CN103033925A - Method for manufacturing electrowetting display - Google Patents
Method for manufacturing electrowetting display Download PDFInfo
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- CN103033925A CN103033925A CN2012100253608A CN201210025360A CN103033925A CN 103033925 A CN103033925 A CN 103033925A CN 2012100253608 A CN2012100253608 A CN 2012100253608A CN 201210025360 A CN201210025360 A CN 201210025360A CN 103033925 A CN103033925 A CN 103033925A
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- OHABWQNEJUUFAV-UHFFFAOYSA-N dichloro-methyl-(3,3,3-trifluoropropyl)silane Chemical compound C[Si](Cl)(Cl)CCC(F)(F)F OHABWQNEJUUFAV-UHFFFAOYSA-N 0.000 description 6
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
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- 229910000077 silane Inorganic materials 0.000 description 6
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- CHBOSHOWERDCMH-UHFFFAOYSA-N 1-chloro-2,2-bis(4-chlorophenyl)ethane Chemical compound C=1C=C(Cl)C=CC=1C(CCl)C1=CC=C(Cl)C=C1 CHBOSHOWERDCMH-UHFFFAOYSA-N 0.000 description 3
- KOUONPVXNPOEHQ-UHFFFAOYSA-N 2-[dimethoxy(propyl)silyl]oxyacetamide Chemical compound CCC[Si](OC)(OC)OCC(N)=O KOUONPVXNPOEHQ-UHFFFAOYSA-N 0.000 description 3
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 3
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- BNCXNUWGWUZTCN-UHFFFAOYSA-N trichloro(dodecyl)silane Chemical compound CCCCCCCCCCCC[Si](Cl)(Cl)Cl BNCXNUWGWUZTCN-UHFFFAOYSA-N 0.000 description 3
- PYJJCSYBSYXGQQ-UHFFFAOYSA-N trichloro(octadecyl)silane Chemical compound CCCCCCCCCCCCCCCCCC[Si](Cl)(Cl)Cl PYJJCSYBSYXGQQ-UHFFFAOYSA-N 0.000 description 3
- RCHUVCPBWWSUMC-UHFFFAOYSA-N trichloro(octyl)silane Chemical compound CCCCCCCC[Si](Cl)(Cl)Cl RCHUVCPBWWSUMC-UHFFFAOYSA-N 0.000 description 3
- LTJCYCBSXSKGTR-UHFFFAOYSA-N trichloro(tridec-12-enyl)silane Chemical compound Cl[Si](Cl)(Cl)CCCCCCCCCCCC=C LTJCYCBSXSKGTR-UHFFFAOYSA-N 0.000 description 3
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Abstract
The invention provides a method for manufacturing an electrowetting display, which comprises the following steps: providing a first substrate and a second substrate which is arranged oppositely; partially bonding the first substrate and the second substrate by using an adhesive material to form a bonded pair of substrates and leave a first opening and a second opening which are oppositely arranged; filling a non-polar liquid between the first substrate and the second substrate from the first opening; immersing the bonded pair of substrates in a polar liquid until the bonded pair of substrates are completely immersed in the polar liquid; removing the bonded pair of substrates from the polar liquid; and completely bonding the first substrate and the second substrate with an adhesive material.
Description
Technical field
The invention relates to display, and particularly relevant for a kind of method for making of electric wet-type display.
Background technology
Along with the fast development of photoelectric technology, various displays also with flourish.Height contrasts (contrast ratio), high answer speed (response time) to electric wet-type display (electro-wetting display, EWD), power consumption is little and high-resolution advantage is subject to attention highly owing to having.
Electric wet-type display is developed by Liquavista company the earliest, this display comprises non-polar liquid, polar water solution, hydrophobic layer and hydrophobicity barricade (rib), wherein non-polar liquid drips on hydrophobic layer, and non-polar liquid is separated by the hydrophobicity barricade, is polar water solution in addition on non-polar liquid.Its principle of operation is as follows: when not applying a voltage to display, non-polar liquid cognition is tiled on the hydrophobic layer, therefore can present the color of oil droplet.When applying a voltage to display, the electric charge that produces on the hydrophobic layer can attract aqueous solution, therefore so that non-polar liquid is extruded to the corner, presents the color of laminar substrate under the non-polar liquid this moment.
Because filling aqueous solution needs to finish in water, therefore, in the method for making of known electric wet-type display, to fill non-polar liquid prior under the atmospheric environment, two substrates places water to assemble up and down afterwards, between two substrates about aqueous solution is inserted, yet, assembling is difficult to accurate contraposition in the water, and is difficult for the large tracts of land volume production.
Therefore, need the method for making that proposes a kind of new electric wet-type display badly.
Summary of the invention
The object of the present invention is to provide a kind of method for making of electric wet-type display, so that it has more production.
For achieving the above object, the method for making of electric wet-type display provided by the invention may further comprise the steps:
First substrate and second substrate are provided, and wherein this first substrate and this second substrate are to be oppositely arranged, and comprise a plurality of the first water wettability barricades on this first substrate;
Utilize the glue material partly (partially) bind this first substrate and this second substrate to form after binding this to substrate and to stay the first opening and the second opening, wherein this first opening and this second opening are to be oppositely arranged;
Fill non-polar liquid between this first substrate and this second substrate from this first opening;
After binding this immersed in the polar liquid substrate, until this after binding immerse in this polar liquid fully to substrate, so that this non-polar liquid is formed on this first substrate and between those the first water wettability barricades;
From this polar liquid, remove after (remove) this bonding this to substrate; And
Bind this first substrate and this second substrate fully.
The method for making of described electric wet-type display, wherein, the arrangement of those the first water wettability barricades is corresponding to the arrangement of pixel.
The method for making of described electric wet-type display wherein, comprises one first hydrophobicity dielectric layer on this first substrate, wherein this hydrophobicity dielectric layer is between those the first water wettability barricades and this first substrate.
The method for making of described electric wet-type display wherein, comprises the first electrode between this first substrate and this hydrophobicity dielectric layer.
The method for making of described electric wet-type display wherein, comprises an electrode layer on this second substrate, wherein this electrode layer has hydrophilic surface.
The method for making of described electric wet-type display wherein, comprises the second electrode, the second hydrophobicity dielectric layer and the second water wettability barricade on this second substrate.
The method for making of described electric wet-type display wherein, comprises forming third electrode between this first substrate and this second substrate.
The method for making of described electric wet-type display, wherein, this polar liquid comprises aqueous solution or alcohol solution.
The method for making of described electric wet-type display, wherein, non-polar liquid comprises silicone oil (silicon oil), contains the oils of dyestuff or pigment.
The method for making of electric wet-type display of the present invention, further comprising the steps of:
First substrate and a second substrate (simulated substrate) are provided, and wherein this first substrate and this second substrate are to be oppositely arranged, and comprise a plurality of the first water wettability barricades on this first substrate;
Utilize this first substrate of a support construction supports (support) and this second substrate with (the temporality assembled) that form temporary transient assembling this to substrate and stay the first opening and the second opening, wherein this first opening and this second opening are to be oppositely arranged;
Fill non-polar liquid between this first substrate and this second substrate from this first opening;
This of temporarily assembling immersed in the polar liquid substrate, until this of temporary transient assembling immerse in this polar liquid fully to substrate, so that this non-polar liquid is formed on this first substrate and between those water wettability barricades;
This first substrate and this second substrate are separated;
The 3rd substrate is provided, and binds this first substrate and the 3rd substrate to form after binding this to substrate; And
From this polar liquid, take out this first substrate and the 3rd substrate after binding.
The method for making of described electric wet-type display wherein, comprises the first hydrophobicity dielectric layer on this first substrate, wherein this first hydrophobicity dielectric layer is between those the first water wettability barricades and this first substrate.
The method for making of described electric wet-type display wherein, comprises the first electrode between this first substrate and this first hydrophobicity dielectric layer.
The method for making of described electric wet-type display wherein, sequentially comprises the second electrode, the second hydrophobicity dielectric layer, the second water wettability barricade on this second substrate.
The method for making of described electric wet-type display wherein, comprises an electrode layer on the 3rd substrate, wherein this electrode layer has hydrophilic surface.
The method for making of described electric wet-type display wherein, sequentially comprises third electrode, the 3rd hydrophobicity dielectric layer, the 3rd water wettability barricade on the 3rd substrate.
The method for making of described electric wet-type display wherein, comprises forming the 4th electrode between this first substrate and the 3rd substrate.
The method for making of described electric wet-type display, wherein, this polar liquid comprises aqueous solution or alcohol solution.
The method for making of described electric wet-type display, wherein, non-polar liquid comprises silicone oil (silicon oil), contains the oils of dyestuff or pigment.
In sum, the method for making of electric wet-type display of the present invention has following characteristics:
1) assemble first first substrate and second substrate under atmospheric environment, aligning two substrates that can be accurate is beneficial to large tracts of land preparation technology.
2) with regard to first solidified forming, therefore, the glue material can not lose efficacy because being soaked in the polar liquid glue material before immersing polar liquid.
3) can obtain the electric wet-type display of monochrome " individual layer " or monochromatic " bilayer ".
4) can be in assembling process, incorrect substrate removed be replaced as available substrate, with effective saving preparation technology time.
Description of drawings
Figure 1A is a vertical view, in order to the structure of first embodiment of the invention electric wet-type display to be described.
Figure 1B-Fig. 1 C is a series of sectional views, in order to the structure of first embodiment of the invention electric wet-type display to be described.
Fig. 2 A-Fig. 2 E is a series of sectional views, in order to the method for making of first embodiment of the invention electric wet-type display to be described.
Fig. 2 F and Fig. 2 G are respectively a vertical view and sectional view, in order to the state after the first embodiment of the invention electric wet-type display applies voltage to be described.
Fig. 3 A is a vertical view, in order to the structure of second embodiment of the invention electric wet-type display to be described.
Fig. 3 B-Fig. 3 C is a series of sectional views, in order to the structure of second embodiment of the invention electric wet-type display to be described.
Fig. 4 A-Fig. 4 E is a series of sectional views, in order to the method for making of second embodiment of the invention electric wet-type display to be described.
Fig. 5 A-Fig. 5 B is a vertical view and sectional view, applies before the voltage state of non-polar liquid in order to the third embodiment of the invention electric wet-type display to be described.
Fig. 5 C-Fig. 5 D is a vertical view and sectional view, applies after the voltage state of non-polar liquid in order to the third embodiment of the invention electric wet-type display to be described.
Fig. 6 A-Fig. 6 D is a series of sectional views, in order to the method for making of fourth embodiment of the invention electric wet-type display to be described.
Fig. 7 A-Fig. 7 C is a series of vertical views, in order to the design of glue material of the present invention to be described.
Primary clustering symbol description in the accompanying drawing:
10,20,30,40 electric wet-type displays; 50 pixels; The corner of 50a pixel; 35 syringes; 100 first substrates; 102 first electrodes; 104 first hydrophobicity dielectric layers; 110 first water wettability barricades; 130 common electrodes; 150,150a, 150b, 150c glue material; 161 first openings; 162 second openings; 200 second substrates; 201 electrode layers; 202 second electrodes; 204 second hydrophobicity dielectric layers; 210 second water wettability barricades; 300 the 3rd substrates; 302 third electrodes; 304 the 3rd hydrophobicity dielectric layers; 310 the 3rd water wettability barricades; 350,350a, 350b non-polar liquid; 360 polar liquids; 400 arrows.
Embodiment
The invention provides a kind of method for making of electric wet-type display, may further comprise the steps: first substrate and second substrate are provided, and wherein this first substrate and this second substrate are to be oppositely arranged, and comprise a plurality of the first water wettability barricades on this first substrate; Utilize the glue material partly (partially) bind this first substrate and this second substrate to form after binding this to substrate and to stay the first opening and the second opening, wherein this first opening and this second opening are to be oppositely arranged; Fill non-polar liquid between this first substrate and this second substrate from this first opening; After binding this immersed in the polar liquid substrate, until this after binding immerse in this polar liquid fully to substrate, so that this non-polar liquid is formed on this first substrate and between those the first water wettability barricades; From this polar liquid, remove after (remove) this bonding this to substrate; And bind this first substrate and this second substrate fully.
The present invention provides a kind of method for making of electric wet-type display in addition, may further comprise the steps: first substrate and second substrate (simulated substrate) are provided, wherein this first substrate and this second substrate are to be oppositely arranged, and comprise a plurality of the first water wettability barricades on this first substrate; Utilize this first substrate of support construction supports (support) and this second substrate with (the temporality assembled) that form temporary transient assembling this to substrate and stay the first opening and the second opening, wherein this first opening and this second opening are to be oppositely arranged; Fill non-polar liquid between this first substrate and this second substrate from this first opening; This of temporarily assembling immersed in the polar liquid substrate, until this of temporary transient assembling immerse in this polar liquid fully to substrate, so that this non-polar liquid is formed on this first substrate and between those water wettability barricades; This first substrate and this second substrate are separated; The 3rd substrate is provided, and binds this first substrate and the 3rd substrate to form after binding this to substrate; From this polar liquid, take out this first substrate and the 3rd substrate after binding; And bind this first substrate and the 3rd substrate fully.
For above-mentioned and further feature of the present invention can be become apparent, below especially exemplified by going out preferred embodiment, and cooperate accompanying drawing to be described in detail below:
Figure 1A is electric wet-type display 10 vertical view of filling liquid not of first embodiment of the invention, and Figure 1B be among Figure 1A along the sectional view of A-A ' line gained, Fig. 1 C is along the sectional view of B-B ' line gained among Figure 1A.
See also Figure 1A, this figure is first substrate 100 and the vertical view of second substrate 200 by the bonding of glue material 150 parts.It is noted that, be simplified illustration, only show the relative position of first substrate 100 and glue material 150, and the position of second substrate 200 see also Figure 1B or Fig. 1 C, wherein glue material 150 is used for binding first substrate 100 and second substrate 200, and a plurality of frame line represent pixels 50 among the figure.
See also Figure 1B, electric wet-type display 10 comprises first substrate 100 and second substrate 200, wherein first substrate 100 be oppositely arranged with second substrate 200 and first substrate 100 on comprise a plurality of the first water wettability barricades 110.Glue material 150 is used for binding first substrate 100 and second substrate 200.
The material of glue material 150 comprises optic-solidified adhesive material, pressure-cure glue material or water cure glue material.It is noted that, because first substrate 100 binds under atmospheric environment with second substrate 200, therefore, so long as can make glue material 150 that two first substrates 100 and second substrate 200 bind all in protection scope of the present invention.
The effect of the first water wettability barricade 110 is to separate the follow-up non-polar liquid that will form 350 (seeing also Fig. 2 A), in order to defining the scope of pixel (pixel) 50, so the position of the arrangement respective pixel 50 of barricade 110.The material of the first water wettability barricade 110 comprises positive photoresistance, negative photoresistance, photo-curable resin (photosetting resin) or thermoset resin (thermosetting resin), and its thickness is about 1~50 μ m, is preferably approximately 5~30 μ m.
The method that forms the first water wettability barricade 110 is little shadow preparation technology, mould molding, reversal printing method (reverse printing) or stencil methods (stencil printing) for example.
See also Fig. 1 C, glue material 150 only partly (partially) binds first substrate 100 and second substrate 200, therefore stays the first opening 161 and the second opening 162 that is oppositely arranged.
In addition, on first substrate 100, sequentially form the first electrode 102, the first hydrophobicity dielectric layer 104, meaning namely, the first electrode 102 is formed between first substrate 100 and the hydrophobicity dielectric layer 104, and the first hydrophobicity dielectric layer 104 is formed between the first electrode 102 and the first water wettability barricade 110.
The first electrode 102 comprises metal or oxide, for example aluminium, silver, tin indium oxide (indium tin oxide, ITO), molybdenum and tungsten alloy (molybdenum tungsten, MoW) or indium zinc oxide (indium zinc oxide, IZO).
The first hydrophobicity dielectric layer 104 is comprised of dielectric layer and hydrophobic layer usually, and the material of dielectric layer comprises silicon nitride (SiNx), monox (SiOx), aluminium oxide (Al
2O
3), or other dielectric coefficient is greater than 2 macromolecule layer.Hydrophobic layer comprises fluoro containing polymers or autohemagglutination silane molecule.Fluoro containing polymers for example is that Teflon AF-1600 (Dupont), trade name are the fluoro containing polymers (company: Cytonix corporation) of " Cytonix " for fluoro containing polymers (company: ASAHI Glass CO., LTD) or the trade name of " Cytop ".And the autohemagglutination silane molecule comprises octadecyl trichlorosilane alkane (octadecyl trichlorosilane, OTS), 3,3,3-trifluoropropylmethyldichlorosilane (3,3,3trifluoro-propylmethyl dichlorosilane, PMDCS), 13 fluoro-1,1,2,2-tetrahydrochysene octyl trichlorosilane (tridecafluoro-1,1,2,2-tetrahydrooctyl trichlorosilane, FOTS), 17 fluoro-, 1,1,2,2-tetrahydrochysene decyl trichlorosilane (heptadecafluoro-1,1,2,2 ,-tetrahydrodecyl trichlorosilane, FDTS), decyl trichlorosilane (dodecyl trichlorosilane, DDTCS), dimethyldichlorosilane (dimethyldichlorosilane, DDMS), vinyl undecyl trichlorosilane (vinylundecyl tirchlorosilane, V11TCS) or aminocarbonyl propyl trimethoxy silane (aminopropyl trimethoxysilane, APTMS).The first hydrophobicity dielectric layer 104 can be the dielectric/insulation course with hydrophobic (hydrophobic) surface, or the hydrophobic layer of tool dielectric/insulation, or by hydrophobic layer and composite bed that dielectric/the insulation course storehouse forms.
Moreover, on second substrate 200, comprise an electrode layer 201, tin indium oxide (indium tin oxide for example, ITO), this electrode layer 201 can have hydrophilic surface, helping the formation of follow-up polar liquid 360 (seeing also Fig. 2 B), but this electrode layer 201 is not limited to the electrode layer of tool hydrophilic surface.
Then, see also Fig. 2 A-Fig. 2 E, those figure are in order to show the method for making of first embodiment of the invention, in Fig. 2 A, be to use syringe 35 to fill non-polar liquids 350 from the first opening 161, non-polar liquid 350 be formed between first substrate 100 and the second substrate 200, owing to the spacing between the two substrates 100,200 for approximately greater than 20 μ m, therefore, non-polar liquid 350 can be stayed between the two substrates 100,200 because of surface tension.Non-polar liquid 350 comprises silicone oil (silicon oil), contains the oils of dyestuff or pigment.
In Fig. 2 B, after binding this immersed in the polar liquid 360 substrate 100,200, arrow 400 represents this to substrate 100,200 traffic direction, and wherein the second opening 162 contacts first polar liquid 360.In order to help substrate 100,200 immersion, can form first one deck non-polar liquid 350 in the surface of polar liquid 360.In another embodiment, also can not form first non-polar liquid 350 in the surface of polar liquid 360.
In Fig. 2 C, first substrate 100 and the direction of second substrate 200 towards arrow 400 little by little immerse in the polar liquid 360.
In Fig. 2 D, first substrate 100 immerses in the polar liquid 360 fully with second substrate 200, so that non-polar liquid 350 is formed on the first substrate 100 and between the first water wettability barricade 110.In other words, because the first hydrophobicity dielectric layer 104 is the hydrophobicity material, therefore, non-polar liquid 350 is formed thereon.
In Fig. 2 E, from polar liquid 360, remove after the bonding this to substrate 100,200, utilize afterwards glue material 150 to bind first substrate 100 and second substrate 200 fully.
After Fig. 2 F-Fig. 2 G shows that electric wet-type display 10 applies voltage, that is the first electrode 102 is when being connected to a voltage source (not shown), the state of non-polar liquid 350, and wherein Fig. 2 G is that Fig. 2 F is along the sectional view of C-C ' line gained.By among the figure as can be known, the non-polar liquid 350a of contraction can be retracted to the corner 50a of pixel 50 (Fig. 2 F), namely the corner of the first water wettability barricade 110 (Fig. 2 G).
It is noted that, in known technology, be (for example in the water) assembling first substrate and second substrate in polar liquid, therefore, is difficult to fine registration and is difficult for the large tracts of land volume production.In the first embodiment of the present invention, before not yet filling any liquid, to utilize first glue material 150 to bind first substrate 100 and second substrate 200, therefore, compared to known technology, the present invention assembles first two substrates under the environment of atmosphere, aligning two substrates that can be accurate is beneficial to large tracts of land preparation technology.In addition, with regard to first solidified forming, therefore, glue material 150 can not lose efficacy because being soaked in the polar liquid 360 glue material 150 before immersing liquid.
Fig. 3 A is electric wet-type display 20 vertical view of filling liquid not of second embodiment of the invention, and Fig. 3 B be among Fig. 3 A along the sectional view of D-D ' line gained, Fig. 3 C is along the sectional view of E-E ' line gained among Fig. 3 A.It is noted that, in the second embodiment, number in the figure person identical with the first embodiment represents same components.Has electric moistening display structure on the first substrate 100 among the first embodiment, therefore this embodiment belongs to monochromatic " individual layer " structure, and all have electric moistening display structure on the first substrate 100 of the second embodiment and the second substrate 200, so this embodiment belongs to monochromatic " bilayer " structure.
See also Fig. 3 B, electric wet-type display 20 comprises first substrate 100 and second substrate 200, wherein first substrate 100 is oppositely arranged with second substrate 200, comprises a plurality of the first water wettability barricades 110 on the first substrate 100, comprises a plurality of the second water wettability barricades 210 on the second substrate 200.Glue material 150 is used for binding first substrate 100 and second substrate 200.
The material of the second water wettability barricade 210 comprises positive photoresistance, negative photoresistance, photo-curable resin (photosetting resin) or thermoset resin (thermosetting resin), and its thickness is about 1~50 μ m, is preferably approximately 5~30 μ m.
The method that forms the second water wettability barricade 210 is little shadow preparation technology, mould molding, reversal printing method (reverse printing) or stencil methods (stencil printing) for example.
In addition, on second substrate 200, sequentially form the second electrode 202, the second hydrophobicity dielectric layer 204, meaning namely, the second electrode 202 is formed between first substrate 100 and the second hydrophobicity dielectric layer 204, and the second hydrophobicity dielectric layer 204 is formed between the second electrode 202 and the second water wettability barricade 210.
The second electrode 202 comprises metal or oxide, for example aluminium, silver, tin indium oxide (indium tin oxide, ITO), molybdenum and tungsten alloy (molybdenum tungsten, MoW) or indium zinc oxide (indium zinc oxide, IZO).
The second hydrophobicity dielectric layer 204 is comprised of dielectric layer and hydrophobic layer usually, and the material of dielectric layer comprises silicon nitride (SiNx), monox (SiOx), aluminium oxide (Al
2O
3), or other dielectric coefficient is greater than 2 macromolecule layer.Hydrophobic layer comprises fluoro containing polymers or autohemagglutination silane molecule.Fluoro containing polymers for example is that Teflon AF-1600 (Dupont), trade name are the fluoro containing polymers (company: Cytonix corporation) of " Cytonix " for fluoro containing polymers (company: ASAHI Glass CO., LTD) or the trade name of " Cytop ".And the autohemagglutination silane molecule comprises octadecyl trichlorosilane alkane (octadecyl trichlorosilane, OTS), 3,3,3-trifluoropropylmethyldichlorosilane (3,3,3trifluoro-propylmethyl dichlorosilane, PMDCS), 13 fluoro-1,1,2,2-tetrahydrochysene octyl trichlorosilane (tridecafluoro-1,1,2,2-tetrahydrooctyl trichlorosilane, FOTS), 17 fluoro-, 1,1,2,2-tetrahydrochysene decyl trichlorosilane (heptadecafluoro-1,1,2,2 ,-tetrahydrodecyl trichlorosilane, FDTS), decyl trichlorosilane (dodecyl trichlorosilane, DDTCS), dimethyldichlorosilane (dimethyldichlorosilane, DDMS), vinyl undecyl trichlorosilane (vinylundecyl tirchlorosilane, V11TCS) or aminocarbonyl propyl trimethoxy silane (aminopropyl trimethoxysilane, APTMS).The second hydrophobicity dielectric layer 204 can be the dielectric/insulation course with hydrophobic (hydrophobic) surface, or the hydrophobic layer of tool dielectric/insulation, or by hydrophobic layer and composite bed that dielectric/the insulation course storehouse forms.
See also Fig. 3 C, glue material 150 only partly (partially) binds first substrate 100 and second substrate 200, therefore stays the first opening 161 and the second opening 162 that is oppositely arranged.
Then, see also Fig. 4 A-Fig. 4 E, those figure are in order to show the method for making of second embodiment of the invention, in Fig. 4 A, be to use syringe 35 to fill non-polar liquid 350 from the first opening 161, non-polar liquid 350 is formed between first substrate 100 and the second substrate 200.Because greater than 50 μ m, therefore, can stay between first substrate 100 and the second substrate 200 because of surface tension by non-polar liquid 350 for approximately for the spacing between first substrate 100 and the second substrate 200.
In Fig. 4 B, after binding this immersed in the polar liquid 360 substrate 100,200, arrow 400 represents this to the traffic direction of substrate 100,200, and wherein the second opening 162 contacts first polar liquid 360.
In Fig. 4 C, substrate 100,200 directions towards arrow 400 little by little immerse in the polar liquid 360.
In Fig. 4 D, substrate 100,200 immerses in the polar liquid 360 fully, so that non-polar liquid 350 is formed on the first substrate 100 and between the first water wettability barricade 110, and non-polar liquid 350 is formed on the second substrate 200 and between the second water wettability barricade 210.
In Fig. 4 E, from polar liquid 360, remove after the bonding this to substrate 100,200.Afterwards, between first substrate 100 and second substrate 200, form common electrode (common electrode) 130, that is connect common electrode 130 in polar liquid 360 places.At last, utilize glue material 150 to bind first substrate 100 and second substrate 200 fully.
In addition, see also Fig. 5 A-Fig. 5 D of the present invention, those figure show vertical view and the sectional view of the electric wet-type display 30 of third embodiment of the invention.Fig. 5 B be among Fig. 5 A along the sectional view of F-F ' line gained, Fig. 5 C is along the sectional view of G-G ' line gained among Fig. 5 D.The method for making of the 3rd embodiment is identical with the second embodiment, does not repeat them here.
It is noted that, label person identical with the second embodiment represents same components in the 3rd embodiment, and the 3rd embodiment also belongs to monochromatic " bilayer " structure.In the second embodiment, the position of the first electrode 102 is corresponding to the position of the second electrode 202, and the position of the first water wettability barricade 110 is corresponding to the position of the second water wettability barricade 210.Yet in the 3rd embodiment, the position of the position of the first electrode 102 and the second electrode 202 is at a distance of a segment distance (both dislocation), and same, the first water wettability barricade 110 and the second water wettability barricade 210 also misplace.
Before demonstration does not apply voltage in Fig. 5 A-Fig. 5 B, the position of non-polar liquid 350, after Fig. 5 C-Fig. 5 D demonstration applies voltage, the position of non-polar liquid 350.Relatively apply voltage before with afterwards, can observe and apply after the voltage, because the location dislocation of the first water wettability barricade 110 and the second water wettability barricade 210, therefore, the non-polar liquid 350a that shrink the below shrinks the position near the first water wettability barricade 110 on the right, and the non-polar liquid 350b that shrink the top shrinks the position near the second water wettability barricade 210 on the left side, therefore, the non-polar liquid 350a that shrinks and the position of 350b correspond to each other, can be observed two non-polar liquid 350a in the vertical view by Fig. 5 C, 350b overlaps each other, therefore, the design of the 3rd embodiment can further improve the contrast (aspect ratio) of electric wet-type display 30.
Moreover, seeing also Fig. 6 A-Fig. 6 D of the present invention, those figure show the method for making of the electric wet-type display 40 of fourth embodiment of the invention, number in the figure person identical with the second embodiment represents same-sign.
In Fig. 6 A, at first utilize a supporting construction (not shown) to support first substrate 100 and second substrate 200, this and stays the first opening 161 and the second opening 162 to substrate 100,200 with (the temporality assembled) that form temporary transient assembling.Then, use syringe 35 to fill non-polar liquid 350 from the first opening 161, non-polar liquid 350 is formed between first substrate 100 and the second substrate 200.
The position of supporting construction is same as the position of glue material 150 among Figure 1A, its material comprises positive photoresistance, negative photoresistance, photo-curable resin (photosetting resin) or thermoset resin (thermosetting resin), and its thickness is about 10~200 μ m, is preferably approximately 20~100 μ m.
Afterwards, see also Fig. 6 B, this that temporarily assemble immersed in the polar liquid 360 substrate 100,200, and the second opening 162 contacts first polar liquid 360, until this of temporary transient assembling immerses in the polar liquid 360 fully to substrate 100,200, so that non-polar liquid 350 is formed on the first substrate 100 and between those the first water wettability barricades 110, and non-polar liquid 350 is formed on the second substrate 200 and between those the second water wettability barricades 210.
Afterwards, see also Fig. 6 C, first substrate 100 and second substrate 200 separated since between only use supporting construction fixedly first substrate 100 and second substrate 200, therefore, can remove easily second substrate 200 in this step.Then, provide one the 3rd substrate 300, and bind first substrate 100 and the 3rd substrate 300 to form first substrate 100 and the 3rd substrate 300 after the bonding.
The 3rd substrate 300 can be glass, polymer base material or metal.
It is noted that, the 3rd substrate 300 that provides in this step can be as described in the second embodiment or the 3rd embodiment, sequentially form third electrode 302, the 3rd hydrophobicity dielectric layer 304 and the 3rd water wettability barricade 310 on the 3rd substrate 300, insert afterwards non-polar liquid 350 between the 3rd water wettability barricade 310, again the 3rd substrate 300 is immersed in the polar liquid 360, to assemble bonding with first substrate 100.
The material of the 3rd water wettability barricade 310 comprises positive photoresistance, negative photoresistance, photo-curable resin (photosetting resin) or thermoset resin (thermosetting resin), and its thickness is about 1~50 μ m, is preferably approximately 5~30 μ m.
The method that forms the 3rd water wettability barricade 310 is little shadow preparation technology, mould molding, reversal printing method (reverse printing) or stencil methods (stencil printing) for example.
The 3rd hydrophobicity dielectric layer 304 is comprised of dielectric layer and hydrophobic layer usually, and the material of dielectric layer comprises silicon nitride (SiNx), monox (SiOx), aluminium oxide (Al
2O
3), or other dielectric coefficient is greater than 2 macromolecule layer.Hydrophobic layer comprises fluoro containing polymers or autohemagglutination silane molecule.Fluoro containing polymers for example is that Teflon AF-1600 (Dupont), trade name are the fluoro containing polymers (company: Cytonix corporation) of " Cytonix " for fluoro containing polymers (company: ASAHI Glass CO., LTD) or the trade name of " Cytop ".And the autohemagglutination silane molecule comprises octadecyl trichlorosilane alkane (octadecyl trichlorosilane, OTS), 3,3,3-trifluoropropylmethyldichlorosilane (3,3,3trifluoro-propylmethyl dichlorosilane, PMDCS), 13 fluoro-1,1,2,2-tetrahydrochysene octyl trichlorosilane (tridecafluoro-1,1,2,2-tetrahydrooctyl trichlorosilane, FOTS), 17 fluoro-, 1,1,2,2-tetrahydrochysene decyl trichlorosilane (heptadecafluoro-1,1,2,2 ,-tetrahydrodecyl trichlorosilane, FDTS), decyl trichlorosilane (dodecyl trichlorosilane, DDTCS), dimethyldichlorosilane (dimethyldichlorosilane, DDMS), vinyl undecyl trichlorosilane (vinylundecyl tirchlorosilane, V11TCS) or aminocarbonyl propyl trimethoxy silane (aminopropyl trimethoxysilane, APTMS).The second hydrophobicity dielectric layer 204 can be the dielectric/insulation course with hydrophobic (hydrophobic) surface, or the hydrophobic layer of tool dielectric/insulation, or by hydrophobic layer and composite bed that dielectric/the insulation course storehouse forms.
Yet, in another embodiment, the 3rd substrate 300 is not limited to above-mentioned embodiment, the 3rd substrate 300 can be described in the first embodiment, only has an electrode layer on the 3rd substrate 300, this electrode layer can have hydrophilic surface (but this electrode layer is not limited to the electrode layer of tool hydrophilic surface), and can bind first substrate 100 and the 3rd substrate 300 in polar liquid 360 fully.
See also Fig. 6 D, from polar liquid 360, take out first substrate 100 and the 3rd substrate 300 after binding.Afterwards, between first substrate 100 and the 3rd substrate 300, form common electrode (common electrode) 130, that is connect common electrode (common electrode) 130 in polar liquid 360 places, and bind first substrate 100 and the 3rd substrate 300 fully with glue material 150.But also can in polar liquid 360, between first substrate 100 and the 3rd substrate 300, form common electrode (common electrode) 130, and bind first substrate 100 and the 3rd substrate 300 fully with glue material 150.
In the 4th embodiment, elder generation is auxiliary by second substrate 200, sequentially inserts non-polar liquid 350 and polar liquid 360, removes afterwards second substrate 200 again, again the 3rd substrate 300 is bonding on first substrate 100.The 4th embodiment is characterised in that, when the non-polar liquid 350 on the second substrate 200 residues in incorrect position, can be by displacement another new substrate (such as the 3rd substrate 300), and solve the problem of non-polar liquid 350, therefore, preparation technology's design by the 4th embodiment, can in assembling process, incorrect substrate be removed, be replaced as available substrate, and do not need again accent to begin new preparation technology, with effective saving preparation technology time.
In addition, see also Fig. 7 A-Fig. 7 C of the present invention, those figure are the vertical view of glue material 150 of the present invention (or among the 4th embodiment supporting construction) position, and wherein glue material 150a, 15b, 150c are positioned on the different positions, and the first opening 161 and the second opening 162 are in correspondence with each other.Yet the position of glue material and two openings is not as limit, and this area personage also can according to preparation technology's demand, design glue material 150, the first opening 161 and second opening 162 of different relative positions.
In sum, the method for making of electric wet-type display of the present invention has following characteristics:
1) under atmospheric environment, assemble first first substrate 100 and second substrate 200, can accurate aligning two substrates 100,200, be beneficial to large tracts of land preparation technology.
2) with regard to first solidified forming, therefore, glue material 150 can not lose efficacy because being soaked in the polar liquid 360 glue material 150 before immersing polar liquid 350.
3) can obtain the electric wet-type display of monochrome " individual layer " or monochromatic " bilayer ".
4) by the design of the 4th embodiment, can in assembling process, incorrect substrate be removed, be replaced as available substrate, with effective saving preparation technology time.
Although the present invention discloses as above with several preferred embodiments; so it is not to limit the present invention; those skilled in the art without departing from the spirit and scope of the present invention; when can changing arbitrarily and retouching, so protection scope of the present invention is as the criterion when the content that the claim scope that look application defines.
Claims (18)
1. the method for making of an electric wet-type display may further comprise the steps:
First substrate and second substrate are provided, and wherein this first substrate and this second substrate are to be oppositely arranged, and comprise a plurality of the first water wettability barricades on this first substrate;
Utilize the glue material partly to bind this first substrate and this second substrate to form after binding this to substrate and to stay the first opening and the second opening, wherein this first opening and this second opening are to be oppositely arranged;
Fill non-polar liquid between this first substrate and this second substrate from this first opening;
After binding this immersed in the polar liquid substrate, until this after binding immerse in this polar liquid fully to substrate, so that this non-polar liquid is formed on this first substrate and between those the first water wettability barricades;
From this polar liquid, remove after this bonding this to substrate; And
Bind this first substrate and this second substrate fully.
2. the method for making of described electric wet-type display according to claim 1, wherein, the arrangement of those the first water wettability barricades is corresponding to the arrangement of pixel.
3. the method for making of described electric wet-type display according to claim 1 wherein, comprises the first hydrophobicity dielectric layer on this first substrate, and wherein this hydrophobicity dielectric layer is between those the first water wettability barricades and this first substrate.
4. the method for making of described electric wet-type display according to claim 3 wherein, comprises the first electrode between this first substrate and this hydrophobicity dielectric layer.
5. the method for making of described electric wet-type display according to claim 1 wherein, comprises electrode layer on this second substrate, and wherein this electrode layer has hydrophilic surface.
6. the method for making of described electric wet-type display according to claim 1 wherein, comprises the second electrode, the second hydrophobicity dielectric layer and the second water wettability barricade on this second substrate.
7. the method for making of described electric wet-type display according to claim 6 wherein, comprises forming third electrode between this first substrate and this second substrate.
8. the method for making of described electric wet-type display according to claim 1, wherein, this polar liquid comprises aqueous solution or alcohol solution.
9. the method for making of described electric wet-type display according to claim 1, wherein, non-polar liquid comprises silicone oil, contains the oils of dyestuff or pigment.
10. the method for making of an electric wet-type display may further comprise the steps:
First substrate and second substrate are provided, and wherein this first substrate and this second substrate are to be oppositely arranged, and comprise a plurality of the first water wettability barricades on this first substrate;
Utilize this first substrate of support construction supports and this second substrate with form temporary transient assembling this to substrate and stay the first opening and the second opening, wherein this first opening and this second opening are to be oppositely arranged;
Fill non-polar liquid between this first substrate and this second substrate from this first opening;
This of temporarily assembling immersed in the polar liquid substrate, until this of temporary transient assembling immerse in this polar liquid fully to substrate, so that this non-polar liquid is formed on this first substrate and between those water wettability barricades;
This first substrate and this second substrate are separated;
The 3rd substrate is provided, and binds this first substrate and the 3rd substrate to form after binding this to substrate; And
From this polar liquid, take out this first substrate and the 3rd substrate after binding.
11. the method for making of described electric wet-type display wherein, comprises the first hydrophobicity dielectric layer on this first substrate according to claim 10, wherein this first hydrophobicity dielectric layer is between those the first water wettability barricades and this first substrate.
12. the method for making of described electric wet-type display wherein, comprises the first electrode between this first substrate and this first hydrophobicity dielectric layer according to claim 11.
13. the method for making of described electric wet-type display wherein, sequentially comprises the second electrode, the second hydrophobicity dielectric layer, the second water wettability barricade on this second substrate according to claim 10.
14. the method for making of described electric wet-type display wherein, comprises electrode layer on the 3rd substrate according to claim 10, wherein this electrode layer has hydrophilic surface.
15. the method for making of described electric wet-type display wherein, sequentially comprises third electrode, the 3rd hydrophobicity dielectric layer, the 3rd water wettability barricade on the 3rd substrate according to claim 10.
16. the method for making of described electric wet-type display wherein, comprises forming the 4th electrode between this first substrate and the 3rd substrate according to claim 15.
17. the method for making of described electric wet-type display according to claim 10, wherein, this polar liquid comprises aqueous solution or alcohol solution.
18. the method for making of described electric wet-type display according to claim 10, wherein, non-polar liquid comprises silicone oil, contains the oils of dyestuff or pigment.
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TW100135187A TW201314261A (en) | 2011-09-29 | 2011-09-29 | Method for fabricating the electrowetting display |
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CN103792659A (en) * | 2013-10-29 | 2014-05-14 | 友达光电股份有限公司 | Electrowetting display device |
CN112687820A (en) * | 2020-12-29 | 2021-04-20 | 广东聚华印刷显示技术有限公司 | QLED device, preparation method of QLED device and display device |
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CN103792659B (en) * | 2013-10-29 | 2015-11-11 | 友达光电股份有限公司 | Electrowetting display device |
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