CN101806929A - Digital microfluidic varifocal lens and manufacturing method thereof - Google Patents
Digital microfluidic varifocal lens and manufacturing method thereof Download PDFInfo
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- CN101806929A CN101806929A CN 201010125510 CN201010125510A CN101806929A CN 101806929 A CN101806929 A CN 101806929A CN 201010125510 CN201010125510 CN 201010125510 CN 201010125510 A CN201010125510 A CN 201010125510A CN 101806929 A CN101806929 A CN 101806929A
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Abstract
The invention relates to a digital microfluidic varifocal lens and a manufacturing method thereof. In the digital microfluidic varifocal lens, a fluid lens and a hydraulic actuator unit are cavities which are full of fluid between a substrate and a cover board; the fluid in the two cavities is communicated with each other; the hydraulic actuator unit consists of a plurality of cavities which can be controlled independently and have same or different volumes; and under the operating condition, the output amount of the fluid in the cavities of the hydraulic actuator unit meets the change of a binary system. When voltage is applied between a common electrode and a control electrode, the corresponding cover board of the hydraulic actuator unit can generate deformation or movement, and one part of the fluid in the cavities of the hydraulic actuator unit is extruded to flow into the lens cavity to make the transparent cover board of the fluid lens generate deformation so as to change the focus of the lens. The hydraulic actuator unit cavities with different strobes can extrude the fluid with different volumes to enter the lens cavity to make the cover board of the lens generate different degrees of deformation so as to realize the change of the focus of the lens.
Description
Technical field
The present invention relates to a kind of digital microfluidic varifocal lens and preparation method thereof, belong to zoom lens and Micro-Opto-Electro-Mechanical Systems field.
Background technology
Zoom lens are key components in the optical systems such as microscope, camera, shooting mobile phone, medical science endoscope, optical storage, light interconnection.The traditional zoom camera lens generally is to be become by multi-disc lens and other optical elements sets, utilizes mechanical hook-up such as motor to change between the lens position to change the focal length of lens.This class zoom lens zoom rate is slow, cost an arm and a leg, and is difficult for realizing microminiaturized, can't be integrated in the micro-optics system.
The miniature zooming lens have that volume is little, cost is low, zoom rate is fast, easy characteristics such as processing, can be widely used in being with a wide range of applications in fields such as infotech, health care, space technologies in the portable minisize optical system such as shooting mobile phone.At present, proposed miniature zooming lens, and part has realized that commercialization, representational company have French Varioptic, U.S. Sunex Inc., Switzerland Optotune, Canadian Artificial Muscle Inc. etc. based on different mechanisms.Wherein, miniature focus variable liquid lens is particularly noticeable.Liquid lens realizes that the principle of zoom mainly can be divided into following three types: based on electrowetting effect, based on variations in refractive index and based on the filling liquid surface curvature change.Zoom lens (B.Berge, et.al., IEEE MEMS2005,2005,227-230 based on electrowetting effect; H.Zappe, Optoelctron.Lett., 2007,4,86-88; ) be to utilize impressed voltage to change the contact angle that changes between electric wetted media and the insulation course, thus the surface curvature that changes liquid cross-sectional realizes the lens zoom.This zoom lens response time is short, integrated performance is good, but driving voltage height, aperture of lens size are limited; The continuous vari-focus that passes through to change material refractive index realization lens based on variations in refractive index, as liquid-crystal zoom lens (H.W.Ren, et.al., Opt.Express, 2007,15,11328-11335) apply the voltage-regulation liquid-crystal refractive-index and distribute by change, characteristics such as that this zoom lens have is simple in structure, resistance to shock good, easy array but since in the liquid crystal heterogeneity of electric field can produce optical aberration; Zoom lens based on the filling liquid surface curvature change pass through actuator (static driven (B.K.Nguyen, et.al., Appl.Phys.Lett., 2008,93,124101), Piezoelectric Driving (H.Oku, et.al., Opt.Express, 2004,12,2138-2149), Micropump drives (G.H.Feng, et.al., Appl.Opt., 2009,48,3284-3290; M.Agarwal, et.al., J.Micromech.Microeng., 2004,14,1665-1673), heat drives (W.S.Wang, et.al., IEEESens.J., 2007,7,11-17), marmem drives (H.M.Song, et.al., Opt.Express, 2009,17,14339-14350) etc.) liquid in the extrusion chamber changes the transparent fexible film curvature of housing surface, thereby realizes lens focus.Characteristics such as that this zoom lens have is low in energy consumption, aperture of lens flexible in size, handling ease, zooming range are big, but the actuator control accuracy is required high.
In sum, the microfluid zoom lens of having reported are to realize the lens zoom by changing analog input modes such as voltage mostly, therefore need control circuit module that the voltage output of variation is provided, and have increased device cost.Improve maximum output voltage and can increase the lens zoom ratio, but power consumption also increases thereupon.
Summary of the invention
One of purpose of the present invention is to provide a kind of digital microfluidic varifocal lens, and described digital microfluidic varifocal lens comprises fluid lens, hydraulic actuator unit, public electrode, control electrode, contact conductor and pin, lead-in wire and lead-in wire groove, fluid connectivity slot, sample holes, vent port, band etc.It is characterized in that: 1. fluid lens and hydraulic actuator unit are the cavitys that is full of fluid between substrate and cover plate, and both cavity inner fluids interconnect; 2. sample holes is communicated with the cavity of lens or hydraulic actuator unit by fluid connectivity slot or lead-in wire groove with vent port; 3. control electrode be positioned at the hydraulic actuator unit under, and identical with the shape of hydraulic actuator unit.The hydraulic actuator unit is made up of the cavity that several can independently be controlled, volume is identical or inequality.When between public electrode and control electrode, applying voltage, corresponding hydraulic actuator unit cover can produce distortion or move, a part of fluid enters in the lens cavity in the extruding actuator unit cavity, makes the transparent cover plate of fluid lens be out of shape, thereby changes the focal length of lens.Select the different hydraulic actuator unit or the control electrode of a plurality of actuator units, can push not isometric fluid and enter in the lens cavity, make the fluid lens cover plate produce distortion in various degree, realize that the focal length of lens changes within the specific limits.
The substrate of described fluid lens cavity and cover plate are transparent, and cover plate is the single or multiple lift film.
Described hydraulic actuator unit cover is single thin film or multilayer film.
Described hydraulic actuator unit satisfies scale-of-two and changes applying voltage rear chamber inner fluid output quantity, particularly, hydraulic actuator unit cavity i, i+1 are respectively V (i) applying voltage rear chamber inner fluid output quantity, V (i+1), then V (i+1)/V (i)=2.
Described hydraulic actuator unit cavity is arranged arbitrarily around lens.
Described sample holes is communicated with lens, hydraulic actuator unit cavity by fluid connectivity slot or lead-in wire groove with vent port.
Described hydraulic actuator unit cover is as public electrode.
Described control electrode and contact conductor, pin material are conductive films.
Described control electrode is positioned under the hydraulic actuator unit and is identical with the hydraulic actuator cell configuration.Described control electrode is that several can independently be controlled, electrode electrically isolated from one.
Described contact conductor is to have the straight line at any angle of inclination or the curve of any radian.
Described lead-in wire groove sidewall has insulation film.
One of purpose of the present invention is to provide a kind of digital microfluidic varifocal lens method for making, mainly comprises: lead-in wire groove, fluid connectivity slot form, and lens and actuator cavity, sample holes, vent port form, and electrode and lead-in wire thereof form band formation etc.Specifically be characterised in that:
(1) on the first substrate monocrystalline silicon, forms lead-in wire groove and fluid connectivity slot.
(2) monocrystalline silicon formation lens and hydraulic actuator cavity, sample holes, vent port in described first substrate of step (1).
(3) on second base glass substrate, form the conductive film of electrode, lead-in wire and pin figure.
(4) with the first substrate monocrystalline silicon and the second base glass substrate picture surface bonding, thinning back side first substrate is to certain thickness.
(5) form the conductive film that electrically contacts figure at the first base monocrystalline silicon bottom back side, the first substrate monocrystalline silicon directly over etching lens cavity, vent port, sample holes and the electrode pin hole is to exposing control electrode on second base glass substrate fully.The film of making is attached to lens cavity opening part and finishes bonding.
(6) scribing, sealing wire groove seal sample holes, vent port, routing behind the filling liquid.
Fill the hydrophilic fluid of insulation in described lens and the hydraulic actuator cavity, after step (2), must cover hydrophilic film or step (6) on the first substrate monocrystalline silicon picture surface and irritate liquid previous crops chip hydrophilic treatment.
Fill the hydrophobic fluid of insulation in described lens and the hydraulic actuator cavity, after step (3), electrode that forms on second base glass substrate and lead-in wire must cover hydrophobic film or step (6) is being irritated liquid previous crops chip hydrophobic treatments.
The invention has the beneficial effects as follows that the digital microcurrent-controlled zoom lens of employing have reduced the control accuracy requirement to actuator, and control mode is simpler.What the lens zoom " left " by gating lens hydraulic actuator control module and " pass " two states is realized.Particularly, have not isometric static-hydraulic actuator unit or unit combination by gating and enter the lens cavity with the liquid of extruding different capabilities, thereby can realize that the focal length of lens changes in certain limit, analog zoom lens then need to provide accurate continually varying control voltage could obtain the accurate focal length of lens by special chip to be changed.In addition, because the power supply output voltage of portable set own is often lower, in order to improve the lens variation range, analog zoom lens also need special chip that high transformation ratio output is provided, and (as the cellular li-ion battery nominal voltage is 3.7 volts, a zoom lens module need be equipped with the mobile phone dedicated chip for driving MAX14515 of Maxim so that the highest 47 volts voltage output to be provided), this can increase the cost of entire chip group undoubtedly again.In addition, digital control die set provided by the invention also is being better than analog control die set aspect the anti-electromagnetic interference (EMI).Therefore, digital liquid zoom lens has advantages such as control mode is simple, chip cost is low, good in anti-interference performance, and in addition, digital liquid zoom lens also has characteristics such as driving voltage is low, aperture of lens flexible in size, easy processing.In sum, digital liquid zoom lens structure and control mode novelty are compared with existing commercialization microfluid zoom lens, and described device has certain competitive edge and potential commercial promise at aspects such as control mode, costs.
Description of drawings
Fig. 1 is an example structure synoptic diagram of digital microfluidic varifocal lens provided by the invention;
Fig. 2 is lead-in wire groove, the fluid connectivity slot vertical view of structure shown in Figure 1;
Fig. 3 is hydraulic actuator unit cavity, lens cavity, vent port, sample holes and the electrode hole vertical view of structure shown in Figure 1;
Fig. 4 is Fig. 3 A-A ', B-B ', the partial sectional view of C-C ';
Fig. 5 is control electrode and a lead-in wire vertical view thereof in the 2nd substrate in the structure shown in Figure 1;
Another example structure synoptic diagram of Fig. 6 digital microfluidic varifocal lens;
Fig. 7 is groove, the fluid connectivity slot vertical view of going between in the structure shown in Figure 6;
Fig. 8 is hydraulic actuator unit cavity, lens cavity, vent port, sample holes and the electrode pin hole vertical view shown in the structure shown in Figure 6;
Fig. 9 is the partial sectional view of D-D ' shown in Figure 8 and E-E ';
Figure 10 is that structure shown in Figure 6 is at the 2nd suprabasil control electrode and lead-in wire vertical view thereof;
A work flow example schematic of Figure 11 digital microfluidic varifocal lens: (a) form the monocrystalline silicon etch mask layer, (b) etching forms fluid connectivity slot and lead-in wire groove, (c) form the monocrystalline silicon etch mask layer, (d) etching single crystal silicon, form the actuator unit cavity, the lens cavity, vent port, sample holes and electrode hole, (e) form conductive film on the glass substrate as control electrode, (f) picture surface silex glass bonding, (g) potassium hydroxide corrosion monocrystalline silicon is to certain thickness, (h) form the monocrystalline silicon etch mask layer, (i) formation of formation conductive film and etching electrically contacts on silicon chip, (j) etching is removed lens, sample holes, vent port, top, electrode pin hole monocrystalline silicon thin film, (k) single face is located in the microchannel between sealing wire groove and the glass substrate in the electrode pin hole, form band, (l) paste lens blooming and seal sample holes and vent port.
Each digitized representation implication among the figure:
1 first substrate monocrystalline silicon piece; 2 second base glass substrate; 3 (a-h) hydraulic actuator unit cover; 4 lens cavity cover plates; Isolate framework between 5 lens and actuator unit and actuator unit; 6 public electrodes lead-in wire; 7 sample holes cover plates; 8 vent port cover plates; 9 electrically contact; 10 public electrode pins; 11 (a-h) control electrode pin; 12 (a-h) contact conductor; 13 bands; 14 actuator unit array cover plates; 15 (a-h) fluid connectivity slot; 16 (a-h) groove that goes between; 17 sample holes; 18 vent ports; 19 electrode pin holes; 20 (a-h) actuator unit cavity; 21 lens cavitys; 22 (a-h) control electrode; 23 hydraulic actuator cell array cavitys; 24 thermal oxidation silicons.
Embodiment
Below in conjunction with accompanying drawing the present invention is elaborated, with substantive distinguishing features and the obvious improvement of further illustrating digital microfluidic varifocal lens and preparation method thereof, but the present invention absolutely not only is confined to the embodiment that introduces.
Embodiments of the invention 1 relate to a kind of digital microfluidic varifocal lens, describe in conjunction with Fig. 1, Fig. 2-5.Fig. 1 is a digital microfluidic varifocal lens one-piece construction synoptic diagram, and the first substrate monocrystalline silicon 1, the second substrate single crystal glass substrate, 2 inner structures are respectively as Fig. 2, shown in Figure 5; Actuator cover plate 3, lens cover plate 4, sample holes cover plate 7, vent port cover plate 8 belows are cavitys of hollow among Fig. 1; Eight (being not limited to this number) actuator unit cavitys 20 have not co-content, isolate by framework 5 each other; Actuator unit cavity 20 is isolated by framework 5 with lens cavity 21; Framework 5 belows are distributed with fluid connectivity slot 15, guarantee that actuator unit cavity 20 and lens cavity 21 inner fluids are communicated with; Electrically contacting on the first substrate monocrystalline silicon 19 is connected to public electrode pin 10 on second base glass substrate 2 in the lead-in wire mode; Be distributed with the control electrode 22 of different area in the substrate 2, by contact conductor 12 to control electrode pin 11; Contact conductor 12 is identical with control electrode pin 11 materials; Isolate by being distributed in the groove 16 that goes between in the substrate 1 between contact conductor 12 and the substrate 1; 19 place's sections seal by band 13 lead-in wire groove 16 in the electrode pin hole between lead-in wire groove 16 and the substrate 2;
Present embodiment relates to another kind of digital microfluidic varifocal lens, describes in conjunction with Fig. 6, Fig. 8-10.Embodiment 2 is with the difference of embodiment 1: the hydraulic actuator unit is made up of different numbers and cavity 23 with same volume among the embodiment 2, and its structure is as described in the embodiment 1.
Embodiment 3
Embodiment 3 relates to a kind of method for making of digital microfluidic varifocal lens, illustrates the concrete method for making of embodiment 1 and embodiment 2 described digital microfluidic varifocal lens below in conjunction with Fig. 1 and Fig. 2-5 and Fig. 6 and Fig. 7-10, mainly comprises:
(i) high-temperature oxydation: on the first substrate monocrystalline silicon piece 1, form thermal oxidation silicon 24, the photoresist mask lithography, use remove photoresist behind buffered oxide etch agent (BOE) the corrosion oxidation silicon (Figure 11 (a)) again, with the monox is mask layer, deep reaction ion etching (DRIE) monocrystalline silicon forms fluid connectivity slot 15 and lead-in wire groove 16 (Figure 11 (b)), and counter structure figure sees Fig. 2, Fig. 7.
(ii) form thermal oxidation silicon at step (1) the high-temperature oxydation first substrate monocrystalline silicon piece 1, the photoresist mask lithography, again with remove photoresist behind the BOE corrosion oxidation silicon (Figure 11 (c)), with the monox is mask layer, DRIE dry etching monocrystalline silicon, form actuator unit cavity 20, lens cavity 21, vent port 18, sample holes 17 and electrode pin hole 19 (Figure 11 (d)), counter structure figure sees also Fig. 3, Fig. 4, Fig. 8, Fig. 9.
(iii) splash-proofing sputtering metal aluminium (Al) film or tin indium oxide (ITO) conductive film on the 2nd base glass substrate 2, the photoresist mask lithography, the corrosion back forms public electrode pin 10, control electrode pin 11, contact conductor 12 and control electrode 22 (Figure 11 (e)), and counter structure is asked for an interview Fig. 5, Figure 10.
(iv) picture surface silicon-glass anode linkage (Figure 11 (f)), potassium hydroxide (KOH) corrosion monocrystalline silicon piece 1 is to certain thickness (Figure 11 (g)), at the first substrate monocrystalline silicon piece, 1 backside deposition monox, the photoresist mask lithography, BOE corrodes the monox of lens cavity 21, vent port 18, sample holes 17 and 19 tops, electrode pin hole and electrically contacts 9 place's monox, remove photoresist (Figure 11 (h)), counter structure is asked for an interview Fig. 1 or Fig. 6.
(v) at the first substrate monocrystalline silicon piece, 1 back spatter metal A l film or ITO conductive film, the photoresist mask, the corrosion back forms and electrically contacts 9 (Figure 11 (i)), and DRIE is etched to and exposes the 2nd base glass substrate 2 (Figure 11 (j)), and counter structure figure sees also Fig. 1 or Fig. 6.
(vi) scribing, between sealing wire groove and the substrate of glass microchannel in the electrode pin hole 19 place's sections, form band 13, sealing sample holes 17, vent port 18, routing (Figure 11 (k)) after the fluid injection, remove photoresist, dimethyl silicone polymer (PDMS) film of making 4 is attached to lens cavity 21 tops, forms lens cavity cover plate, adopt UV-irradiation or oxygen plasma Activiation method to realize bonding (Figure 11 (l)).
Claims (10)
1. a digital microfluidic varifocal lens is characterized in that described micro-fluidic lens comprise fluid lens, hydraulic actuator unit, public electrode, control electrode, lead-in wire and lead-in wire groove, fluid connectivity slot, sample holes, vent port, wherein:
1. fluid lens and hydraulic actuator unit are the cavitys that is full of fluid between substrate and cover plate, and both cavity inner fluids interconnect;
2. sample holes is communicated with the cavity of lens or hydraulic actuator unit by fluid connectivity slot or lead-in wire groove with vent port;
3. control electrode be positioned at the hydraulic actuator unit under, and identical with the shape of hydraulic actuator unit.
2. by the described digital microfluidic varifocal lens of claim 1, it is characterized in that:
1. the substrate of the cavity of described fluid lens and cover plate are transparent, and cover plate is single thin film or multilayer film;
The cover plate of 2. described hydraulic actuator unit is single thin film or multilayer film, and as public electrode;
3. described control electrode is that several are independently controlled, electrode electrically isolated from one.
3. by the described digital microfluidic varifocal lens of claim 1, it is characterized in that described hydraulic actuator unit is made up of one or more cavitys, a plurality of cavitys each other by lframe cross piece from.
4. by the described digital microfluidic varifocal lens of claim 3, it is characterized in that the cavity volume of described hydraulic actuator unit is identical or inequality.
5. by the described digital microfluidic varifocal lens of claim 3, it is characterized in that the hydraulic actuator unit satisfies scale-of-two and changes applying voltage rear chamber inner fluid output quantity.
6. by claim 1,3,4 or 5 described digital microfluidic varifocal lens, it is characterized in that hydraulic actuator unit cavity arranges arbitrarily around lens.
7. by the described digital microfluidic varifocal lens of claim 1, it is characterized in that:
1. described lead-in wire is to have the straight line at any angle of inclination or the curve of any radian;
2. described lead-in wire groove sidewall has insulation film.
8. the method for preparing digital microfluidic varifocal lens as claimed in claim 1 is characterized in that concrete steps are:
(1) on the first substrate monocrystalline silicon, forms lead-in wire groove and fluid connectivity slot;
(2) monocrystalline silicon formation lens and hydraulic actuator cavity, sample holes, vent port in described first substrate of step (1);
(3) on second base glass substrate, form the conductive film of electrode, lead-in wire and pin figure;
(4) with the first substrate monocrystalline silicon and the second base glass substrate picture surface bonding, thinning back side first substrate is to certain thickness;
(5) form the conductive film that electrically contacts figure at the first base monocrystalline silicon bottom back side, the first substrate monocrystalline silicon directly over etching lens cavity, vent port, sample holes and the electrode pin hole is to exposing control electrode on second base glass substrate fully.The film of making is attached to lens cavity opening part and finishes bonding;
(6) scribing, sealing wire groove seal sample holes, vent port, routing behind the filling liquid.
9. by the preparation method of the described digital microfluidic varifocal lens of claim 8, it is characterized in that filling in described lens or the hydraulic actuator cavity the hydrophilic or hydrophobic fluid of insulation.
10. by the preparation method of claim 8 or 9 described digital microfluidic varifocal lens, it is characterized in that:
1. fill the hydrophilic fluid of insulation, on the first substrate monocrystalline silicon picture surface of step (2) back, cover hydrophilic film or step (6) and irritating liquid previous crops chip hydrophilic treatment;
2. fill the hydrophobic fluid of insulation, electrode that forms on second base glass substrate of step (3) back and lead-in wire cover hydrophobic film or irritate liquid previous crops chip hydrophobic treatments in step (6).
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Cited By (4)
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| CN110132861A (en) * | 2019-05-23 | 2019-08-16 | 中央民族大学 | A kind of multiple-unit multi-parameter nanophotonics sensing characteristics detection system and method |
| CN110226124A (en) * | 2016-12-09 | 2019-09-10 | Lg伊诺特有限公司 | Camera model |
| CN111448514A (en) * | 2017-11-02 | 2020-07-24 | Lg伊诺特有限公司 | Image pickup device module including liquid lens and optical instrument |
| CN113597571A (en) * | 2018-12-28 | 2021-11-02 | 奥普托图尼消费品股份公司 | Optical system comprising a lens with adjustable focal length |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110226124A (en) * | 2016-12-09 | 2019-09-10 | Lg伊诺特有限公司 | Camera model |
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| CN113597571A (en) * | 2018-12-28 | 2021-11-02 | 奥普托图尼消费品股份公司 | Optical system comprising a lens with adjustable focal length |
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| CN110132861B (en) * | 2019-05-23 | 2022-04-08 | 中央民族大学 | Multi-unit multi-parameter nanophotonics sensing characteristic detection system and method |
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