred, because do not need to utilize metal filled described aperture wherein: this fluid filled aperture.Yet the manufacturing of this electrode can integrate by being provided for the bonding jumper that outer wall is connected to substrate, and therefore provides sufficient sealing.
Preferred packaging has expansion member.For example this expansion member is known in JP-A2002/162506.The packing of knowing like this comprises the special chamber that exists near substrate, and separates by flexible cover with the unit.In the unit along with the increase of pressure, the lid of this toughness can be out of shape or even outwards elongation so that form the curved surface that extends to described chamber.The invention provides the possibility that this specimen chamber is set between inner and outer wall.
The more preferred of expansion member is flexible membrane (being the part of end).In this mode, the end more most of-promptly: the part that in light path, exists-be moved.Therefore, can compensate the increase of actual volume.This flexible membrane is special ring-type.End parts is divided into outer rim like this, barrier film and interior section.Normal place in this end needs not to be the plane.As explained in reference to the drawings, preferred outer rim under the pressure that clamps housing to pressing down.Yet this causes packing.Although not preferred, the peripheral edge portion of not getting rid of the end comprises other material except interior section.
This barrier film is more preferably formed by metal.Such material is kept out fluid effectively.Such material has the added benefit that barrier film can be used as an electrode of unit.If be provided at the connection that clamps between housing and the outer wall by electroplating to wait, barrier film also will have metal level so.The suitable thickness of membrane layer that on the one hand has enough stability and have enough toughness on the other hand is in the 5-30 micron dimension, and more preferably between 15 and 25 microns.This also depends on diaphragm material.In order to limit the thickness of barrier film, this barrier film can have insulating coating.
Substrate and end are preferably glass plate.Glass is inertia for electric wetting fluid.This glass can adopt the technical finesse as powder sand-blast (powder blasting), and metal level can be connected with it.Depend on the needs, one or more glass plates can have coating and superficial layer, comprise the IR-coating, the UV-absorber coatings, and antireflecting coating, but also can be lens.Such lens can utilize (replica) technology of duplicating to be made of superficial layer.Alignment characteristics can be included in the such duplicate that is formed by superficial layer.By other lens on place, bottom and top, this has guaranteed the suitable aligning of unit.
If unit of the present invention is as lens, then its suitable and other combination of lenses is to obtain required light path.The situation that not get rid of two electrowetting lens are part assemblies; In fact this provides zoom feature.Yet an interchangeable embodiment is the electrowetting lens that piles up.This electrowetting lens that piles up can be fit to by method manufacturing of the present invention.
In first embodiment that stackable unit is made, this substrate is arranged on the centre of the cellular construction that piles up at present.On a side of substrate, carry out first assembling and filling then, after the first side place finishes assembling and fills, on the second relative side, carry out second assembling and filling.Preferred two opposed ends have the flexible membrane that compensation volume expands.Provide outer wall in this structure with extension of supporting substrate, outer wall is half length of stackable unit.
In second embodiment that stackable unit is made, in outer wall, provide two kinds of unit in succession.The end of first module can be the substrate of Unit second, but dispensable.The simplest, provide liner to replace clamping housing.On this liner (this liner can be connected to outer wall preferably by electroplating), provide another substrate and another element of Unit second continuously.Yet such structure allows electrode to be positioned at substrate and the end does not need mutual coupling to close.
Replace piling up several electric moistening units, can apply piling up of an electric moistening unit and other optics and/or non-optical element outer wall.Except separate lenses and optical filter, imagination is assembled a kind of imageing sensor by this way: utilize any liner etc. to separate with required separation distance and electrowetting lens.It is the most effective having the such combination of imageing sensor, wherein in the surface with respect to the optical activity surface adhesive covered pads is set.Interchangeable scheme is, imageing sensor can assemble on the top of inserting mechanism's substrate, and the top of this insertion mechanism substrate has through hole so that the opposition side of contact optical active surface.The use of inserting mechanism's substrate (interposer substrate) itself is known in the field of semiconductor packages.
The advantage of the inventive method is that it can be implemented on wafer level or large volume level.Outer wall can be a plate, for example has the part of the printed circuit board (PCB) of aperture.Only described outer wall can be divided into independent encapsulation after filling and encapsulation step.Yet, even implement the manufacturing of unit individually, also can plating step take place in electroplating bath, allow a plurality of equipment to electroplate simultaneously.
In a further preferred embodiment, at least one of the overlapped surfaces of outer wall and inwall or substrate or end comprises the sealant that is used at pressure lower seal lap.Its advantage is this unit of sealing between its erecting stage.Apply the sealing extension for the unit when in other words, sealing this unit.Must remember to prevent leakage at the overlapped surfaces surrounding fluid.The sealing of this embodiment prevents escape of liquid by the path that is formed by scrambling in neighbouring surface.Another advantage of this embodiment is, because leak at assembling rear defence stopping leak, so the outside surface of this unit will not have the liquid that flows out internally after cleaning unit.Therefore, the application of preferred above-mentioned metal level can not be subjected to by the obstruction of new leak fluid.
Comprise that the advantage as the sealant of the organic composite of plastics or rubber is, this material easy deformation and or be pressed into neighbouring surface further in away from each other the zone, this zone is easy to leak most.Preferred sealing layer has conductive characteristic, is applied directly on the sealant by the mounting technique electroplating processes as electrogalvanizing.The electroplating process on the gap between the adjacent wall part has been quickened in the plating that is applied directly on the sealant.
The unit of the classification that the invention still further relates to a kind of manufacture method and mention in opening paragraph wherein provides the sealing of sealing.Because the end is connected on the shell by apply metal level on the surface of end and coupling part, this just is implemented.Explain that as above-mentioned the applied metal layer will bring the sealing of sealing.If metal level, or the structure of metal level is to extend on the top, both sides of unit, realized clamping so.Preferred applying method is to electroplate, but does not get rid of sol-gel deposition, sputter or chemical vapor deposition as metal or the combination of these deposition processs.Metal level will be connected to suitably in the surface of end with in the metal part of shell surface.
In optical recording apparatus or any other optical instrument, this unit can be used as the lens of camera.This unit can utilize other lens arrangement obtaining required light path, or even obtains zoom lens.Interchangeable scheme is, this unit is as display, and only needs in substrate and the end are optically transparent in such a case.This unit is also as sensor.
To further illustrate these and other aspect of unit of the present invention and method referring to accompanying drawing, its accompanying drawing is:
Fig. 1 illustrates the diagrammatic, cross-sectional figure of a unit of the present invention, wherein only narrates left half;
Fig. 2-7 is illustrated in the diagrammatic, cross-sectional figure of successive stages during the end of using in the manufacturing cell;
Fig. 8-16 illustrates the diagrammatic, cross-sectional figure of successive stages in the method for manufacturing cell, wherein the left half of description unit only.
Figure 17 illustrates a diagrammatic, cross-sectional figure of second embodiment of unit of the present invention.
Figure 18-19 illustrates a diagrammatic, cross-sectional figure of the 3rd embodiment of unit of the present invention.
This figure be summary rather than draw in proportion.Same reference numerals is represented same section in the different accompanying drawings.
Fig. 1 illustrates the embodiment according to electric moistening unit 15 of the present invention.Partial cross sectional view only is shown in this Fig. 1, promptly only is the left half of unit 15.Yet this unit 15 of combination, symmetry ground makes that unshowned right half is the mirror image of left half.These lens comprise fluid chamber, have the first fluid 51 and second fluid 52 that do not dissolve each other and contact with each other on meniscus 14.First fluid 51 is a silicone oil in this embodiment, alkane or other suitable electrical insulation fluids.Second fluid 52 is the water that contains salt solusion or other suitable conductive fluid in this embodiment.The side of chamber has electric insulation layer 8 and fluid contact layer 10, for example parylene.
According to this embodiment, shell 17 comprises inwall 80 and outer wall 90, and second cover plate 6 on second side 112 of unit 15.This inwall 80 comprises the electric insulation component 8 that utilizes fluid contact layer 10 coatings.This inwall 80 also comprises the part of end 4.This end (or first cover plate) 4 comprises the ring-type glass component 81 that is connected to interior section by expansible link 45.In preferred embodiments, the interior section of this ring-type glass component 81 and end 4 is by single glass plate manufacturing, as explaining referring to Fig. 2 to 7.This inwall 80 also comprises the end 61 of second cover plate 6.This second cover plate 6 has through hole 62, electrode 2 and metalling 63.In optional embodiments, this plate 6 can be replaced by structure similar or that be equal to first side 111 of unit 15, i.e. ring-type glass component, expansible link and cover plate.
The glass component 81 of inwall 80-ring-type also has ring-type insulating component 8 and end 61 these three parts to clamp between the projection 85 of outer wall 90 and annular enclosed member 86.At this this closure member 86 are a slice metals, but can be to have anything of conductive surface.This outer wall 90 comprises the plastics on the surface 91 with plating or the kernel of other material 92.The surface 91 of this plating also the sprayed metal layer 63 of second cover plate 6 around (circumfere).In this mode, provide mechanically stable to connect.
Fig. 2 to 7 is illustrated in the schematic cross section and makes as expansible link 46, has the consecutive steps of method of the substrate 200 of integrated diaphragm 210.Figure 20 illustrates substrate 200, and it has first surface 201 and opposing second surface 202.Substrate 200 is the glass plates with suitable thickness in this embodiment, for example the 0.1mm magnitude.
Fig. 3 is illustrated in 201,202 places, two surfaces and applies photoresist 205 substrate 200 afterwards.The photoresist material is to know originally in the affiliated field.
Fig. 4 is illustrated in the substrate 200 after composition and the development photoresist 205.The composition at first side, 201 places brings aperture 214.The composition at second side, 202 places causes the surface 215 of photoresist 205 that three-dimensional structure is arranged.Should surface 215 be forms of running surface in this embodiment.This surface structure can have the mode of aforementioned or other mechanically deform.Alternative, use senior photoetching technique.In other embodiment, use the photoresist layer 205 of molding technique so that required form to be provided.Should be appreciated that, do not need special photoresist material in this case.
Fig. 5 illustrates and applies membrane layer 225 substrate 200 afterwards.This membrane layer comprises for example having some flexible metals, although any other material also is suitable, as long as it and photoresist layer 205 compatibilities.If use a lot of metals to have enough toughness originally as thin layer.Example comprises gold, copper, nickel, aluminium and their alloy.Metal level can adopt suitable deposition technique, as sputter, chemical vapor deposition, also have wet-chemical technique.In this embodiment, illustrate and want patterned membrane layer 225, but dispensable.
Fig. 6 is illustrated in first side, 201 places by the substrate 200 after photoresist 205 compositions of composition.In the situation of glass plate 200, can advantageously adopt powder sand-blast (powerblasting) technology, yet do not get rid of any other such as etched technology.
Fig. 7 illustrates and removes photoresist 205 substrate 200 afterwards, and produces the substrate 200 with integrated diaphragm 220.Clearly visible, substrate 200 can extend in laterally.This barrier film 220 can have any suitable shape.Particularly preferably be ring-type.This substrate can contain a plurality of barrier films, and is suitable for wafer-level process in other step, or separated.Also can before removing photoresist 205, adopt such separating step.Although not shown, do not get rid of substrate and also comprise other layer at first or second side, 201,202 places at this.If when Semiconductor substrate is used as substrate 200, at the semiconductor element of this definable such as diode and transistor or trench capacitor.
Fig. 8 to 16 illustrates the diagrammatic, cross-sectional figure of the method for making electric moistening unit 15.Shown in this being the manufacturing of the embodiment of Fig. 1, is possible but make amendment within the scope of the invention and substitute.
Fig. 8 illustrates the first step in the assembling.At this, glass substrate 6 is arranged in the annular component 90.This annular component 90 is as outer wall, and has conductive surface.Although not needing whole surface all conducts electricity.This member 90 has extension 85, and its first side, 112 places at substrate 6 exist, and contact with the adhesive coating 63 of substrate 6.This adhesive coating 63 is a metal at this, as copper.Electrode 2 exists with identical first side 112 places of substrate 6.The hole 62 that this electrode 2 covers in the substrate 6.This hole 62 can be filled by conductive material, but is not such situation in this embodiment.This hole 62 and outer wall for example 90 are opposite to be acyclic, and only provides in the part.Can use other material to replace glass.If the unit is not lens, just do not need the substrate optical clear.For keeping substrate 6 to be connected, for example use adhesive coating with outer wall.
Fig. 9 is illustrated in second step result afterwards of assembling.At this, substrate 6 and outer wall 90 are connected to each other with metal level 91.This metal level 91 is adapted at electroplating in the electroplating bath.This metal level 91 extends around outer wall 90, and is connected with the adhesive coating 63 of substrate.This connects not only and exists at first side, 112 places of substrate, and also 115 places exist in the side.This illustrate but be not that in the reason shown in the other accompanying drawing electrode 2 also will have electrodeposited coating.Select the position of this electrode 2 to make and between electrode and outer wall, do not form electric bridge.In order to prevent that the insulating coating thickening can be provided with insulating coating at electrode 2 places.
Figure 10 is illustrated in and supplies in the outer wall 90 conductive fluid 52 and the result after on second side 113 of substrate 6.This fluid 52 is brine solutions in this embodiment.Ethanol etc. can be used as added solvent.This fluid-extended is in hole 62, with contact electrode 2.This electrode 2 is used as the closure (closure) of unit simultaneously.
Figure 11 is illustrated in and supplies with electrical insulation fluids 51 result afterwards.Electrical insulation fluids 51 is oil, for example alkane or silicone oil.Consider its low-density, after applying conductive fluid 51, provide electrical insulation fluids.Shown in meniscus shape and for the adhesion of second side 113 of substrate 6 be fully summary and needn't meet any physical influence.
Figure 12 is illustrated in and inserts liner 8 result afterwards.This is the situation of ring-type electric insulation component 8 with fluid contact layer 10 of parylene.This liner 8 has surface 9, and surface 9 can have adjustable surface structure or be used for suitably adhering to layer on the electrodeposited coating 91 of outer wall 90.This surface structure or layer can be any chemical kind, but also mechanical, such as locking member.In addition, this liner 8 has gap 64.This gap 64 has electrode 2 can be lower than first advantage that this liner 8 is provided with.Therefore, this electrode 2 is positioned at the light path outside, has reduced the diameter of unit like this.Second advantage in this gap is the angle of scalable meniscus 14 between conductive fluid 52 and electrical insulation fluids 51.As a result, reduced the minimum thickness of unit.The outer rim 61 of the substrate part of this liner 8 and inwall forms together.
Figure 13 is illustrated in the 6th step unit 15 afterwards of manufacturing.This step relates to the assembling of end 4.End 4 comprises inside, barrier film 45 and outside 81.4 first side, 111 places are provided with the instrument of exerting pressure 70 in the end.Preferably, before practical set, end 4 has the electrical insulation fluids layer at second side, 114 places.This guarantees not have between erecting stage bubble to form.Between erecting stage, end 4 is immersed in the fluid 51.As its result, the rest layers 55 of fluid forms at the first side place of end.Because externally 81 and outer wall 90 between leave narrow passage, this electrical insulation fluids 51 can be from the end 4 second side 114 flow to first side 111.
The outside 81 that Figure 14 is illustrated in end 4 is fixed to shell unit 15 afterwards.In fact this shell comprises liner 8 and outer wall 90.This realizes by the insertion that clamps housing 86.Clamp like this and/or make outside 81 towards liner 8 to pressing down.As a result, barrier film 45 enters the slight curvature position.This clamping housing has the surface that contacts with the plate surface layer 91 of outer wall 90.Preferably have one or more locking members.If desired, this locking member can be designed as in the passage 89 that extends between outside 81 and the outer wall 90.In this operation, inwall 80 is by adhesive coating 63, the outside 61 of substrate 6, liner 8, the outside 81 of end 4 and clamp housing 86 and be combined to form.
Figure 15 is illustrated in residue 55 unit 15 afterwards of removal tool 70 and electrical insulation fluids 51.Implement cleaning after removing step, the surface of feasible clamping housing 86 and barrier film 45 is a clean enough for step subsequently.
Figure 16 illustrates most crucial steps unit 15 afterwards in the mill.In this step, by being provided, sealant 95 strengthens in the connection that clamps between housing 86 and the outer wall 90.Sealing layer 95 is preferably electroplated in the appropriate electrical coating bath.Interchangeable scheme is that it can be the protective seam of knowing originally in the affiliated field, such as the layer based on epoxy resin.Sealant 95 extends in the barrier film 45 but this is dispensable in this embodiment.Preferably, sealing layer 95 provides suitable thickness so that fill any corner and the smooth exterior surface face is provided.Sealing layer 95 extends to first side 112 of substrate from first side 111 of end in this embodiment.Because sealant 95 also has compression feature thereupon, and outer wall 90 and its extension 85,86 are become one, so this is favourable.
Figure 17 illustrates the diagrammatic, cross-sectional figure of second embodiment of unit of the present invention.Unshowned in this embodiment is any plating sealant that covers the extension 85 of outer wall 80.In this embodiment, the nuclear 92 of outer wall is metallic channel, and it comprises projection 85 inherently.Second cover plate 6 with through hole 62, the housing member 8 and first cover plate 4 assemble in the mode of describing referring to Fig. 8 to 16 at this.Housing member 8 will be operated as an electrode usually, and for example is connected to groove 92, like this as a contact.
This first cover plate 4 be to select enough thickness in case under stress the continuous slab of bendable.In this embodiment, adopt glass plate.Between the housing member 8 and first cover plate 4, there is cavity 41.Under the expansion of at least a fluid 51,52, especially when temperature increases, first cover plate 4 with crooked so that enlarge the volume of unit.Under the situation that at least a fluid 51,52 shrinks, first cover plate with crooked so that reduce the volume of unit.Because electrical insulation fluids 51 is preferably oil and has than the bigger thermal expansivity of moisture second fluid 52, so first cover plate 4 of preferred bendable is arranged on the side of electrical insulation fluids 51.
Figure 18 illustrates the other embodiments according to electric moistening unit of the present invention.In Figure 19, illustrate in greater detail the left side of embodiment.In this embodiment, outer wall forms by cylindrical wall part 92 and annular enclosed member 86,12.Between annular enclosed member 86,12, seal in the mode similar with annular or ring-type insulating component 8 to other embodiment for glass plate 4,6.
Before the assembling of this embodiment, cylindrical wall part 92 has the layer 91 that comprises niflon.Niflon is the composition of Teflon (Teflon) and nickel, and its composition conducts electricity.The other example of said composition comprises Teflon and copper.Because such layer conduct electricity, and when employing based on such as the electroplating technology of the electrical way of electrogalvanizing the time, the final metal layer of using in other embodiment 95 also can directly be grown on niflon layer 91. Annular construction member 12,86 has niflon layer 11,13 in addition.
As this embodiment of following assembling.This assembling is just from cylindrical wall part 92.Should be inserted in the cylindrical wall part by annular enclosed member 12.On annular enclosed member 12 tops, connect glass plate or substrate 6 by bonding agent.On the top of glass plate or substrate 6, place annular or ring-type insulating component 8.In the mode similar first and second liquid are supplied in the cavity and with cover plate then and be placed on the liquid top to the mode of the embodiment description of morning.
Sealant or niflon layer have advantage, because material is pressed in the inhomogeneous part of overlapped surfaces, promote the material expansion by two neighbouring surfaces that relatively move during engaging process or afterwards.Like this relatively move can by the rotation and/or relative to each other repeatedly slidingsurface finish.The sealing layer preferably is applied on arbitrary neighbouring surface by deposition or such as the growth technique of zincincation.This technology allows to deposit exactly thin layer or the labyrinth that is suitable for sealing very narrow closure (closure) material, and this very narrow closure is present between the neighbouring surface in this embodiment.
Also can use the several additional features relevant in this embodiment with other embodiment.
Although not shown, utilize the plating sealant to obtain good result at this.Do not get rid of other structure that this plating sealant also can be applicable to contain element of fluid, and be not at all applications with inwall 80 and outer wall 90 and extension 85,86.The extension 85,86 that be also to be understood that the outer wall 80 that extends at first and second sides, 111,112 places is not an element separately, but growth or deposition part projection or connection.Especially, the plating connection as extension 86 is effective connection.
Claims (21)
1. electric moistening unit that contains the shell of substrate and at least one sidewall, its substrate and sidewall jointly limit the cavity that contains electric wetting fluid, and this unit comprises that also at least one is fixed to the end of shell, wherein at least one sidewall of shell comprises inner and outer wall, the part of its medial end portions is the part of inwall, and outer wall is by fixing described end and shell at the extension that extends with respect to the first and second side places of the external unit on the inwall side.
2. electric moistening unit as claimed in claim 1, wherein inwall comprises a part of substrate.
3. electric moistening unit as claimed in claim 2, wherein inwall also is included in the liner of the electrically insulating material between described substrate part and the described end sections.
4. electric moistening unit as claimed in claim 1, wherein the outer wall extension that extends at the first side place of inwall is the clamping housing that is connected to outer wall.
5. electric moistening unit as claimed in claim 4 wherein clamps housing by being connected to outer wall at the metal level of growing on the extension and on the outer wall.
6. electric moistening unit as claimed in claim 1 wherein limits first and second electrodes that contact with at least a electric wetting fluid at substrate with the place, end, at the cavity opposite side.
7. electric moistening unit as claimed in claim 6, wherein this substrate has aperture, has described electrode at its place, end.
8. electric moistening unit as claimed in claim 1, its medial end portions comprise the flexible membrane of the cavity volume expansion that allows sealing.
9. electric moistening unit as claimed in claim 2, wherein the extension at the inwall second side place is connected to substrate by the metal level that is grown on both.
10. electric moistening unit that contains the housing of substrate and at least one sidewall, the common cavity that contains electric wetting fluid that limits of substrate and sidewall, and this unit comprises that also at least one is fixed to the end of shell, and the metal level that its medial end portions utilization is applied on shank and the end surface is connected on the shell.
11. the electric moistening unit of claim 1 comprises overlapping outer wall and inwall or substrate or end sections, wherein in lap, at least one neighbouring surface is included in the sealant that is used to seal lap under the pressure.
12. as the electric moistening unit of claim 11, wherein the sealing layer comprises organic composite, such as the composition that comprises plastics or rubber.
13. as the electric moistening unit of claim 11, wherein the sealing layer has conductive characteristic.
14. as the electric moistening unit of claim 11, wherein the sealing layer comprises the nickel-PTFE composition such as niflon.
15. as the electric moistening unit of claim 11, wherein the sealing layer is implemented by deposition or growth technique.
16. method of making electric moistening unit, this electricity moistening unit contains the shell that has substrate and sidewall, sidewall has inner and outer wall, described outer wall has first and second extensions that extend at the opposite side place of inwall, the common cavity that contains the first and second electric wetting fluids that limits of substrate and sidewall said method comprising the steps of:
Provide outer wall and substrate, to form cavity;
Utilize the first and second electric wetting fluid cavity fillings;
Provide the end to make the end be immersed at least a fluid with ideal distance of distance substrate in cavity, part substrate and end and optional interface form described inwall;
The end is fixed to shell, because first extension of outer wall is positioned at the top of end.
17. as the method for claim 16, wherein extension is the clamping housing that separates that has connected outer wall on the end after only being positioned.
18., wherein clamp housing and link to each other with the metal level of on their surface, growing with outer wall as the method for claim 17.
19. image-capturing apparatus or imageing sensor comprise the electric moistening unit of arbitrary claim of claim 1 to 10.
20. an optical scanning device comprises the electric moistening unit of arbitrary claim of claim 1 to 10.
21. a display device includes the electric moistening unit of arbitrary claim of claim 1 to 10.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP04101996 | 2004-05-07 | ||
| EP04101996.9 | 2004-05-07 | ||
| EP04105940.3 | 2004-11-19 | ||
| EP05102398.4 | 2005-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1950725A true CN1950725A (en) | 2007-04-18 |
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Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200580014589XA Expired - Fee Related CN100478734C (en) | 2004-05-07 | 2005-05-03 | Electrowetting cell and method of manufacturing an electrowetting cell |
| CN 200580014543 Pending CN1950725A (en) | 2004-05-07 | 2005-05-03 | Electrowetting cell and method of manufacturing an electrowetting cell |
| CN 200580014593 Pending CN1950743A (en) | 2004-05-07 | 2005-05-04 | Electrowetting cell and method of manufacturing an electrowetting cell |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200580014589XA Expired - Fee Related CN100478734C (en) | 2004-05-07 | 2005-05-03 | Electrowetting cell and method of manufacturing an electrowetting cell |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200580014593 Pending CN1950743A (en) | 2004-05-07 | 2005-05-04 | Electrowetting cell and method of manufacturing an electrowetting cell |
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| Country | Link |
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| CN (3) | CN100478734C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101393320B (en) * | 2007-09-21 | 2010-08-25 | 群康科技(深圳)有限公司 | Electric moisten display device |
| CN101858996A (en) * | 2009-04-02 | 2010-10-13 | 索尼公司 | Liquid lens apparatus and manufacture method thereof |
| CN101866026A (en) * | 2009-04-16 | 2010-10-20 | 索尼公司 | Liquid lens apparatus and manufacture method thereof |
| CN101556515B (en) * | 2008-04-08 | 2011-03-30 | 瑞鼎科技股份有限公司 | Touch sensing assembly and touch sensing device |
| CN101639544B (en) * | 2008-07-28 | 2012-01-11 | 索尼株式会社 | Liquid lens apparatus and manufacturing method of the same |
| US8102379B2 (en) | 2008-03-26 | 2012-01-24 | Raydium Semiconductor Corporation | Touch sensing device and touch sensing apparatus |
| CN110312959A (en) * | 2017-02-14 | 2019-10-08 | Lg伊诺特有限公司 | Liquid lens and camera model and optical device comprising liquid lens |
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| CN101303422B (en) * | 2007-05-11 | 2012-06-27 | 奇美电子股份有限公司 | Lens unit and lens module using the same as well as flat panel display |
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| CN110780504A (en) * | 2019-10-28 | 2020-02-11 | 南京大学 | Electronic paper display method based on liquid flow control |
| CN113820767A (en) * | 2021-09-28 | 2021-12-21 | 渤远科学仪器(镇江)有限公司 | Electrowetting-driven zoom liquid lens with configurable initial focal length |
-
2005
- 2005-05-03 CN CNB200580014589XA patent/CN100478734C/en not_active Expired - Fee Related
- 2005-05-03 CN CN 200580014543 patent/CN1950725A/en active Pending
- 2005-05-04 CN CN 200580014593 patent/CN1950743A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101393320B (en) * | 2007-09-21 | 2010-08-25 | 群康科技(深圳)有限公司 | Electric moisten display device |
| US8102379B2 (en) | 2008-03-26 | 2012-01-24 | Raydium Semiconductor Corporation | Touch sensing device and touch sensing apparatus |
| CN101556515B (en) * | 2008-04-08 | 2011-03-30 | 瑞鼎科技股份有限公司 | Touch sensing assembly and touch sensing device |
| CN101639544B (en) * | 2008-07-28 | 2012-01-11 | 索尼株式会社 | Liquid lens apparatus and manufacturing method of the same |
| CN101858996A (en) * | 2009-04-02 | 2010-10-13 | 索尼公司 | Liquid lens apparatus and manufacture method thereof |
| CN101858996B (en) * | 2009-04-02 | 2013-03-20 | 索尼公司 | Liquid lens device and manufacturing method therefor |
| CN101866026A (en) * | 2009-04-16 | 2010-10-20 | 索尼公司 | Liquid lens apparatus and manufacture method thereof |
| CN110312959A (en) * | 2017-02-14 | 2019-10-08 | Lg伊诺特有限公司 | Liquid lens and camera model and optical device comprising liquid lens |
| US11598930B2 (en) | 2017-02-14 | 2023-03-07 | Lg Innotek Co., Ltd. | Liquid lens, camera module and optical device including the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1950743A (en) | 2007-04-18 |
| CN1973236A (en) | 2007-05-30 |
| CN100478734C (en) | 2009-04-15 |
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