CN101840012A - Artificial compound eye lens with controllable curvature and preparation method thereof - Google Patents
Artificial compound eye lens with controllable curvature and preparation method thereof Download PDFInfo
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Abstract
The invention discloses an artificial compound eye lens with controllable curvature and a preparation method thereof, belonging to the technical field of optics microcomponent. The method adopts a polymer to manufacture a die of a lens to be copied, and a double-faced method is adopted to prepare the artificial compound eye lens with controllable curvature by a plane compound eye lens array. The artificial compound eye lens prepared with the method of the invention comprises a substrate and a plurality of small holes on the external surface of the substrate, wherein the small hole is round, hexagonal or square, and the substrate and the compound eye lens are both prepared from polydimethylsiloxane. The artificial compound eye lens of the invention is suitable for various using environments, the small volume ensures that the artificial compound eye lens can directly form an optical imaging system on an image sensor or can replace the original single-aperture lens and is favourable for improving dynamic capture capability and spatial information capture capability.
Description
Technical field
What the present invention relates to is camera lens of a kind of micro-optical device technical field and preparation method thereof, specifically is artificial compound eye lens of a kind of controllable curvature and preparation method thereof.
Background technology
Along with optics, mechanics, the continuous development in fields such as electronics and fusion mutually, ray machine electricity product is more and more widely, and is also more and more higher to its requirement simultaneously.But single aperture optical systems, because the restriction of its volume and weight can't adapt to portable and smart requirement.Artificial compound eye is that a plurality of subjects such as collection biology, optics, electronics, information processing, data fusion, automatic control are one, has the forward position research field of novelty, marginality, intercrossing.Cambered artificial compound eye is compared with the plane artificial compound eye and is had more the image quality height, field angle is wide, the dynamic reflection advantages of higher has broad application prospects at interior technology, small-bore detection, automatic weapon sighting system, intelligence machine human visual system and the guided missile aiming device etc. peeped.
Find by prior art documents, Jacques Duparr ' e, Daniela Radtke, Andreas Br ¨ uckner, Andreas Br ¨ auer etc. writes articles " Latest Developments in Microoptical ArtificialCompound Eyes:A Promising Approach for Next Generation Ultra-Compact Machine Vision " (" latest developments of micro-optic artificial compound eye: a kind of compact machines vision of future generation with bright prospects " " machine vision in the industrial detection ") at Machine Vision Applications in Industrial Inspection XV (2007) Vol:6503Page:I5030-I5030.The external present Research and the preparation method of compound eye have at present been introduced in this article, can roughly these preparation methods be divided into the compound eye curved surface that adopts air pressure official post deformation of thin membrane to obtain certain curvature, perhaps adopt semiconductor processing technology to prepare the plane compound eye structural.Adopt PDMS material (dimethyl silicone polymer) as initial compound eye array pattern duplicating material in the curved compound eye manufacture craft of mentioning in this article, because the prepared film of PDMS itself has elasticity, in the draught head deformation process because a variety of causes such as film thickness, air pressure cylinder body seal degree, deformation of thin membrane degree can't obtain accurate curvature and the more complicated fly's-eye lens of shape.
At the domestic document and the inquiry of patent, the process that can obtain curved compound eye among the domestic compound eye preparation method is for adopting specific installation directly laser ablation or same pressure differential distortion preparation of adopting film in the curved surface substrate simultaneously.The topmost defective of these methods is that its poor efficiency is expensive, and the making of every compound eye all must improve preparation cost greatly through identical processing step.
Summary of the invention
The present invention is directed to the prior art above shortcomings, artificial compound eye lens of a kind of controllable curvature and preparation method thereof is provided, the mould that possesses certain rigidity by employing is realized little method of duplicating of control surface curvature and shape to compound eye, the compound eye lens of preparation can substitute original single aperture camera lens and image sensor cooperates, thereby realize the function of the artificial compound eye pick-up lens of controlled curvature, help the field angle and the motion capture ability that improve pick-up lens.
The present invention is achieved by the following technical solutions:
The present invention relates to a kind of artificial compound eye lens of controllable curvature, comprising: substrate and the some ommatidiums that are positioned on the outer surfaces of substrates constitute, and wherein: ommatidium is circle, hexagon or square structure.
Described substrate and fly's-eye lens are the dimethyl silicone polymer material.
The present invention relates to the preparation method of the artificial compound eye lens of above-mentioned controllable curvature, make the die for the treatment of repeat glass, adopt two-sided method the plane fly eye lens array to be prepared into the artificial compound eye lens of controllable curvature by adopting polymkeric substance.
Described plane fly eye lens array prepares in the following manner: at first on silicon chip substrate splash-proofing sputtering metal as adhesive coating, then at adhesive coating surface spin coating photoresist, make the columnar projections structure by photoetching treatment then, place baking oven to melt photoresist at last, make the photoresist salient point of the surface formation hemispherical dome structure of silicon chip substrate, as the plane fly eye lens array.
Described photoetching treatment is meant: adopt circle, hexagon or square column compound eye array to carry out photoetching as mask plate;
The thickness of described adhesive coating is 100 dusts, and described splash-proofing sputtering metal is a chromium-copper;
Described photoetching is meant: exposed in the position that scribbles photoresist, adopt the AZ-400K developing liquid developing to remove the photoresist of exposure area in 180 seconds then.
Described fusing photoresist is meant oven temperature is set at 175 ℃～185 ℃ that fusing time is 20～30 minutes.
Described two-sided method is meant: by adding dimethyl silicone polymer in having the die for the treatment of repeat glass curvature, and the punch extruding that will have a plane fly eye lens array obtains the artificial compound eye lens of controllable curvature after be heating and curing.
Described being heating and curing was meant: with 60 ℃ of bakings 3 hours.
Described punch with plane fly eye lens array is meant: at the surperficial spin coating first dimethyl silicone polymer layer of plane fly eye lens array to duplicate the plane fly eye lens array; after alcohol-pickled, the bottom surface of the first dimethyl silicone polymer layer is peeled off mutually with the plane fly eye lens array; then on this bottom surface the deposition Parylene as hydrophobic peel ply and on hydrophobic peel ply the spin coating second dimethyl silicone polymer layer make punch as the figure protective seam.
The thickness of the described first dimethyl silicone polymer layer and the second dimethyl silicone polymer layer is 300～500 microns.
Described Parylene hydrophobic layer thickness is 3～5 microns, and the dimethyl silicone polymer protective layer thickness of spin coating on the hydrophobic layer is at 40 microns to 100 microns.
Described have the die for the treatment of repeat glass curvature and be meant: treating that repeat glass surface spin coating dimethyl silicone polymer makes die after adding thermocoagulation.
Compared with prior art, the preparation technology of cambered artificial compound eye of the present invention can accurately control compound eye substrate curvature value, and can prepare the artificial compound eye with given configuration under the situation that does not influence little fly's-eye lens form factor.The gained cambered artificial compound eye has increased field angle, can improve the edge image quality; The present invention simultaneously prepares the compound eye lens of the different physical dimension of gained, can replace the camera lens of former single aperture imaging device.
Description of drawings
Fig. 1 is embodiment 1 synoptic diagram;
Wherein: Fig. 1 a is three-dimensional compound eye synoptic diagram; Fig. 1 b is local enlarged diagram; Fig. 1 c is corresponding negative mold synoptic diagram; Fig. 1 d is the 6th step laminated film synoptic diagram; Mark A is the film that duplicates the compound eye array pattern among the figure, and mark B is the figure protective film, and the middle layer is a hydrophobic layer.
Fig. 2 is embodiment 2 synoptic diagram;
Wherein: Fig. 2 a is three-dimensional compound eye synoptic diagram; Fig. 2 b is local enlarged diagram; Fig. 2 c is corresponding negative mold synoptic diagram; Fig. 2 d is the 6th step laminated film synoptic diagram; Mark A is the film that duplicates the compound eye array pattern among the figure, and mark B is the figure protective film, and the middle layer is a hydrophobic layer.
Fig. 3 is embodiment 3 synoptic diagram;
Wherein: Fig. 3 a is three-dimensional compound eye synoptic diagram; Fig. 3 b is local enlarged diagram; Fig. 3 c is corresponding negative mold synoptic diagram; Fig. 3 d is the 6th step laminated film synoptic diagram; Mark A is the film that duplicates the compound eye array pattern among the figure, and mark B is the figure protective film, and the middle layer is a hydrophobic layer.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Embodiment 1
As shown in Figure 1a, present embodiment comprises: the fly's-eye lens of compound eye substrate and circular configuration, wherein: the diameter of compound eye substrate is 1 centimetre high 4 millimeters spherical crown shape substrate, and fly's-eye lens is 160 microns of diameters, the spherical convex lens that height is 16 microns.
Present embodiment is prepared by following steps:
The first step, cleaning silicon chip substrate, sputter chromium on silicon chip substrate is made the metal level that thickness is 100 dusts;
Shown in Fig. 1 b, second the step, at layer on surface of metal spin coating photoresist, adopt circular compound eye array structure to make the columnar projections structure then by photoetching treatment;
The body diameter of described circular compound eye array is 150 microns, highly is 18 microns.
The 3rd silicon chip substrate that goes on foot, will scribble photoresist places 180 ℃ of baking ovens fusings 25 minutes, makes the photoresist salient point of the surface formation hemispherical dome structure of silicon chip substrate;
Described photoresist salient point diameter is 160 microns, highly is 16 microns.
Shown in Fig. 1 c, the 4th step, at the surperficial spin coating dimethyl silicone polymer of photoresist salient point to duplicate the plane fly eye lens array:
The thickness of described dimethyl silicone polymer layer is 400 microns.
The 5th step, the dimethyl silicone polymer layer of basal edge is removed, and after alcohol-pickled processing suprabasil dimethyl silicone polymer is taken off, make to possess figure and simultaneously make progress, the back side (A face) is affixed on the smooth glass;
The described back side is affixed on to be needed on the smooth glass to keep film smooth.
Shown in Fig. 1 d, the 6th step, the dimethyl silicone polymer layer of card on smooth glass had patterned surface deposition Parylene, as hydrophobic peel ply, and on hydrophobic layer again spin coating one deck dimethyl silicone polymer as figure protective seam (B face).
Described Parylene thickness is 3 microns, and the dimethyl silicone polymer protective layer thickness of going up spin coating on it is 87 microns.
The 7th the step, with a single aperture camera lens as mould; use the dimethyl silicone polymer repeat glass to duplicate its profile; take out camera lens after adding thermocoagulation; and in die, add a small amount of dimethyl silicone polymer; film A face after the gained protection of the 6th step is adopted towards die, be heating and curing after being molded into protrusion.
The described employed punch of laminated film that is pressed into can directly adopt the target camera lens, and die has certain elasticity, can guarantee the turnover of punch and does not damage.
The described temperature that is heating and curing is that 60 ℃ of times are 3 hours.
The a small amount of dimethyl silicone polymer of described interpolation is a bonding agent, and consumption is 8% of a die volume.
The 8th step; after treating that the complete adhesion of compound eye film and die is solidified; peel off figure protective seam (B face), and in die, pour dimethyl silicone polymer into and be heating and curing, separate the cambered artificial compound eye that possess designated shape feature mutually compound at last with target curvature with compound eye figure.
The described temperature that is heating and curing is that 60 ℃ of times are 3 hours.
Embodiment 2
Shown in Fig. 2 a-Fig. 2 d, present embodiment comprises: the fly's-eye lens of compound eye substrate and hexagonal structure, wherein: the diameter of compound eye substrate is 1.8 centimetres of curved surface substrates with step-feature, and fly's-eye lens is to 190 microns of angular length, the hexagon convex lens that height is 19 microns.
Present embodiment is prepared by following steps:
The first step, cleaning silicon chip substrate, sputter chromium on silicon chip substrate is made the metal level that thickness is 100 dusts;
Second the step, at layer on surface of metal spin coating photoresist, adopt the mask plate of hexagon pillar array structure to make the columnar projections structure then by photoetching treatment;
The diameter of described hexagon post is 180 microns, highly is 21 microns.
The 3rd silicon chip substrate that goes on foot, will scribble photoresist places 180 ℃ of baking ovens fusings 25 minutes, makes the photoresist salient point of the surface formation hemispherical dome structure of silicon chip substrate;
Described thawing back photoresist salient point catercorner length is 190 microns, highly is 19 microns.
The 4th step, duplicate the plane fly eye lens array at the surperficial spin coating dimethyl silicone polymer of photoresist salient point;
The thickness of described dimethyl silicone polymer is 340 microns.
The 5th step, the dimethyl silicone polymer layer of basal edge is removed, and after alcohol-pickled processing suprabasil dimethyl silicone polymer layer is taken off, make to possess figure and simultaneously make progress, the back side (A face) is affixed on the smooth glass;
The described back side is affixed on to be needed on the smooth glass to keep film smooth.
The 6th step, the dimethyl silicone polymer layer of card on smooth glass had patterned surface deposition Parylene, as hydrophobic peel ply, and on hydrophobic layer again spin coating one deck dimethyl silicone polymer as figure protective seam (B face).
Described Parylene thickness is 3 microns, and the dimethyl silicone polymer protective layer thickness of going up spin coating on it is 84 microns.
The 7th the step, with a single aperture camera lens as mould; use the dimethyl silicone polymer repeat glass to duplicate its profile; take out camera lens after adding thermocoagulation; and in die, add a small amount of dimethyl silicone polymer; film A face after the gained protection of the 6th step is adopted towards die, be heating and curing after being molded into protrusion.
The described employed punch of laminated film that is pressed into can directly adopt the target camera lens, and die has certain elasticity, can guarantee the turnover of punch and does not damage.
The described temperature that is heating and curing is that 60 ℃ of times are 3 hours.
The a small amount of dimethyl silicone polymer of described interpolation is a bonding agent, and consumption is 8% of a die volume.
The 8th step; after treating that the complete adhesion of compound eye film and die is solidified; peel off figure protective seam (B face), and in die, pour dimethyl silicone polymer into and be heating and curing, separate the cambered artificial compound eye that possess designated shape feature mutually compound at last with target curvature with compound eye figure.
The described temperature that is heating and curing is that 60 ℃ of times are 3 hours.
Embodiment 3
Shown in Fig. 3 a-Fig. 3 d, present embodiment comprises: the fly's-eye lens of compound eye substrate and square structure, and wherein: the diameter of compound eye substrate is 2 centimetres high 8 millimeters hollow segment substrates, and its hollow diameter is 1 centimetre high 3 millimeters, fly's-eye lens is 180 microns of the length of sides, the square convex lens that height is 20 microns.
Present embodiment is prepared by following steps:
The first step, cleaning silicon chip substrate, sputter chromium on silicon chip substrate is made the metal level that thickness is 100 dusts;
Second the step, at layer on surface of metal spin coating photoresist, adopt the mask plate of square compound eye array structure to make the columnar projections structure then by photoetching treatment;
The square column diameter of described square compound eye array is 175 microns, highly is 22 microns.
The 3rd silicon chip substrate that goes on foot, will scribble photoresist places 180 ℃ of baking ovens fusings 25 minutes, makes the photoresist salient point of the surface formation hemispherical dome structure of silicon chip substrate;
The described thawing back photoresist salient point length of side is 180 microns, highly is 20 microns.
The 4th step, duplicate the plane fly eye lens array at the surperficial spin coating dimethyl silicone polymer of photoresist salient point;
The thickness of described dimethyl silicone polymer is 380 microns.
The 5th step, the dimethyl silicone polymer layer of basal edge is removed, and after alcohol-pickled processing suprabasil dimethyl silicone polymer layer is taken off, make to possess figure and simultaneously make progress, the back side (A face) is affixed on the smooth glass;
The described back side is affixed on to be needed on the smooth glass to keep film smooth.
The 6th step, the dimethyl silicone polymer layer of card on smooth glass had patterned surface deposition Parylene, as hydrophobic peel ply, and on hydrophobic layer again spin coating one deck dimethyl silicone polymer as figure protective seam (B face).
Described Parylene thickness is 3 microns, and the dimethyl silicone polymer protective layer thickness of going up spin coating on it is 82 microns.
The 7th the step, with a single aperture camera lens as mould; use the dimethyl silicone polymer repeat glass to duplicate its profile; take out camera lens acquisition die after adding thermocoagulation; and in die, add a small amount of dimethyl silicone polymer; film A face after the gained protection of the 6th step is adopted towards die; be heating and curing after being molded into protrusion, pour dimethyl silicone polymer into to obtain its hollow segment punch in single aperture lens reverse side female parts simultaneously, need at its surface deposition Parylen as hydrophobic layer after being heating and curing.
The described employed punch of laminated film that is pressed into can directly adopt the target camera lens, and die has certain elasticity, can guarantee the turnover of punch and does not damage.
Described Parylene thickness is 3 microns.
The described temperature that is heating and curing is that 60 ℃ of times are 3 hours.
The a small amount of dimethyl silicone polymer of described interpolation is a bonding agent, and consumption is 8% of a die volume.
The 8th step; after treating that the complete adhesion of compound eye film and die is solidified; peel off figure protective seam (B face), and in die, pour dimethyl silicone polymer into and be heating and curing, separate the cambered artificial compound eye that possess designated shape feature mutually compound at last with target curvature with compound eye figure.
The described temperature that is heating and curing is that 60 ℃ of times are 3 hours.
The cambered artificial compound eye that this example is prepared.Its advantage is: have different resemblances, be applicable to various environments for use, the volume I helps to improve motion capture ability and three-dimensional information extraction ability directly to form optical imaging system in imageing sensor or to substitute original single aperture camera lens.
Claims (10)
1. the artificial compound eye lens of a controllable curvature is characterized in that, comprising: substrate and the some ommatidiums that are positioned on the outer surfaces of substrates constitute, and wherein: ommatidium is circle, hexagon or square structure;
Described substrate and fly's-eye lens are the dimethyl silicone polymer material.
2. the preparation method of the artificial compound eye lens of a controllable curvature as claimed in claim 1, it is characterized in that, by adopting polymkeric substance to make the die for the treatment of repeat glass, adopt two-sided method the plane fly eye lens array to be prepared into the artificial compound eye lens of controllable curvature.
3. the preparation method of the artificial compound eye lens of controllable curvature according to claim 2, it is characterized in that, described plane fly eye lens array prepares in the following manner: at first on silicon chip substrate splash-proofing sputtering metal as adhesive coating, then at adhesive coating surface spin coating photoresist, make the columnar projections structure by photoetching treatment then, place baking oven to melt photoresist at last, make the photoresist salient point of the surface formation hemispherical dome structure of silicon chip substrate, as the plane fly eye lens array.
4. the preparation method of the artificial compound eye lens of controllable curvature according to claim 3 is characterized in that, described photoetching treatment is meant: adopt circle, hexagon or square column compound eye array to carry out photoetching as mask plate.
5. the preparation method of the artificial compound eye lens of controllable curvature according to claim 2 is characterized in that, the thickness of described adhesive coating is 100 dusts, and described splash-proofing sputtering metal is a chromium-copper.
6. according to the preparation method of the artificial compound eye lens of claim 2 or 4 described controllable curvature, it is characterized in that, described photoetching is meant: exposed in the position that scribbles photoresist, adopt the AZ-400K developing liquid developing to remove the photoresist of exposure area in 180 seconds then.
7. the preparation method of the artificial compound eye lens of controllable curvature according to claim 3 is characterized in that, described fusing photoresist is meant oven temperature is set at 175 ℃～185 ℃ that fusing time is 20～30 minutes.
8. the preparation method of the artificial compound eye lens of controllable curvature according to claim 2, it is characterized in that, described two-sided method is meant: by adding dimethyl silicone polymer in having the die for the treatment of repeat glass curvature, and the punch extruding that will have a plane fly eye lens array obtains the artificial compound eye lens of controllable curvature after be heating and curing.
9. the preparation method of the artificial compound eye lens of controllable curvature according to claim 8; it is characterized in that; described punch with plane fly eye lens array is meant: at the surperficial spin coating first dimethyl silicone polymer layer of plane fly eye lens array to duplicate the plane fly eye lens array; after alcohol-pickled, the bottom surface of the first dimethyl silicone polymer layer is peeled off mutually with the plane fly eye lens array; then on this bottom surface the deposition Parylene as hydrophobic peel ply and on hydrophobic peel ply the spin coating second dimethyl silicone polymer layer make punch as the figure protective seam.
10. according to the preparation method of the artificial compound eye lens of claim 2 or 4 described controllable curvature, it is characterized in that described have the die for the treatment of repeat glass curvature and be meant: treating that repeat glass surface spin coating dimethyl silicone polymer makes die after adding thermocoagulation.
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| CN102540705A (en) * | 2012-01-17 | 2012-07-04 | 中北大学 | Preparation method of bionic PDMS (Polydimethylsiloxane) curved compound eye |
| CN102681046A (en) * | 2012-05-17 | 2012-09-19 | 中北大学 | Method for preparing large-area NOA73 curved-surface micro lens array |
| CN104867140A (en) * | 2015-05-13 | 2015-08-26 | 中国科学院光电技术研究所 | Large field of view positioning system based on bionic compound eye |
| CN106950618A (en) * | 2017-05-04 | 2017-07-14 | 鲁东大学 | A kind of method that utilization bionic super-hydrophobic structure prevents optical lens fogging |
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| CN101949518A (en) * | 2010-09-29 | 2011-01-19 | 上海铭源光源发展有限公司 | Manufacturing method for fly lens structure |
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| CN102540705B (en) * | 2012-01-17 | 2013-06-26 | 中北大学 | Preparation method of bionic PDMS (Polydimethylsiloxane) curved compound eye |
| CN102681046A (en) * | 2012-05-17 | 2012-09-19 | 中北大学 | Method for preparing large-area NOA73 curved-surface micro lens array |
| CN102681046B (en) * | 2012-05-17 | 2014-04-16 | 中北大学 | Method for preparing large-area NOA73 curved-surface micro lens array |
| CN104867140A (en) * | 2015-05-13 | 2015-08-26 | 中国科学院光电技术研究所 | Large field of view positioning system based on bionic compound eye |
| CN104867140B (en) * | 2015-05-13 | 2018-06-01 | 中国科学院光电技术研究所 | A kind of big visual field alignment system based on bionic compound eyes |
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