CN1844959A - Electrically-controlled variable-focus liquid lens based on electrowetting-on-dielectric - Google Patents
Electrically-controlled variable-focus liquid lens based on electrowetting-on-dielectric Download PDFInfo
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- CN1844959A CN1844959A CN 200610080728 CN200610080728A CN1844959A CN 1844959 A CN1844959 A CN 1844959A CN 200610080728 CN200610080728 CN 200610080728 CN 200610080728 A CN200610080728 A CN 200610080728A CN 1844959 A CN1844959 A CN 1844959A
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Abstract
The invention relates to an electric control focal variable fluid lens, based on the medium electric wetting, belonging to the optical focal variable lens. The invention comprises a hollow chamber that containing one conductive or insulated or part insulated ring and two fluids while it is clamped between the transparent basic plate and the transparent cover plate; the transparent basic plate is coated by the conductive film and hydrophobic insulated medium film with special patterns; the bottom of ring has hydrophilous nature, while the top and inner and outer walls have hydrophobic property; the bus of inner wall of ring is a straight line or curve which can be bended in any angle; the ring is parallel with the basic plate and the cover plate with some distance between them. The invention can make conductive or polar fluid in the center by themselves, with simple structure, lower cost, non mechanical movable elements, large focal variable range, high speed, clear image, and lower power consumption. It can be used in photo telephone, endoscope, etc.
Description
Technical field
The invention belongs to optical zoom lens field, particularly the electric control zooming fluid lens that powers on wetting based on medium.
Background technology
Shooting mobile phone has become in the present consumer electronics product the most salable a kind of, yet the captured picture quality that comes out of shooting mobile phone also has very big distance from people's expectation.Except employed cmos imaging chip pixel was low, another major defect of shooting mobile phone was to have adopted the microminiature lens of fixed focal length, therefore caused all non-constant of light collection and resolution characteristic.In order further to improve image quality, except with the pixel of cmos imaging chip from present hundreds thousand of increasing to 1,000,000 magnitudes, adopting the optical system with microminiature zoom lens is the inexorable trend of its development.
Zoom lens are the key elements in many optical systems such as camera, video camera, microscope, telescope.The traditional zoom camera lens generally by two or more poly-lens combine, some in addition also need in conjunction with other opticses such as prisms.They normally utilize mechanical hook-ups such as motor and gear to regulate relative position between lens, thereby realize zoom.Owing to there is a mechanical movable member, this type of camera lens zoom rate is slow, cost an arm and a leg, less robust, and is difficult for realizing microminaturization, so they are not suitable for portable microminiature optical systems such as shooting mobile phone.The research and development miniature zooming lens that zooming range is big, speed is fast, degree of distortion is little, reliability is high and cheap have become international in recent years research and development focus.
Proposed now multiple miniature zooming lens arrangement based on different mechanisms, wherein (electrowetting on dielectric, the liquid zoom lens of EWOD) developing is the most noticeable to utilize electrowetting effect on the medium.So-called EWOD is meant that the electromotive force that utilizes solid-state hydrophobic medium layer lower electrodes comes the surface tension of controlling liquid, thereby changes the contact angle between liquid and the dielectric layer surface.Different with the zoom mode of traditional zoom lens (regulating the relative position between lens), the minisize liquid zoom lens are the main body of lens with micro-transparency liquid, thereby the shape of utilizing EWOD to change liquid realizes the function of zoom.Thisly realize that by changing liquid surface curvature the lens of zoom have many good qualities: because non mechanical movable is highly suitable for to reliability and the demanding occasion of durability it; The lens arrangement compactness is small and exquisite and power consumption is very low, is highly suitable for portable equipments such as endoscope and shooting mobile phone; Another outstanding advantage based on the fluid zoom lens of EWOD is that lens performance improves along with reducing of size, and promptly size is more little, and the lens zoom response time is short more, and lens are subjected to the influence of gravity and inertia more little, and the adjustable extent of focal length is wider.
The report of at present relevant liquid zoom lens structure based on EWOD as:
The S.Kwon of California, USA university and Luke P.Lee have proposed a kind of prototype of the microfluid zoom lens based on EWOD in document " S.Kwon; L.P.Lee.Focal Length Control By Microfabricated Planar Electrodes-Based LiquidLens (μ PELL) [A] .11th International Conference on Solid-State Sensors andActuators; Transducers ' 01; 2001. " in calendar year 2001, be characterized in the hemispherical interface between air and electrically conducting transparent drop as lens, and adopt capacitive coupling to apply voltage, the optical distortion of having avoided electrode directly to insert in the drop being caused.But this structure does not have optical axis from characteristic placed in the middle, and is subjected to gravity effect serious, when device tilts or shakes, can influence optical axis position.
The people such as T.Krupenkin of Bell Laboratory in 2003 and U.S. Lucent Technologies propose a kind of new fluid zoom lens structure in document " T.Krupenkin; S.Yang; P.Mach.Tunable Liquid Microlens.Applied Physics Letters; 2003; 82 (3): 316-31 ", be characterized in four independently the control electrode symmetrical expression making at grade, be the vertical focal lengths of scalable lens, the three-dimensional adjustability of lens focus is finally realized in the lateral attitude of scalable liquid self again.
The B.Berge of France UMR spectrographic laboratory and Varioptic company etc. are at document " B.Berge; J.Peseux.Variable Focal Lens Controlled By an External Voltage:An Application ofElectrowetting.European Physical Journal E; 2000; 3 (2); 159-163. ", " C.Gabay; B.Berge; G.Dovillaire; et al.Dynamic Study of A Varioptic Variable Focal Lens[J] .Proceedings of SPIE-The International Society for Optical Engineering; 2002; 4767:159-165 " and " B.Berge.Liquid Lens Technology:Principle of Electrowetting BasedLenses and Applications to Imaging.18th IEEE International Conference on MicroElectro Mechanical Systems, MEMS 2005,2005,227-230 " in; and the S.Kuiper of research laboratory, Dutch Philip is at document " S.Kuiper, B.H.W.Hendriks.Variable-Focus Liquid LensFor Miniature Cameras.Applied Physics Letters, 2004,85 (7): 1128-1130. " and " B.Hendriks, S.Kuiper.Through A Lens Sharply.IEEE Spectrum, 2004,41 (12): 20-24. " in, reported their liquid zoom lens of laboratory, place research and development and reached the practicability level.Varioptic company transferred Korea S Samsung with its production technology in 2004, just produce in batches at the beginning of 2006 with the scale of 100,000 of monthly outputs, plan realizes amounting to 1,000,000/month production scale in the near future, and Samsung has announced to have installed this liquid zoom lens in the shooting mobile phone of up-to-date listing.The liquid zoom lens structure of Varioptic company and the research and development of research laboratory, Philip is very similar, they all are the closed structures that adopts solid two kinds of immiscible liquid of being made up of transparency carrier, electric conductivity annulus and transparent cover plate, wherein the bottom of electric conductivity annulus directly closely contacts with transparency carrier, the contact region of its top and inwall and liquid all is coated with hydrophobic film, and its bottom does not contact with liquid with outer wall.What the two key distinction structurally was that the former adopts is that inwall is conical electric conductivity annulus, is that inwall is columniform electric conductivity annulus and the latter adopts.
Summary of the invention
The objective of the invention is to propose the electric control zooming fluid lens that powers on wetting based on medium, described electric control zooming fluid lens is the hollow chamber that an annulus and two kinds of immiscible fluids are housed between transparency carrier and transparent cover plate, it is characterized in that annulus and substrate, cover plate are parallel to each other, and between annulus and substrate, the cover plate spacing is arranged respectively; Described annulus has electric conductivity or insulativity or minor insulation, its lower surface possess hydrophilic property film, and the interior lateral wall of annulus top surface and annulus has hydrophobic film.
Described spacing is 5 microns～5 millimeters.
Cover conductive film and hydrophobicity insulating medium film on the described transparency carrier successively.Described hydrophobicity insulating medium film is the composite membrane of dielectric insulating film and hydrophobic material film or the dielectric insulating film with hydrophobic homogenous material.
Described conductive coating is tin indium oxide (ITO) transparent conductive film or metallic aluminium (Al) film.
The bus of described circle ring inner wall is straight line or the curve with any angle of inclination.
Two kinds of immiscible fluids of filling in described hollow chamber and the annulus, first insulativity liquid or gas, it two is electric conductivity or polar liquid; Have different refraction coefficients and identical or different density, and electric conductivity or polar liquid are among the encirclement of insulativity fluid.
Described electric control zooming fluid lens, its agent structure is the hollow chamber that an electric conductivity annulus and two kinds of immiscible fluids are housed between transparency carrier and transparent cover plate; Its four kinds of structures are respectively,
A. the lower surface possess hydrophilic property of electric conductivity annulus, the interior lateral wall of annulus top surface and annulus has hydrophobicity;
B. the lower surface of minor insulation annulus is coated with conductive film and carries out water wettability and handle, and the interior lateral wall of annulus top surface and annulus has hydrophobicity;
C. the lower surface of minor insulation annulus is carried out the water wettability processing, and the interior lateral wall of annulus top surface and annulus has hydrophobicity; The madial wall of annulus is coated with conductive film and hydrophobic film successively;
D. the lower surface of insulativity annulus is carried out the water wettability processing, and the interior lateral wall of annulus top surface and annulus has hydrophobicity;
The invention has the beneficial effects as follows that the hydrophilic surface pinning that utilizes annulus bottom lives electric conductivity or the polar liquid between annulus and substrate, by the localizing electrode of control on the annulus with the voltage between the hydrophobicity electrode of substrate or by controlling the voltage between hydrophobicity substrate top electrode, change the contact angle between electric conductivity or polar liquid and hydrophobicity substrate surface, the curvature and the position that cause two kinds of fluid interfaces in the annulus change, thereby realize the function of zoom lens.Said structure can realize conducting liquid in the fluid lens from placed in the middle, have the advantages that technology is simple, cost is low, structure is flexible, zoom rate is fast, scope is wide, and imaging is clear, power consumption is little.
Description of drawings
Fig. 1 is the structural representation of an example powering on based on medium the fluid zoom lens wetting.
Fig. 2 is the structural representation of another example of powering on based on medium the fluid zoom lens wetting.
Fig. 3 is the structural representation of the 3rd example powering on based on medium the fluid zoom lens wetting.
Fig. 4 is the vertical view of transparency electrode in the 3rd example.
Fig. 5 is the structural representation of the 4th example powering on based on medium the fluid zoom lens wetting.
Fig. 6 is the vertical view of non-transparent electrode in the 4th example.
Fig. 7 is the structural representation of the 5th example powering on based on medium the fluid zoom lens wetting.
Fig. 8 is the zoom lens imaging effect figure of present embodiment.
Embodiment
The present invention proposes the electric control zooming fluid lens that powers on wetting based on medium.Its structure is to be hollow chamber that an annulus and two kinds of fluids are housed between transparency carrier and transparent cover plate, and annulus and substrate, cover plate are parallel to each other, and between annulus and substrate, the cover plate spacing is arranged respectively.
Above-mentioned electric control zooming fluid lens comprises four kinds of implementations:
A. the hollow chamber that an electric conductivity annulus and two kinds of fluids are housed between transparency carrier and transparent cover plate; The lower surface possess hydrophilic property of electric conductivity annulus, the interior lateral wall of annulus top surface and annulus has hydrophobicity.
B. between transparency carrier and transparent cover plate be equipped with a minor insulation annulus and and the hollow chamber of two kinds of fluids; The lower surface of minor insulation annulus is coated with conductive film and carries out water wettability and handle, and the interior lateral wall of annulus top surface and annulus has hydrophobicity.
C. the hollow chamber that a minor insulation annulus and two kinds of fluids are housed between transparency carrier and transparent cover plate; The lower surface of minor insulation annulus is carried out the water wettability processing, and the interior lateral wall of annulus top surface and annulus has hydrophobicity; The madial wall of annulus is coated with conductive film and hydrophobic film successively.
D. the hollow chamber that an insulativity annulus and two kinds of fluids are housed between transparency carrier and transparent cover plate; The lower surface of insulativity annulus is carried out the water wettability processing, and the interior lateral wall of annulus top surface and annulus has hydrophobicity.
Cover conductive film and hydrophobicity dielectric insulating film on the above-mentioned transparency carrier of the present invention successively with special pattern; The hydrophobicity dielectric insulating film can be the dielectric insulating film with hydrophobic homogenous material, also can be the composite membrane of dielectric insulating film and hydrophobic material film.
The bus of described electric conductivity or insulativity or minor insulation circle ring inner wall can be straight line or the curve with any angle of inclination; Annulus and substrate, cover plate are parallel to each other, and with both spacing be 5 microns～5 millimeters.
Be filled with a kind of insulativity liquid or gas and a kind of conductive liquid in described hollow chamber and the annulus, these two kinds of fluids are immiscible, have different refraction coefficients and identical or different density, and conductive liquid is among the encirclement of insulativity fluid.
Described conductive film is tin indium oxide transparent conductive films such as (ITO) or aluminium metallic films such as (Al).
Exemplify embodiment below in conjunction with accompanying drawing the present invention is further described, but be not the fluid lens structure of the present invention's proposition and preparation technology's qualification thereof.
Example 1
As shown in Figure 1.On a transparency carrier 11, be coated with transparent conductive film 13 and insulating medium film 14 successively, because selected dielectric insulating film has certain water wettability, so also be coated with strong-hydrophobicity film 18 thereon.Be full of in the hollow chamber 15 a kind of insulativity liquid 19 and a kind of electric conductivity or polar liquid 16 are arranged.Two kinds of liquid are all transparent and immiscible, have different refractive indexes and enough close density.For making conductive liquid or polarity 16 be in the center, insert an electric conductivity annulus 17 with through hole, the bottom surface of annulus 17 and substrate 11 are parallel and have certain interval between the two, and electric conductivity or polar liquid 16 are in this gap and annulus 17 through holes.The bus of the through hole of annulus 17 can be the straight line with any angle of inclination as required, also can be arc curve.Conductive ring 17 lower surface possess hydrophilic properties and directly contacting with electric conductivity or polar liquid, all the other each faces all are coated with hydrophobic coating 18.Above chamber 15, be placed with a transparent cover plate 12, make whole chamber airtight.
When no impressed voltage, electric conductivity or polar liquid 16 will be in diagram A condition naturally." O " represents the axis of the through hole of annulus 17, and electric conductivity or polar liquid 16 will be that axis is stable in the annulus 17 with O all the time, make O overlap with lens axis.
When conductive film 13 and 17 of conductive rings apply certain voltage, corresponding the reducing of contact angle meeting between electric conductivity or polar liquid 16 and substrate surface, and the coboundary of liquid 16 is clamped at the outer boundary place of annulus 17 bottom hydrophilic surfaces, thereby cause that the conducting liquid in the annulus moves downward the state to B, make the liquid level position and the curvature at two kinds of fluid interface places that corresponding the variation be taken place, regulated the focal length of lens thus.
Example 2
Shown in Figure 2, that describes in part such as transparency carrier 11, transparent cover plate 12, transparent conductive film 13, insulating medium film 14, hydrophobic film 18, chamber 15, electric conductivity or polar liquid 16, insulativity liquid 19 and central shaft O and the example 1 shown in Figure 1 is identical.The state that A and B describe equally also respectively representative do not power up and apply conducting liquid present position after the certain voltage.
In this example, to have one equally be the through hole of axle with O to the insulativity annulus 21 that is used for stablizing electric conductivity or polar liquid 16.Insulativity annulus 21 can self have hydrophobicity, also can become hydrophobicity by the surface-treated method, and its lower surface is coated with hydrophilic conductive layer 22, with provide one with the electrically contacting of electric conductivity or polar liquid 16.The through hole bus of annulus 21 shown in Figure 2 is a circular arc, when when conductive layer 22 and 13 of transparent conductive films apply certain voltage, corresponding the reducing of contact angle meeting between conducting liquid and substrate surface, thereby cause that the conducting liquid in the annulus moves downward, liquid level becomes the concavity attitude shown in the B by the convex attitude shown in the A, thus the remarkable range of adjustment of expansion lens focal length.
Example 3
Shown in Figure 3, that describes in part such as transparency carrier 11, transparent cover plate 12, insulating medium film 14, hydrophobic film 18, electric conductivity or polar liquid 16, insulativity liquid 19 and central shaft O and the example 1 shown in Figure 1 is identical.The state that A and B describe equally also respectively representative do not power up and apply conducting liquid present position after the certain voltage.
In this example, annulus and chamber are connected as a single entity and form the chamber 31 with central through hole, have so just simplified the fixation problem of annulus.In chamber 31, be distributed with several small through hole 33 around the central through hole in addition, make that two parts insulativity liquid 19 interconnects up and down.Lower surface is carried out water wettability and is handled 32, and remainder carries out hydrophobicity to be handled.Transparency electrode 13 on the transparency carrier 11, insulating medium film 14 and hydrophobic film 18 all are etched into special pattern by photoetching method, and wherein the figure of transparency electrode is etched to mutual disconnected two parts 13A and 13B as shown in Figure 4.Electric conductivity or polar liquid 16 directly contact with transparency electrode 13B.When applying certain voltage between transparency electrode 13A and 13B, liquid 16 will be in state shown in the B.
Example 4
That describes in parts such as shown in Figure 5, transparency carrier 11, transparent cover plate 12, insulating medium film 14, hydrophobic film 18, electric conductivity or polar liquid 16, insulativity liquid 19, chamber 31, water wettability handle 32, small through hole 33 and central shaft O and the example 3 shown in Figure 3 is identical.The state that A and B describe equally also respectively representative do not power up and apply conducting liquid present position after the certain voltage.
Different with example 3 is that this example adopts the non-transparent electrode scheme.The conductive film 41 that covers on the transparency carrier is Cai Yong Aluminum metallic films such as (Al).Conductive film 41 is etched into special pattern by photoetching method, and its vertical view as shown in Figure 6.
Figure 7 shows that the structural representation of example 3.That describes in part such as transparency carrier 11, transparent cover plate 12, insulating medium film 14, hydrophobic film 18, electric conductivity or polar liquid 16, insulativity liquid 19, hollow chamber 31, small through hole 33, central shaft O and transparent conductive film 13A, 13B and the example 3 shown in Figure 3 among the figure is identical.The state that A and B describe equally also respectively representative do not power up and apply conducting liquid present position after the certain voltage.
In this example, be coated with conductive film 52, dielectric insulating film 51 and hydrophobic film 18 on the central through hole inwall of chamber 31 successively.When not applying voltage between transparent conductive film 13A and the 13B, electric conductivity or polar liquid 16 will be in the A position; When applying a voltage to 13A and 13B, conduction or polar liquid 16 will be in the B position; If apply certain voltage this moment again between conductive film 52 and transparency electrode 13B, then electric conductivity or polar liquid 16 will be in position shown in the C.
The purpose of introducing electrode 52 is to regulate the focal length of lens to a greater degree.The bus of the central through hole of chamber 31 can be the straight line with any pitch angle, also can be arc curve.Especially, when bus is that straight line and pitch angle are 90 when spending, central through hole is the cylindrical upright through hole, put on the position that voltage between transparent conductive film 13A and the 13B only can change liquid lens this moment, and the voltage that puts between transparent conductive film 13B and the conductive film 52 only can change the curvature of lens, but has so just realized all fluid zoom lens of independent regulation of lens position and curvature.
Make example:
1, being transparency carrier 11 with the thick transparency glass plate of 1-2mm, is the ITO material source with the ITO target in the vacuum sputtering platform, and sputtering ITO forms transparent conductive film 13; Adopt spin-coating method on transparent conductive film 13, to make the hydrophobic film 18 (Teflon of thick insulating medium layer 14 of 1-2 μ m (polyimide ZKPI-306) and 20nm successively then
AF1600).
2, with brass be starting material, adopt machining process to make the conductive ring 17 of required form, its surface is by dipping Teflon
AF1600 carries out hydrophobicity to be handled; The lower surface of conductive ring 17 is removed existing hydrophobic layer through mechanical buffing, exposes to have certain hydrophilic brass.
3, with the deionized water be polar liquid 16, air is the insulativity fluid 19 immiscible with it.
4, adopting transparency glass plate is transparent cover plate 12; Hollow chamber 15,31 adopts ambroin through being machined into required form.
The zoom lens imaging effect of present embodiment as shown in Figure 8.The object to be imaged (rubber person of low position) is positioned at 40cm place before the lens, when not powering up because lens are less than to this object focus, become that image blurring unclear (Fig. 8 a); When impressed voltage was adjusted to 37V, lens were to this object blur-free imaging (Fig. 8 b).The lens capacitance value that records is about 300pF, and finishing the energy that a time zoom consumed only is 0.2 μ J.The change amount of lens refractive index reaches 12-40D, is 3 to 10 times of unidimensional human eye down.
Claims (7)
1. electric control zooming fluid lens that powers on wetting based on medium, described electric control zooming fluid lens is the hollow chamber for an annulus and two kinds of immiscible fluids are housed between transparency carrier and transparent cover plate, it is characterized in that annulus and substrate, cover plate are parallel to each other, and between annulus and substrate, the cover plate spacing is arranged respectively; Described annulus has electric conductivity or insulativity or minor insulation, its lower surface possess hydrophilic property film, and the interior lateral wall of annulus top surface and annulus has hydrophobic film.
2. according to the described electric control zooming fluid lens that powers on wetting based on medium of claim 1, it is characterized in that described spacing is 5 microns～5 millimeters.
3. according to the described electric control zooming fluid lens that powers on wetting based on medium of claim 1, it is characterized in that covering successively on the described transparency carrier conductive film and hydrophobicity insulating medium film.Described hydrophobicity insulating medium film is the composite membrane of dielectric insulating film and hydrophobic material film or the dielectric insulating film with hydrophobic homogenous material.
4. according to claim 1 or the 2 described electric control zooming fluid lens that power on wetting based on medium, it is characterized in that described conductive coating is indium tin oxide transparent conducting film or metallic aluminium film.
5. according to the described electric control zooming fluid lens that powers on wetting based on medium of claim 1, the bus that it is characterized in that described circle ring inner wall is straight line or the curve with any angle of inclination.
6. according to the described electric control zooming fluid lens that powers on wetting based on medium of claim 1, it is characterized in that two kinds of immiscible fluids of filling in described hollow chamber and the annulus, first insulativity liquid or gas, it two is electric conductivity or polar liquid; Have different refraction coefficients and identical or different density, and electric conductivity or polar liquid are among the encirclement of insulativity fluid.
7. according to the described electric control zooming fluid lens that powers on wetting based on medium of claim 1, it is characterized in that described electric control zooming fluid lens, its agent structure is the hollow chamber that an electric conductivity annulus and two kinds of fluids are housed between transparency carrier and transparent cover plate; Its four kinds of structures are respectively,
A. the lower surface possess hydrophilic property of electric conductivity annulus, the interior lateral wall of annulus top surface and annulus has hydrophobicity;
B. the lower surface of minor insulation annulus is coated with conductive film and carries out water wettability and handle, and the interior lateral wall of annulus top surface and annulus has hydrophobicity;
C. the lower surface of minor insulation annulus is carried out the water wettability processing, and the interior lateral wall of annulus top surface and annulus has hydrophobicity; The madial wall of annulus is coated with conductive film and hydrophobic film successively;
D. the lower surface of insulativity annulus is carried out the water wettability processing, and the interior lateral wall of annulus top surface and annulus has hydrophobicity.
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| CN100443924C (en) * | 2006-12-19 | 2008-12-17 | 南京邮电大学 | Electric tuning micro-fluid control variable focusing lens array chip |
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| US9182521B2 (en) | 2010-05-14 | 2015-11-10 | Johnson & Johnson Vision Care, Inc. | Liquid meniscus lens including variable voltage zones |
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| JP2002162506A (en) * | 2000-11-27 | 2002-06-07 | Canon Inc | Optical element, optical device and photographing device |
| WO2003071335A2 (en) * | 2002-02-20 | 2003-08-28 | Koninklijke Philips Electronics N.V. | Display apparatus |
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| CN100443924C (en) * | 2006-12-19 | 2008-12-17 | 南京邮电大学 | Electric tuning micro-fluid control variable focusing lens array chip |
| CN102884454A (en) * | 2010-05-14 | 2013-01-16 | 庄臣及庄臣视力保护公司 | Arcuate liquid meniscus lens |
| CN102884454B (en) * | 2010-05-14 | 2015-07-15 | 庄臣及庄臣视力保护公司 | Arcuate liquid meniscus lens |
| US9182521B2 (en) | 2010-05-14 | 2015-11-10 | Johnson & Johnson Vision Care, Inc. | Liquid meniscus lens including variable voltage zones |
| CN103764070A (en) * | 2011-08-31 | 2014-04-30 | 庄臣及庄臣视力保护公司 | Processor controlled intraocular lens system |
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| CN105865979A (en) * | 2016-03-30 | 2016-08-17 | 南京邮电大学 | Apparatus and method for measuring electrowetting effect of micro-droplet |
| CN105865979B (en) * | 2016-03-30 | 2019-03-12 | 南京邮电大学 | A kind of apparatus and method measuring microlayer model electrowetting |
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