CN101587130B - Crossed and encapsulated type wind speed and direction sensor of minitype wind measuring units - Google Patents

Crossed and encapsulated type wind speed and direction sensor of minitype wind measuring units Download PDF

Info

Publication number
CN101587130B
CN101587130B CN2008101122068A CN200810112206A CN101587130B CN 101587130 B CN101587130 B CN 101587130B CN 2008101122068 A CN2008101122068 A CN 2008101122068A CN 200810112206 A CN200810112206 A CN 200810112206A CN 101587130 B CN101587130 B CN 101587130B
Authority
CN
China
Prior art keywords
wind
sensor
detection unit
sensitive beam
wind detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008101122068A
Other languages
Chinese (zh)
Other versions
CN101587130A (en
Inventor
赵湛
杜利东
庞程
方震
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Electronics of CAS
Original Assignee
Institute of Electronics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Electronics of CAS filed Critical Institute of Electronics of CAS
Priority to CN2008101122068A priority Critical patent/CN101587130B/en
Publication of CN101587130A publication Critical patent/CN101587130A/en
Application granted granted Critical
Publication of CN101587130B publication Critical patent/CN101587130B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The invention relates to a crossed and encapsulated type wind speed and direction sensor of minitype wind measuring units, which comprises independent minitype sheet type wind measuring units; the units are crossed and encapsulated; and each wind measuring unit comprises a supporting body, a sheet, a sensing girder and a strain sensor. The sheet has a wind blowing structure; the sensing girder is used as a measuring structure; wind blows the sheet to cause the bending deformation of the sensing girder; the size of wind force in different directions is measured by measuring the bending degree of the sensing girder; the strain sensor converts a signal of the sensing girder into an electrical signal capable of being measured; the supporting body is used as a supporting structure of the whole sensor; and the wind speed and the wind direction are measured through the crossing and the encapsulation of the independent minitype sheet type wind measuring units. The sensor has the characteristics that the independent minitype sheet type wind measuring units are crossed and encapsulated to measure wind speed and direction information; the encapsulation size is less than 30 mm*15 mm*15 mm; andthe sensor can be widely applied to defense aerospace, meteorological environment, traffic and transportation, industrial manufacture, agricultural production and other fields.

Description

A kind of miniature wind detection unit crossed and encapsulated type wind speed wind transducer
Technical field
The present invention relates to sensing technology, particularly miniature wind detection unit crossed and encapsulated type wind speed wind transducer.
Background technology
Wind speed and direction is important information parameter in the meteorological observation, for national defence aviation, weather environment, communications and transportation, industry manufacturing, agricultural production etc. important effect is arranged.Wind speed and direction information is to an important parameters of the prediction of the such weather of sleet rain or shine, can be environmental monitoring, economic development, the scheduling of production of fishery agricultural, and the flight parameter of revising spacecraft provides foundation.
Conventional wind speed wind direction sensor mainly contains vane weathervane wind detection sensor, pressure type wind detection sensor, ultrasonic type wind detection sensor, microwave type wind detection sensor, differential wind detection sensor, ionic formula wind detection sensor, laser type wind detection sensor etc.Though in these sensors, some has characteristics such as very large measurement range, some precision be very high, all has bulky shortcoming.Along with the development of MEMS technology, make in national defence aviation, weather environment, communications and transportation, industry, press in the agricultural production that to have a volume little, in light weight, the miniature wind direction and wind velocity sensor of the MEMS of the characteristics that cost is low.
At present, domestic and international miniature wind detection sensor mainly contains two kinds of hot type wind detection sensor and Li Shi wind detection sensors, and wherein the maximum of usefulness are the hot type wind detection sensors.
The hot type wind detection sensor is based on thermal source and comes measuring wind and wind direction in the distinguished and admirable principle that flows through the thermal gradient of back generation.Along with change of wind velocity, the aweather middle heat that transmits causes the variation of thermal source thermal gradient also changing, and can access the information of wind by the variation of processing of circuit temperature-measuring thermistor resistance.Such sensor bulk minimum, simple in structure, can be integrated, cost is low, and is most widely used general, and shortcoming is that precision is low, and high wind speed is measured unstable, and power consumption is big.
Power formula wind detection sensor is based on wind and acts on sensitive structure, causes that the principle of the deformation of sensitive structure is come measuring wind and wind direction, obtains wind speed and direction information by the deformation of measuring sensitive structure.Along with change of wind velocity, the power that wind is applied on the sensitive structure changes, and causes the variation of sensitive structure deformation, by the variation of electric circuit inspection sensitive structure deformation, can access the information of wind.Such sensor bulk is little, the structure relative complex, and cost is lower, and shortcoming is that the measurement of wind direction can only realize positive and negative both direction.
Hot type wind detection sensor shortcoming is that precision is low in the at present domestic and international wind speed and direction transducer, and high wind speed is measured unstable, and power consumption is big; Power formula wind detection sensor shortcoming is that the measurement of wind direction can only realize positive and negative both direction.
Summary of the invention
The objective of the invention is in order to solve the existing in prior technology problem, provide a kind of wind speed and direction can simultaneously-measured wind detection unit crossed and encapsulated type wind speed wind transducer.
In order to realize above-mentioned purpose, technical solution of the present invention is:
A kind of miniature wind detection unit crossed and encapsulated type wind speed wind transducer, it comprises most the independently board-like wind detection units of miniature thin, most wind detection units are that axis intersects encapsulation up and down with Y-Y ';
Each independently the board-like wind detection unit of miniature thin comprise: supporter, thin plate, sensitive beam, strain transducer, wherein,
Outer rim is the supporter of sensor; The supporter inner side edge puts in parallel in frame or perpendicular at least one strip sensitive beam of axle Y-Y ', the sensitive beam other end is connected with thin plate, and thin plate and supporter are suitable;
Strain transducer is installed with on sensitive beam, is positioned at a side surface of sensitive beam, and extension line is placed on the supporter.
Described sensor, it is described to be that axis intersects encapsulation up and down with Y-Y ', be that adjacent independent wind detection unit goes up up and down or down with Y-Y ' with supporter be that the axis intersection is affixed.
Described sensor, number M and each independent wind detection unit angle theta each other of independent wind detection unit are determined according to concrete request for utilization in its described intersection encapsulation.
Described sensor, its described thin plate be shaped as square or rectangular or round.
Described sensor, the number N of its described a plurality of strip sensitive beam is determined according to concrete request for utilization.
Described sensor, it is described parallel or be central shaft perpendicular at least one strip sensitive beam of axle Y-Y ' with Y-Y ' axle, in central shaft both sides symmetric offset spread.
Described sensor, being shaped as of its described strain transducer is snakelike, and size is suitable with the shape of sensitive beam.
Described sensor, the electric connecting mode of its described strain transducer can be single resistance, electric bridge, electric capacity.
Advantage of the present invention: wind speed and direction can be measured simultaneously; Utilize microelectromechanical systems (MEMS) technology that element manufacturing is got very little (can less than 30 millimeters * 15 millimeters * 15 millimeters); Adopt the MEMS technology, reduce device cost, reduce the power consumption of device.
Description of drawings
Fig. 1 illustrates the board-like wind detection unit crossed and encapsulated type wind speed of miniature thin of the present invention wind transducer intersection encapsulation synoptic diagram;
Fig. 2 illustrates the single wind detection unit synoptic diagram of the board-like wind detection unit crossed and encapsulated type wind speed of miniature thin of the present invention wind transducer;
Fig. 3 illustrates the single wind detection unit vertical view of the board-like wind detection unit crossed and encapsulated type wind speed of miniature thin of the present invention wind transducer;
Fig. 4 illustrates the single wind detection unit sectional view of the board-like wind detection unit crossed and encapsulated type wind speed of miniature thin of the present invention wind transducer.
Embodiment
Technical scheme of the present invention: the bending that miniature thin plate can cause the sensitive beam structure is crossed in wind, strain transducer on the sensitive beam changes this crooked deformation into a certain electricity parameter, and (for example: variation voltage difference), the wind detection unit intersection encapsulates the information that can obtain wind speed and direction simultaneously by inciting somebody to action independently.Concrete principle is as follows:
The power F that wind acts on thin plate is the function F (y) of thin plate length, and the suffered moment T of sensitive beam is shown below.
T = ∫ 0 h F ( y ) dy
The strain stress that draws sensitive beam according to moment is shown below.
ϵ = Tt 2 EI
Wherein t is the thickness of sensitive beam, and E is outstanding sensitive beam Young's modulus of elasticity, and I is the moment of inertia of sensitive beam.
The deformation bending of sensitive beam causes that the changes delta of the electrical quantities of strain transducer equals G ε, and G is the coefficient of strain of strain transducer.
Figure S2008101122068D00053
The power F that wind acts on thin plate is shown below.
F ( y ) = C D 1 2 ρ u y 2 w dy
So the changes delta expression formula of the electrical quantities of strain transducer is:
Δ = G C D ρwt ∫ 0 h u y 2 dy 4 EI
The board-like wind detection unit crossed and encapsulated type wind speed of this miniature thin wind transducer of indication of the present invention, characteristics are that wind speed and direction can be measured simultaneously, device volume is less than 30 millimeters * 15 millimeters * 15 millimeters, characteristic such as can produce in batches.Sensor of the present invention can be widely used in fields such as national defence aviation, weather environment, communications and transportation, industry manufacturing, agricultural production.
Below in conjunction with accompanying drawing the present invention is described in detail, be to be noted that described embodiment only is intended to be convenient to the understanding of the present invention, and it is not played any qualification effect.
As the board-like wind detection unit crossed and encapsulated type wind speed of Fig. 1 miniature thin of the present invention wind transducer intersection encapsulation synoptic diagram, Fig. 2 is the single wind detection unit synoptic diagram of the board-like wind detection unit crossed and encapsulated type wind speed of miniature thin of the present invention wind transducer, Fig. 3 is the single wind detection unit vertical view of the board-like wind detection unit crossed and encapsulated type wind speed of miniature thin of the present invention wind transducer, and Fig. 4 is the single wind detection unit sectional view of the board-like wind detection unit crossed and encapsulated type wind speed of miniature thin of the present invention wind transducer.
Its structure comprises two independently intersection encapsulation 1 of the board-like wind detection unit of miniature thin; Each independently the board-like wind detection unit of miniature thin comprise: supporter 2, wind-engaging thin plate 3, sensitive beam 4, strain transducer 5.
Described intersection encapsulation 1 be two independently the board-like wind detection unit of miniature thin be that axis intersects encapsulation up and down with Y-Y '.
Described thin plate 3 be shaped as rectangle.
Described sensitive beam 4 quantity N=2.
Described sensitive beam 4 is positioned at thin plate 3 one sides and being the center line symmetry with Y-Y ' axle.
Described strain transducer (5) electric connecting mode is single resistance.
The principle of work of the board-like wind speed wind direction sensor of this miniature thin of the present invention is:
Tested wind is behind sensor, thin plate 3 is subjected to the effect of the power of wind, thin plate 3 causes the bending of sensitive beam 4, strain transducer 5 on the sensitive beam 4 converts the crooked deformation quantity of the sensitive beam that wind causes 4 of different directions the variable quantity of certain electrical signal of corresponding strain transducer 5 to, thereby can while measuring wind and wind direction.
The above; only be specific embodiments of the invention; but protection scope of the present invention is not limited thereto; anyly be familiar with the people of this technology in the disclosed technical scope of the present invention; can understand conversion or the replacement expected; all should be encompassed within protection scope of the present invention, therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.

Claims (6)

1. miniature wind detection unit crossed and encapsulated type wind speed wind transducer is characterized in that: comprise most the independently board-like wind detection units of miniature thin, most wind detection units are that axis intersects encapsulation (1) up and down with Y-Y ';
Each independently the board-like wind detection unit of miniature thin comprise: supporter (2), thin plate (3), sensitive beam (4), strain transducer (5), wherein,
Outer rim is the supporter (2) of sensor; Supporter (2) inner side edge puts in parallel in frame or perpendicular at least one strip sensitive beam (4) of axle Y-Y ', sensitive beam (4) other end is connected with thin plate (3), and thin plate (3) is suitable with supporter (2);
Strain transducer (5) is installed with on sensitive beam (4), is positioned at a side surface of sensitive beam (4), and extension line is placed on the supporter (2);
Described is that axis intersects encapsulation (1) up and down with Y-Y ', be that adjacent independent wind detection unit goes up up and down or down with Y-Y ' with supporter (2) be that the axis intersection is affixed.
2. sensor according to claim 1 is characterized in that: number M and each independent wind detection unit angle theta each other of independent wind detection unit in the described intersection encapsulation (1), determine according to concrete request for utilization.
3. sensor according to claim 1 is characterized in that: described thin plate (3) be shaped as square or rectangular or round.
4. sensor according to claim 1 is characterized in that: described parallel or be central shaft with Y-Y ' axle perpendicular at least one strip sensitive beam (4) of axle Y-Y ', and in central shaft both sides symmetric offset spread.
5. sensor according to claim 1 is characterized in that: being shaped as of described strain transducer (5) is snakelike, and size is suitable with the shape of sensitive beam (4).
6. sensor according to claim 1 is characterized in that: the electric connecting mode of described strain transducer (5) is single resistance, electric bridge or electric capacity.
CN2008101122068A 2008-05-21 2008-05-21 Crossed and encapsulated type wind speed and direction sensor of minitype wind measuring units Expired - Fee Related CN101587130B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2008101122068A CN101587130B (en) 2008-05-21 2008-05-21 Crossed and encapsulated type wind speed and direction sensor of minitype wind measuring units

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2008101122068A CN101587130B (en) 2008-05-21 2008-05-21 Crossed and encapsulated type wind speed and direction sensor of minitype wind measuring units

Publications (2)

Publication Number Publication Date
CN101587130A CN101587130A (en) 2009-11-25
CN101587130B true CN101587130B (en) 2011-01-26

Family

ID=41371461

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008101122068A Expired - Fee Related CN101587130B (en) 2008-05-21 2008-05-21 Crossed and encapsulated type wind speed and direction sensor of minitype wind measuring units

Country Status (1)

Country Link
CN (1) CN101587130B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102967724A (en) * 2012-12-12 2013-03-13 中南大学 Method for measuring wind speed and wind direction
CN105628966B (en) * 2015-12-17 2016-10-26 国网山东省电力公司蓬莱市供电公司 Transmission line of electricity wind speed and direction detecting system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5117687A (en) * 1990-01-11 1992-06-02 Gerardi Joseph J Omnidirectional aerodynamic sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5117687A (en) * 1990-01-11 1992-06-02 Gerardi Joseph J Omnidirectional aerodynamic sensor

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Petros Argyrakis等.Fabrication and characterization of a wind sensor for integration with a neuron circuit.《Microelectronic Engineering》.2007,(第84期),1749-1753. *
Zhifang Fan等.Design and fabrication of artificial lateral line flow sensors.《JOURNAL OF MICROMECHANICS AND MICROENGINEERING》.2002,(第12期),655-661. *
杜利东等.MEMS 固态风速风向传感器的设计与制作.《微纳电子技术》.2007,(第7/8期),245-248. *

Also Published As

Publication number Publication date
CN101587130A (en) 2009-11-25

Similar Documents

Publication Publication Date Title
CN101655569B (en) Micro-mechanical capacitance type anemometer
CN101769936B (en) Minisize wind speed sensor integrating traction theory with hot wire theory
CN101509816B (en) Force sensor and air measurement method thereof
CN103543287B (en) A kind of spherical wind speed wind direction sensor structure
CN101294977B (en) Silicon piezoresistance type wind velocity and wind direction sensor based on micro-electromechanical technology
CN101271164B (en) Guiding type wind direction and wind velocity sensor
CN103076464B (en) Wind-speed and wind-direction sensor
CN201697932U (en) Capacitance type anemoclinograph of wind turbine generator set
CN102288162A (en) Tilt angle sensor based on optical fiber Bragg gratings and method for measuring tilt angle of tilt angle sensor
CN1851472A (en) Pressure-resistance athermal flow speed-direction sensor based micro mechanical technology
CN102749157A (en) Flexible multi-parameter sensor and manufacture method thereof
CN103529239A (en) Suspended three-dimensional wind speed and direction sensor structure
CN103063867A (en) Capacitance type wind speed and wind direction transducer
CN103076463B (en) Wind cup type fiber Bragg grating wind speed and direction sensor
WO2018097236A1 (en) Wind measurement device
CN107765030A (en) A kind of array of piezoelectric fibres sensor and its measuring method for perceiving change in flow
CN109239392B (en) Three-dimensional wind speed and direction sensor based on MEMS technology and manufacturing method thereof
CN110501098A (en) A kind of highly sensitive micro-pressure sensor based on double pressure membranes and weak coupling resonator system
CN101587130B (en) Crossed and encapsulated type wind speed and direction sensor of minitype wind measuring units
CN110174527A (en) A kind of hot type fiber grating wind speed wind direction sensor and detection method
CN113884701B (en) Wind speed and direction sensor capable of improving measuring range and full-range accuracy
CN101769935A (en) One-dimensional nanometer material based hot-wire flow velocity transducer and testing system
CN101614752B (en) Micro capacitive type wind velocity sensor
CN108593956A (en) Micro- current meter of double mode and preparation method thereof
CN101782410A (en) Thermal flow meter of micro electro mechanical system

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110126

Termination date: 20180521

CF01 Termination of patent right due to non-payment of annual fee