CN102053362A - Liquid lens array and filling method thereof - Google Patents
Liquid lens array and filling method thereof Download PDFInfo
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- CN102053362A CN102053362A CN 201010577213 CN201010577213A CN102053362A CN 102053362 A CN102053362 A CN 102053362A CN 201010577213 CN201010577213 CN 201010577213 CN 201010577213 A CN201010577213 A CN 201010577213A CN 102053362 A CN102053362 A CN 102053362A
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Abstract
The invention relates to a liquid lens array and a filling method thereof. The liquid lens array comprises a first substrate and a second substrate which are mutually parallel, the first substrate and the second substrate form an enclosed cavity by virtue of a second partition, a first partition is arranged between the first substrate and the second substrate, the enclosed cavity is divided into an upper cavity and a lower cavity by virtue of the first partition, and the upper cavity and the lower cavity are respectively used for accommodating a first liquid and a second liquid; and mesh holes are distributed on the first partition, so that the first liquid and the second liquid can form a curve contact surface in the mesh holes, the second partition is provided with a first conduction groove and a second conduction groove, and the first conduction groove and the second conduction groove are respectively arranged at the two sides of the first partition. The filling method comprises: changing a contact angle between the second liquid and the second substrate by applying a voltage between the second liquid and the second substrate, thus the second liquid flows along the surface of the second substrate until the cavity between the first partition and the second substrate is filled with the second liquid and the first liquid which is repelled flows out from the first conduction groove.
Description
Technical field
The present invention relates to a kind of liquid lens array and method for filling thereof.
Background technology
Liquid lens is compared the function with dynamic zoom with traditional solid lens, is the important devices of following ultra thin optical shooting and display system.Liquid lens is made up of two kinds of immiscible liquid usually.Two kinds of liquid refractive index differences just have lens function when the interface of two kinds of liquid is curved surface.The radius-of-curvature that changes two kinds of liquid interfaces will change the focal length of liquid lens.The change of the focal length of liquid lens can be in several ways, for example: utilize pressure, electric wetting power, dielectrophoretic force etc.
Become array structure just can realize the liquid lens array that a kind of focal length is variable the aforesaid liquid lens preparation.Yet current liquid lens array has problems aspect homogeneity and consistance, mainly is because the perfusion and the encapsulation process of two kinds of not mixing liquid cause.Present as shown in Figure 1 common liquid lens array structure.Between first substrate 1 and second substrate 7, be two kinds of immiscible liquids, i.e. first liquid 2 and second liquid 4, first cuts off 6 is divided into independently liquid lens unit with second liquid 4, and common first cuts off and also have one deck hydrophobic layer 5 to control surface of contact 3 between first liquid 2 and second liquid 4 on 6.In liquid lens array structure shown in Figure 1, in order to realize having the lens arra of the same focal length, need accurately control first to cut off the volume of 6 second liquid of being cut apart 4, promptly first partition, 6 second liquid of being cut apart 4 must have identical volume.In order to realize the precise volumes control of second liquid 4, the researcher has proposed several different methods, for example adopt the solvent of volatile liquid as second liquid 4, by solvent evaporates being controlled the volume of second liquid 4, or second substrate that will be coated with second liquid 4 inserts in the vessel of first liquid 2, realizes cutting apart of second liquid 4 by hydrophobic layer 5.Yet the liquid lens array of aforesaid way preparation is subjected to influence of various factors such as temperature in the preparation process, humidity, material surface machining precision, and in case the preparation end just can't be carried out the correction in later stage again to uneven liquid lens array.
Summary of the invention
The present invention proposes a kind of method for filling of liquid lens array, can the self assembly mode realizes having uniformly the lens of the same focal length.
The present invention also provides the liquid lens array that adopts above-mentioned method for filling.
The method for filling of described liquid lens array is: described liquid lens array comprises first substrate parallel to each other and second substrate, first substrate and second substrate cut off the formation closed cavity by second of middle hollow, being provided with parallel with them first between first substrate and second substrate cuts off, by first partition above-mentioned closed cavity is divided into two cavitys up and down, be respectively applied for two kinds of immiscible liquids first liquid of splendid attire, second liquid, be distributed with reticulated cell on first partition, can make first liquid and second liquid in the hole, form the curved surface surface of contact, second partition is provided with first conduction trough and second conduction trough, first conduction trough and second conduction trough are divided into first both sides that cut off, wherein second conduction trough is positioned at the side near second substrate, and described method for filling is:
By on-load voltage between second liquid and second substrate, change the contact angle between second liquid and second substrate, second liquid is progressively moved by the inflow of second conduction trough and along the surface of second substrate, thereby first liquid is expelled between first partition and second substrate, until second liquid be full of first cut off with second substrate between cavity, first liquid that quilt is expelled is flowed out by first conduction trough.
Dielectrophoretic force that can produce by on-load voltage or electric wetting power change the contact angle between second liquid and second substrate.
As preferred version of the present invention, be covered with conductive layer on second substrate, described second liquid is non-conductive liquid, perhaps also is being covered with insulation course on second substrate conductive layer, reach table in promptly on second substrate and be coated with conductive layer and insulation course successively, described second liquid is non-conductive liquid.
Use the liquid lens array of above-mentioned method for filling, be characterised in that, comprise, first substrate (1) parallel to each other and second substrate (7) of following setting, first substrate (1) cuts off (10) with second substrate (7) by second of middle hollow and forms closed cavity, be provided with parallel with them first between first substrate (1) and second substrate (7) and cut off (6), cut off (6) by first above-mentioned closed cavity is divided into two cavitys up and down, be respectively applied for two kinds of immiscible liquids first liquid of splendid attire (2), second liquid (4), be distributed with reticulated cell on first partition (6), can make first liquid (2) and second liquid (4) in the hole, form the curved surface surface of contact, second cuts off (10) is provided with first conduction trough (8) and second conduction trough (9), first conduction trough (8) and second conduction trough (9) are divided into the both sides of first partition (6), wherein second conduction trough (9) is positioned at the side near second substrate (7), and second substrate is covered with conductive layer on (7).
The aforesaid liquid lens arra is applicable to the perfusion when second liquid is non-conductive liquid, also is covered with insulation course on the conductive layer of second substrate (7), and this moment, liquid lens array was applicable to the perfusion when second liquid is conducting liquid.
As claim 4 or 5 described liquid lens arrays, it is characterized in that, also be provided with between first partition (6) and second substrate (7) to support and cut off (12).
Liquid lens array as claimed in claim 6 is characterized in that, first partition (6) is as a whole with support partition (12), by double exposure, and once development preparation.
As improvement of the present invention, also be provided with to support between first partition and second substrate and cut off.Preferred first partition is as a whole with the support partition, by double exposure, and once development preparation.
The using method of aforesaid liquid lens arra can be to realize the change of liquid lens array focal length by the pressure differential that changes first conduction trough and the second conduction trough two ends.
The using method of aforesaid liquid lens arra can also be, when second liquid in the cavity between first partition and second substrate is non-conductive liquid, first partition is conductive material, on second substrate conductive layer is arranged, on-load voltage is realized the change of liquid lens array focal length between first partition and second substrate; When second liquid in the cavity between first partition and second substrate is conducting liquid, first cuts off surface conduction, and the covering insulation course has conductive layer on second substrate, and on-load voltage is realized the change of liquid lens array focal length between the conductive layer of first partition and second substrate.
Because first liquid and second liquid of each liquid lens unit all communicate each other, the curved surface surface of contact that has guaranteed all liq lens unit has identical laplace pressure, the radius-of-curvature that is all liq lens unit equates, thereby the liquid lens unit with the same focal length is finished in preparation, can realize simultaneously the automatic correction of liquid volume in working order, guarantee the unanimity of focal length.
The invention has the beneficial effects as follows, a kind of liquid lens array new construction is proposed, realized the self assembly mode of two kinds of liquid lens arrays, guaranteed equating of liquid lens array focal length, and has the focal length zero offset capability, simple in structure, be fit to the large-area liquid lens array of preparation with uniformity focal length.
Description of drawings
Fig. 1 is a traditional liquid array structure thereof synoptic diagram.
Fig. 2 is the first preferred embodiment synoptic diagram of the liquid lens array structure that proposes of the present invention.
Fig. 3 is liquid lens array is realized self assembly by pressure a synoptic diagram.
Fig. 4 is liquid lens array is realized self assembly by electric field force a synoptic diagram.
Fig. 5 is the second preferred embodiment synoptic diagram of the liquid lens array structure that proposes of the present invention.
Fig. 6 a is first vertical view that cuts off, and 6b, 6c, 6d are respectively that the pairing support of Fig. 6 a cuts off 12 synoptic diagram.
Have among the above figure: 1. first substrate; 2. first liquid; 3. first surface of contact; 4. second liquid; 5. hydrophobic layer; 6. first cuts off; 7. second substrate; 8. first conduction trough; 9. second conduction trough; 10. second cuts off; 11. second surface of contact; Cut off 12. support.
Fig. 7 liquid lens array focal length variations effect synoptic diagram.
Embodiment
It shown in Fig. 2 first preferred embodiment of liquid lens array of the present invention.First substrate 1 and second substrate 7 are transparency carriers among the figure, can be glass, transparent resin (for example acrylic), materials such as PET film, cutting off 10 by second between first substrate 1 and second substrate 7 links together, second partition 10 can be the various resin glues with sealing, AB glue for example, it mainly acts on is the cavity that forms a sealing between first substrate 1 and second substrate 7, the liquid that in the cavity of sealing, includes two kinds of not mixings, i.e. first liquid 2 and second liquid 4, two kinds of liquid refractive index differences, first liquid 2 can be alkanes mineral oil, silicone oil for example, dodecane, the tetradecane, hexadecane etc., second liquid 4 can be and first liquid, 2 immiscible alcohols, propylene glycol for example, glycerine etc., it also can be the deionized water of not mixing, cutting off 6 by first between first liquid 2 and second liquid 4 cuts apart, first cuts off 6 is fixed on second partition 10, first partition 6 is the reticulated cell structure, promptly rectangular, or the circular port of product word shape arrangement, or hexagonal hole, or square opening, first partition 6 can be transparent resin film, PET film for example, it also can be opaque metallic film, variation range for the radius-of-curvature of first surface of contact 3 in the hole that increases by first liquid 2 and second liquid 4, the surface of first partition 6 can cover one deck hydrophobic layer, the thin layer that forms of polytetrafluoroethylmaterial material for example, promptly increase by first surface of contact 3 and first and cut off 6 contact angle, in order to realize the perfusion of two kinds of immiscible liquids in the liquid lens array, on second partition 10, two conduction troughs are arranged, i.e. first conduction trough 8 and second conduction trough 9, conduction trough can be circular, or square conduit, in Fig. 2, second conduction trough 9 is the liquid lead-in groove, first conduction trough 8 is derived groove for liquid, can realize the adjustment of liquid lens focal length by the pressure at control conduction trough two ends, for example when the pressure of second conduction trough, 9 porch during greater than the pressure of first conduction trough, 8 porch, to cause the inflow of second liquid 4 and the outflow of first liquid 2, thereby reduce the radius-of-curvature of first surface of contact 3, obtain the lens arra of littler focal length.
Preferred embodiment shown in Figure 2 can be realized a kind of liquid perfusion that realizes self assembly by pressuring method.It shown in Fig. 3 the method for filling of realizing two kinds of not mixing liquid, first substrate 1 and second substrate 7 form the cavity of a sealing by second partition 10, before perfusion fluid not, be full of air in the cavity, at first perfusion is first liquid 2, can first liquid 2 be poured into by second conduction trough 9 by pressing mode, up to being full of whole cavity, and by 8 outflows of first conduction trough, after being full of first liquid 2, second conduction trough 9 is connected to second liquid 4, by powering up the liquid perfusion that mode realizes self assembly, promptly, realize the perfusion of second liquid 4 by changing second substrate, 7 wettability of the surface, in the process that second liquid 4 pours into, there are two kinds of surface of contact shown in Fig. 3, i.e. first surface of contact 3 and second surface of contact 11, this moment two kinds of surface of contact that surface of contact is first liquid 2 and second liquid 4, first surface of contact 3 cuts off 6 aperture shape decision by first, for example during circular port, first surface of contact 3 is a sphere, and second surface of contact 11 is the face of cylinder, R
1Be that second surface of contact 11 is at the radius-of-curvature perpendicular to second substrate, 7 directions, R
1' be that first surface of contact 3 is in the radius-of-curvature perpendicular to second substrate, 7 directions.As shown in Figure 4, for realizing that powering up mode self assembly second substrate 7 surfaces needs to cover one deck conductive layer, for example prepare one deck ITO conductive film by rf magnetron sputtering, when second liquid 4 is non-conductive liquid, glycerine for example, on-load voltage between second liquid 4 and second substrate, 7 conductive layers, produce dielectrophoretic force, under dielectrophoretic force drives, second liquid 4 will progressively be flowed into and be moved along the surface of second substrate 7 by second conduction trough 9, thereby first liquid 2 is driven to first half cavity (first cuts off the space between 6 and first substrate 1) from the Lower Half cavity, because first cuts off 6 existence, add in the electric process first surface of contact 3 and be hemisphere face, and there is laplace pressure, thereby stop second liquid 4 further to flow into first half cavity, when second liquid 4 is conducting liquid, ionic liquid for example, need on second substrate, 7 conductive layers, to cover a layer insulating again, aluminium oxide for example, on-load voltage between second liquid 4 and second substrate, 7 conductive layers, produce electric wetting power, equally under electric wetting power drives, second liquid 4 will progressively be flowed into and be moved along the surface of second substrate 7 by second conduction trough 9, thereby first liquid 2 is driven to first half cavity from the Lower Half cavity.
Preferred embodiment shown in Figure 2 can be realized uniform liquid lens array.The radius-of-curvature of supposing continuous liquid lens unit does not wait, then the laplace pressure of two liquid lens unit is unequal, when liquid lens array is in steady state (SS), when reaching first conduction trough 8 and second conduction trough, 9 closed at both ends, above-mentioned two liquid lens unit can be adjusted into radius-of-curvature and equate under the effect of laplace pressure difference, thereby eliminate pressure differential, the rest may be inferred, in steady state (SS), the radius-of-curvature of all liq lens unit equates that promptly focal length equates.
Preferred embodiment shown in Figure 2 can realize that focal length dynamically adjusts, and promptly realizes the adjustment of focal length by the pressure that changes first conduction trough 8 and second conduction trough, 9 porch.For example increase the pressure of second conduction trough, 9 porch, make its greater than the pressure of first surface of contact 3 and first conduction trough, 8 porch and, then net inflow takes place in second liquid 4, and net outflow takes place in first liquid 2, the radius-of-curvature of first surface of contact 3 diminishes gradually, the focal length of liquid lens diminishes, or the pressure of the pressure of opposite first conduction trough 8 porch and first surface of contact 3 and greater than the pressure of second conduction trough, 9 porch, then the radius-of-curvature of first surface of contact 3 becomes greatly gradually, and it is big that the focal length of liquid lens becomes.
Preferred embodiment shown in Figure 2 can be realized electric field force adjustment focal length.Cut off 6 this moment first and can adopt conductive material, corrosion resistant plate for example, increase one deck conductive layer on second substrate 7, ITO conductive layer for example, when second liquid 4 is non-conductive liquid, glycerine for example, increasing voltage between the conductive layer on first partition, 6 and second substrate 7, will produce dielectrophoretic force, under the effect of dielectrophoretic force, the contact angle of second liquid 4 and first partition 6 will change, promptly the radius-of-curvature of first surface of contact 3 changes, thereby changes the focal length of liquid lens, when second liquid 4 is conducting liquid, for example contain Nacl, the deionized water of Kcl, or ionic liquid need to cut off increase by one layer insulating on 6 first, aluminium oxide for example, cut off 6 and second substrate 7 on first this moment increases voltage between the conductive layer, will produce electric wetting power, under the effect of electric wetting power, the contact angle of second liquid 4 and first partition 6 will change, thereby change the focal length of liquid lens.
Shown in Figure 5 is second preferred embodiment of liquid lens array of the present invention.The key distinction of itself and preferred embodiment shown in Figure 2 is to cut off first to be increased by one and supports partition 12 between 6 and second substrate 7, thereby when realizing the large tracts of land liquid lens array, support and cut off 12 distances that can stablize between first partition, 6 and second substrate 7, support partition 12 and can adopt transparent resin material preparation, for example su8 photoresist.The structure that supports partition 12 can be structure shown in Figure 6 (structure is represented with black region among the figure), be the corresponding relation between clear description first partition 6 and the support partition 12, what at first show among Fig. 6 a is the front plan view shape structure of first partition 6, promptly be the array of circular apertures that product word shape is arranged, support 12 of partitions and be positioned at adjacent three centers that are the circular hole of product word shape arrangement, the cross sectional shape that supports partition 12 can be the triangle shown in Fig. 6 b, circle shown in Fig. 6 c, or the polygon shown in Fig. 6 d, support and cut off 12 the satisfied connection that had both guaranteed second liquid 4 between the different liquids lens unit of need, need try one's best simultaneously and not block the imaging optical path of liquid lens unit, the researcher in this field can design various supports as required and cut off 12 shape.
It can also be an integral body that first partition 6 shown in Figure 5 and support cut off 12, promptly adopts the su8 material to finish through double exposing once to develop.Particularly, at first adopt the method for even glue or coating on second substrate 7, to prepare the su8 thick film, adopt unconventional exposure method then, promptly at first partition 12 structures are supported in exposure, Fig. 6 b for example, c, arbitrary or similar pattern among the d, fully exposure of employing at this moment, assurance support partition 12 patterns expose to base plate always and contact fully with second substrate 7, second exposure first cuts off 6 patterns, Fig. 6 a pattern for example, under the prerequisite that twice pattern position aimed at, second carries out insufficient exposure, promptly first partition, 6 patterns only expose to the upper semisection of su8 thick film, and structure shown in Figure 5 just can be realized by developing in the double exposure back.The researcher in this field can adopt similar double exposure method as required, utilizes various photoresists to realize said structure.
Figure 7 shows that liquid lens array focal length variations effect synoptic diagram.Liquid lens array is arranged for product word shape among the figure, and the aperture of lens is 1mm, and first liquid is silicone oil, and second liquid is deionized water, and the lens rear is the literal picture.Fig. 7 a is literal picture shot during by clear focusing, and will cause the focal length of liquid lens array to change in the further pressure boost of second conduction trough this moment, thereby becomes the pictures taken of the literal shown in Fig. 7 b after fuzzy.
Claims (7)
1. the method for filling of a liquid lens array, described liquid lens array comprises, first substrate (1) parallel to each other and second substrate (7) of following setting, it is characterized in that, first substrate (1) cuts off (10) with second substrate (7) by second of middle hollow and forms closed cavity, be provided with parallel with them first between first substrate (1) and second substrate (7) and cut off (6), cut off (6) by first above-mentioned closed cavity is divided into two cavitys up and down, be respectively applied for two kinds of immiscible liquids first liquid of splendid attire (2), second liquid (4), be distributed with reticulated cell on first partition (6), can make first liquid (2) and second liquid (4) in the hole, form the curved surface surface of contact, second cuts off (10) is provided with first conduction trough (8) and second conduction trough (9), first conduction trough (8) and second conduction trough (9) are divided into the both sides of first partition (6), wherein second conduction trough (9) is positioned at the side near second substrate (7), and described method for filling is:
After formerly pouring into first liquid (2) and making it to be full of described closed cavity, second conduction trough (9) is communicated to second liquid (4), by on-load voltage between second liquid (4) and second substrate (7), change the contact angle between second liquid (4) and second substrate (7), second liquid (4) is progressively moved by second conduction trough (9) inflow and along the surface of second substrate (7), thereby first liquid (2) is expelled between first partition (6) and second substrate (7), be full of first cavity that cuts off between (6) and second substrate (7) until second liquid (4), first liquid (2) that is expelled is flowed out by first conduction trough (8).
2. the method for filling of liquid lens array as claimed in claim 1 is characterized in that, second substrate is covered with conductive layer on (7), and described second liquid (4) is non-conductive liquid.
3. the method for filling of liquid lens array as claimed in claim 2 is characterized in that, also is covered with insulation course on the conductive layer of second substrate (7), and described second liquid (4) is conducting liquid.
4. use the liquid lens array of each described method for filling among the claim 1-3, it is characterized in that, comprise, first substrate (1) parallel to each other and second substrate (7) of following setting, first substrate (1) cuts off (10) with second substrate (7) by second of middle hollow and forms closed cavity, be provided with parallel with them first between first substrate (1) and second substrate (7) and cut off (6), cut off (6) by first above-mentioned closed cavity is divided into two cavitys up and down, be respectively applied for two kinds of immiscible liquids first liquid of splendid attire (2), second liquid (4), be distributed with reticulated cell on first partition (6), can make first liquid (2) and second liquid (4) in the hole, form the curved surface surface of contact, second cuts off (10) is provided with first conduction trough (8) and second conduction trough (9), first conduction trough (8) and second conduction trough (9) are divided into the both sides of first partition (6), wherein second conduction trough (9) is positioned at the side near second substrate (7), and second substrate is covered with conductive layer on (7).
5. liquid lens array as claimed in claim 4 is characterized in that, also is covered with insulation course on the conductive layer of second substrate (7).
6. as claim 4 or 5 described liquid lens arrays, it is characterized in that, also be provided with between first partition (6) and second substrate (7) to support and cut off (12).
7. liquid lens array as claimed in claim 6 is characterized in that, first partition (6) is as a whole with support partition (12), by double exposure, and once development preparation.
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| CN 201010577213 CN102053362A (en) | 2010-12-07 | 2010-12-07 | Liquid lens array and filling method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103424790A (en) * | 2013-08-14 | 2013-12-04 | 东南大学 | Liquid lens and production method thereof |
| CN106773308A (en) * | 2017-01-03 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of display panel and its manufacture method, display device |
| WO2023040647A1 (en) * | 2021-09-15 | 2023-03-23 | 华为技术有限公司 | Lens and aberration correction method |
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| US20030006140A1 (en) * | 2001-02-28 | 2003-01-09 | Giacomo Vacca | Microfluidic control using dielectric pumping |
| US20070188882A1 (en) * | 2006-02-10 | 2007-08-16 | Honeywell International, Inc. | Devices and related methods for light distribution |
| CN100374900C (en) * | 2003-05-14 | 2008-03-12 | 皇家飞利浦电子股份有限公司 | Variable shape lens |
| CN201331593Y (en) * | 2009-01-09 | 2009-10-21 | 东南大学 | Symmetrical type liquid lens array |
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2010
- 2010-12-07 CN CN 201010577213 patent/CN102053362A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030006140A1 (en) * | 2001-02-28 | 2003-01-09 | Giacomo Vacca | Microfluidic control using dielectric pumping |
| CN100374900C (en) * | 2003-05-14 | 2008-03-12 | 皇家飞利浦电子股份有限公司 | Variable shape lens |
| US20070188882A1 (en) * | 2006-02-10 | 2007-08-16 | Honeywell International, Inc. | Devices and related methods for light distribution |
| CN201331593Y (en) * | 2009-01-09 | 2009-10-21 | 东南大学 | Symmetrical type liquid lens array |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103424790A (en) * | 2013-08-14 | 2013-12-04 | 东南大学 | Liquid lens and production method thereof |
| CN103424790B (en) * | 2013-08-14 | 2016-01-06 | 东南大学 | A kind of liquid lens and preparation method thereof |
| CN106773308A (en) * | 2017-01-03 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of display panel and its manufacture method, display device |
| WO2023040647A1 (en) * | 2021-09-15 | 2023-03-23 | 华为技术有限公司 | Lens and aberration correction method |
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Application publication date: 20110511 |