CN100478734C - Electrowetting cell and method of manufacturing an electrowetting cell - Google Patents

Abstract

The electrowetting cell (15) comprises an outer wall (90) and an inner wall (80), said outer wall (90) being provided with extensions (85,86) extending on opposing sides of the inner wall (80). The cell (15) is further provided with a membrane (45) for volume expansion and is sealed through an electroplated layer (95).

Description

The method of wet unit of electricity and the wet unit of manufacturing electricity

Technical field

The present invention relates to the wet unit of electricity, it comprises the body part that is equipped with substrate and at least one sidewall, and this substrate and sidewall lump together the cavity of having stipulated to comprise the wet fluid of electricity, and also comprise at least one end portion that is fixed on body part.

The invention still further relates to the method for making the wet unit of electricity that comprises the body part that is equipped with substrate and sidewall, this substrate and sidewall lump together the cavity of having stipulated to comprise the wet fluid of first and second electricity.

Background technology

The wet unit of electricity is the unit that reflected by the meniscus between two kinds of fluids that can not mix mutually of light therein.A kind of fluid in two kinds of fluids be electrical isolation and one other fluid conduct electricity.The shape of meniscus is variable under the influence of the voltage between two electrodes, and one of them electrode is connected to the surface that conductive fluid and another electrode are connected to body.Such unit is known, and it for example can be employed makes lens or display.Under the situation of applying unit, exist the light path that passes body part.

The wet unit of such electricity is for example known from WO-A 03/069380.This patented claim discloses a kind of lens, and wherein at least one inside surface of side wall is covered by the hydrophobic nature fluid contact layer.When not applying voltage, fluid contact layer is different from the wettability of fluid contact layer with respect to conductive fluid with respect to the wettability of electrical insulation fluids.Wettability changes under the influence of the voltage that applies.This causes the change of the contact angle of meniscus on the osculatory between fluid contact layer and the fluid, and the shape of meniscus is conditioned thus.Therefore, the shape of meniscus depends on the voltage that is applied.

Because the wet unit of electricity has optical characteristics and comprises fluid, for the complete filling that reaches the unit and the suitable operation that do not have escape of liquid to take to the outside, unit behind closed cell are first important.Disclosed in the prior art unit does not provide about how reaching the such complete filling and the solution of prevention escape of liquid.

Summary of the invention

So first purpose of the present invention provides the wet unit of the sort of electricity of mentioning in opening paragraph, it can fully be filled and can prevent escape of liquid after the unit closure.

Second purpose of the present invention provides the sort of method of mentioning in opening paragraph, it can reach fully in industrial feasible mode fills.

First purpose reaches like this, wherein at least one sidewall of body part comprises inner and outer wall, the part of this end portion is the part of inwall, thereby fixed end portion and body part, and this outer wall configurations there is the expansion that extends on first of inwall and on first opposite second.

Second purpose is to reach in a kind of unit with inner and outer wall, and described outer wall has first and second expansions that extend on two of inwall relative faces, and this method may further comprise the steps;

-outer wall and substrate are provided, form cavity;

-with the wet fluid-filled chambers of first and second electricity;

-end portion of cavity is provided so that it is immersed at least one fluid at a required separation distance place from substrate, by part substrate and end portion and randomly an interface form inwall; And

-end portion is fixed to body part, so that first expansion of outer wall is positioned at the top of this end portion.

Solution of the present invention is a kind of double-walled cell.Outer wall provides stability and enough sealings, and inwall is made of the element of one after the other being assembled.Because in succession assembling and double-walled, the wet fluid of electricity can provide before this end portion.As a result, end portion can be immersed in the fluid, and this fluid has least density in practice.Segment fluid flow will flow to end portion above, in any case but remain in the outer wall.This submergence causes needed complete filling.So reached sealing completely, because outer wall is present in the opposite of inwall.Like this, the outer wall of encapsulation includes only two kinds of main materials, and they are together fastened to each other in good mode.Suitable combination is metal and glass.

Substrate can be the part of outer wall, but divided portion preferably, its part is the part of inwall.Between the part of substrate and end portion, can there be liner.This is suitable but not necessarily.The advantage of such liner is that it can provide with any required surface coating, all fluid contact layer as mentioned above.Advantageously, liner provides the slit in its bottom side.This allows to reduce the height of unit.

It is contemplated that several embodiment for first expansion that provides of top of part endways.For example it can be the expansion of the flexibility of outer wall.It alternatively can be by deposition technique, may be the metal level that is provided with by means of the deposition technique of instrumental purpose pressure.

In a preferred embodiment, first expansion is a cramping body, and it is assembled into the top of end portion as parts that separate, and it is by simultaneously or be connected to outer wall in succession.This provides effective assemble method.Connection reliably can realize with these two kinds of measures machinery and chemistry, such as lockout feature, additional clamping, adhesive linkage and sealant.Advantageously, can use on described surface, grow one associating and protective seam.Grown layer chemically is combined in the surface.It has identical thermal expansivity, and it is insensitive for the non-resilient and irreversible expansion under Temperature Influence.Grown layer can grow into desired thickness makes slit and height difference obtain smoothly thus.And such grown layer is suitable inertia, if particularly there is oxide to have (it can be a natural oxide).At last, grown layer is insensitive for the impact by the wet fluid of any electricity, and does not cause the perforate or the porous structure of molecular diffusion.By such sealing, particularly together with the end portion of the substrate and the glass of glass, the unit that finally obtains is closely airtight.

Particularly suitable technology is to electroplate.This technology has advantage: it can be by immersing coating bath to whole unit and applying on the monoblock rank.And the immersion of such whole unit has advantage: grown layer is extending on the whole outer wall and on arbitrary the expansion of inwall.The clamping characteristic of outer wall is reinforced thus.

In another embodiment, be limited on the substrate and end portion of relative two faces of cavity with first and second electrodes of the wet fluid contact of at least one electricity.In the wet unit of electricity, need at least two electrodes, so that apply the shape that needed voltage is set meniscus.Such electrode can be applied on the inwall in the relative both sides of meniscus.Yet in the present embodiment, electrode is present in end portion and on substrate.In fact this allow to use Metal Packaging, and the connection of insulation needn't be arranged an electrode.

Preferably, substrate provides aperture, has described electrode at its end.Electrode both can appear on the surface of the substrate of meniscus and also can deviate from the opposite surfaces of meniscus.The latter's remodeling is preferred, because it does not here need with metal filled described aperture: fluid can be filled aperture.And the manufacturing of kind electrode can be fixed on providing of on-chip metal strap to outer wall and lump together with being used in, thereby sufficient sealing is provided.

Preferably, encapsulation provides a volume swelling part.Such swelling part is for example known from JP-A 2002/162506.This known encapsulation comprises specific chamber, and it appears at the substrate next door, and opens with soft lid and unit separation.When pressure increases in the unit, flexible cover can be out of shape or even stretch out extend to described chamber so that form curved surface.The invention provides such chamber is placed on possibility between inwall and the outer wall.

A preferred embodiment of volumetric expansion parts is the diaphragms as the softness of the part of end portion.Like this, the part that end portion is bigger (that is the part that occurs on the path of light) is moved.Therefore, can compensate very big volume increases.Soft diaphragm is annular in particular.Therefore end portion is divided into outward flange, diaphragm and interior section.It is flat that the normal place of end portion here needs not be.As what illustrate with reference to the accompanying drawings, especially, outward flange is pushed downwards under the pressure of cramping body.This causes the encapsulation of pressurizeing more.Though be not preferred, the outer edge part of not getting rid of end portion comprises the other material different with interior section.

Diaphragm preferably is made of metal.Such material can tolerate fluid effectively.It has additional benefit, and promptly diaphragm can be used as an electrode of unit.If being connected by electroplating or the like between cramping body and outer wall provides, then diaphragm also will be provided with metal level.The suitable thickness that on the one hand has enough degree of stability and have the membrane layer of enough compliance on the other hand is about the 5-30 micron, and more preferably between 15 and 25 microns.This also depends on the material of diaphragm.For the thickness of limiting diaphragm, it can be provided with insulating coating.

Substrate and end portion be glass plate preferably.Glass is inertia for the wet fluid of electricity.It can be used such as the such technology of powderject (blasting) and handle, and metal level can be attached on it.If desired, one or two glass plate can be provided with and apply and superficial layer, comprises that IR applies, UV-absorbs coating, antireflection applies, and also has lens.Such lens can be made by superficial layer with reproduction technology.Alignment feature can be included in such duplicating in the superficial layer of making.This provides unit and other correct aim at of lens on bottom and top surface.

If unit of the present invention is used as lens, then it and other lens are suitably assembled to obtain required path.The parts that not get rid of two electric wet lens are assemblies; In fact, this provides zoom feature.Yet alternative embodiment is an electric wet lens of piling up.Thisly pile up electric wet lens and can suitably make by method of the present invention.

In first embodiment that stackable unit is made, substrate appears at the middle part of stackable unit structure.Carry out first assembling and filling in a side of substrate then, and after finishing first assembling and filling, on relative second, carry out second and assemble and fill.Preferably, two opposing ends parts all have soft diaphragm with the compensation volumetric expansion.In this structure with expansion, provide outer wall to be supported on the substrate in the middle of the stackable unit.

In second embodiment that stackable unit is made, two unit are provided in outer wall one by one.The end portion of first module can be the substrate of Unit second, but this not necessarily.The most simply, provide liner to replace cramping body.Can be connected to well by plating on the liner of outer wall at this, another substrate of Unit second and other element are provided in succession.Such structure also allows to make electrode be arranged in substrate and each end portion does not need mutual coupling.

Replace piling up the wet unit of several electricity, outer wall can be used to the wet unit of an electricity and other optics and or the piling up of non-optical element.Except the lens and color filter that separate, it is contemplated that an imageing sensor also assembles like this, utilize any liner etc. to make itself and electric wet lens separate required separation distance.Can realize most effectively with this integrated of imageing sensor, wherein connection gasket be set at optics workplace opposite surfaces on.Alternatively, imageing sensor can be assembled into a top of getting involved substrate, and it is provided with through hole so that touch the face opposite with the optics workplace.The use that gets involved substrate is known in the technical of semiconductor packages originally.

The advantage of method of the present invention is that it can be realized on wafer level or monoblock rank.Outer wall can be the part such as the flat board of the printed circuit board (PCB) with aperture.It only just is divided into each independent encapsulation after filling and encapsulation step.Yet even individually carry out the manufacturing of unit, plating step can be carried out in coating bath to allow to electroplate simultaneously multiple arrangement.

The invention still further relates to the sort of manufacture method and the unit in opening paragraph, mentioned, tight sealing wherein is provided.This is such reaching, and promptly end portion is fixed on the body part with metal level, and this metal level is applied to the surface of end portion and bonding part simultaneously.As mentioned above, be applied with metal level and will cause airtight sealing.If metal level or its part are the two sides that the structure of metal level extends to the unit, just can realize clamping.Preferred applying method is to electroplate, but does not get rid of other method, such as the combination of sol-gel deposition of metal, sputter or chemical vapor deposition or such deposition process.Metal level is by suitably attached on the surface of end portion and on the lip-deep metal parts of body part.

This unit can be used as the lens that use in camera, optical recording apparatus or any other optical device.This unit can be assembled with other lens, so that obtain optical path on demand, or even obtains zoom lens.Alternatively, this unit is used as display, and in this case, it is optically transparent only needing wafer or end portion.The unit also can be used as sensor.

Description of drawings

To further set forth these and other aspect of unit of the present invention and method with reference to accompanying drawing, wherein:

Fig. 1 shows unit of the present invention with schematic sectional view, wherein only shows left part;

Fig. 2-7 is presented at schematic sectional view at different levels in succession in the manufacturing of the end portion of using in the unit;

Fig. 8-16 is presented at schematic sectional view at different levels in succession in the manufacture method of unit, in the left part of figure on display unit.

Figure 17 shows the schematic sectional view of second embodiment of unit of the present invention.

Embodiment

Accompanying drawing is illustrated, does not draw in proportion.Identical label is meant similar parts on different figure.

Fig. 1 shows the embodiment according to the wet unit 15 of electricity of the present invention.On this Fig. 1, only show partial section, that is, only be the left part of unit 15.Yet unit 15 is symmetrical structures, and like this, the right part of Xian Shiing not is the mirror image of left part.Lens comprise fluid chamber, have first fluid 51 and second fluid, 52, the first and second fluids and be can not mix mutually and contact with each other by meniscus 14.First fluid 51 is silicone oil, alkane or the other electrical insulation fluids that is suitable in this example.Second fluid 52 is water or other the suitable conductive fluids that comprises salt solusion in this example.Each mask of chamber has electric insulation layer 8 and fluid contact layer 10, for example parylene.

According to this embodiment, body part 17 comprises inwall 80 and outer wall 90, and--on second 112 of unit 15--second cover plate 6.Inwall 80 comprises electric insulation part 8, is applying fluid contact layer 10 above.Inwall 80 also comprises the part of end portion 4.This end portion (or first cover plate) 4 comprises ring glass parts 81, and it is connected to inside part via extendible fitting piece 45.In a preferred embodiment, the inside part of these ring glass parts 81 and end portion 4 is made with single glass plate, explains with reference to Fig. 2 to 7.Inwall 80 also comprises the end 61 of second cover plate 6.This second cover plate 6 provides through hole 62, electrode 2 and metal layer 63.In alternative embodiment, plate 6 can substitute with first 111 the structure that is similar to and be equal to unit 15, that is, and and ring glass parts, extendible fitting piece and cover plate.

Three parts of this of inwall 80--ring glass parts 81, (also being annular) insulating element 8 and terminal 61--are clamped between the projection 85 and annular closing feature 86 of outer wall 90.Annular closing feature 86 here is a sheet metal, but it can be any object with conductive surface.Outer wall 90 comprises the inner core 92 of plastics or other material, and it has metalized surface 91.This metalized surface 91 is also surrounded the metal layer 63 of second cover plate 6.Like this, provide mechanically stable connection.

Inwall 80 and outer wall 90 are fastened to each other and be fixed on fitting piece 45 and end portion 4, so that sealant 95 surrounds it.Sealant 95 is made by suitable material.Can use itself as the polymer-coated of the known rubber of protection coat, epoxy resin etc.Yet preferably, sealant 95 comprises metal.This allows the encapsulation that provides airtight, makes air, water or fluid be difficult for diffusion.The particularly preferred method that this metallic seal layer 95 is provided is to electroplate.This method can for example realize on three-dimensional surface in coating bath.

Fig. 2 to 7 is presented in the manufacture method of substrate 200 step in succession with schematic sectional view, this substrate has the integrated diaphragm 210 that is used as expandable fitting piece 46.Fig. 2 display substrate 200 has first surface 201 and opposing second surface 202.Substrate 200 is the glass plate with suitable thickness (for example about 0.1mm) in this example.

Fig. 3 is presented at the substrate 200 that is applied with on two surfaces 201,202 behind the photo anti-corrosion agent material 205.Photo anti-corrosion agent material itself is known technically.

Fig. 4 shows photo anti-corrosion agent material 205 pattern-makings and the substrate 200 after developing.Pattern-making causes aperture 214 on first 201.Pattern-making causes on second 202: also make the surface 215 of photo anti-corrosion agent material 205 have three-dimensional structure.This surface 215 is the form of wave in this example.This surface structure can provide by the mode of forging and pressing or another kind mechanically deform.Alternatively, can use advanced photoetching technique.In another embodiment, use mould pressing technology that the photoresist layer 205 with shape of wanting is provided.Just as will be seen, do not need specific photo anti-corrosion agent material in this case.

Fig. 5 is presented at the substrate 200 that is applied with behind the membrane layer 225.Membrane layer for example comprises having certain flexible metal, but any other material also is suitable for, as long as it and photoresist layer 205 are compatible.Many metals are originally to have enough flexibilities, if use with thin layer form.Example comprises gold, copper, nickel, aluminium and their suitable alloy.Metal level can be with suitable deposition technique (such as sputter, chemical vapor deposition and wet-chemical technique) on being applied in.In this example, membrane layer 225 is shown as makes pattern, but this is not necessarily.

Fig. 6 is presented on first 201 by figuratum photo anti-corrosion agent material 205 and is made into substrate 200 behind the pattern.Under the situation of glass plate 200, can advantageously use the powder spraying technique, yet, do not get rid of such as etched any other technology.

Fig. 7 is presented at the substrate 200 behind the removal photo anti-corrosion agent material 205 and obtains having the substrate 200 of integrated diaphragm 220.Just as will be seen, substrate 200 can extend in the horizontal.Diaphragm 220 can have suitable shape.It particularly preferably is annular.Substrate can comprise a plurality of diaphragms, and is suitable for carrying out wafer-level process in another step, or is separated out.Such division step can apply before photo anti-corrosion agent material 205 is removed.Though not shown here, do not get rid of substrate and be included in other layer on its first or second 201,202.If semiconductor chip is used as substrate 200, then can stipulate semiconductor element thereon, such as diode and transistor or trench capacitor.

Fig. 8 to 16 shows the schematic sectional view of the manufacture method of the wet unit 15 of electricity.The manufacturing of the embodiment of displayed map 1 on the figure, but modification and alternative are possible within the scope of the invention.

First step when Fig. 8 shows assembling.Here, glass substrate 6 provides with annular element 90 forms.Annular element 90 is used as outer wall, and provides conductive surface.Though allow, not necessarily must conduct electricity by all surfaces.Parts 90 provide expansion 85.It is present on first 112 of substrate 6, and contacts with the adhesive linkage 63 of substrate 6.Adhesive linkage 63 here is such as the such metal of copper.Electrode 2 exists on same first 112 of substrate 6.The aperture 62 of these electrode 2 covering substrates 6.Aperture 62 can be filled with conductive material, but is not this situation in this example.For example opposite with outer wall 90, aperture 62 be not the annular and only be provided partly.Can use other material and without glass.In the unit is not under the situation of lens, and it is optically transparent that substrate needs not be.In order to keep substrate 6 and outer wall to be fixed together, can use for example adhesive linkage.

The later result of second step when Fig. 9 is presented at assembling.Here, substrate 6 links to each other with metal level 91 mutually with outer wall 90.This metal level 91 is suitably provided by electroplating in coating bath.Metal level 91 extends along outer wall 90, and the adhesive linkage 63 that is connected to substrate.Connect and singly be not present in first 112 of substrate, and be present in side 115.Here shown but on other figure, not do not show be: electrode 2 also provides electrodeposited coating.The position of electrode 2 is selected as making and does not form bridge between electrode and outer wall.Can provide insulating coating at electrode 2, to avoid its thickening.

Figure 10 is presented at the result after conductive fluid 52 is applied to outer wall 90 and substrate 6 second 113.In this example, fluid 52 is aqueous solution of salt.Also can use alcohol or the like as other solvent.Fluid extends to aperture 62, causes thus with electrode 2 to contact.Electrode 2 is used as the shell of unit simultaneously.

The result who provides behind the electrical insulation fluids 51 is provided Figure 11.This is for example alkane or a silicone oil of a kind of oil.It seems that from its lower density it is provided behind conductive fluid 51.The shape of shown meniscus and to second 113 of substrate 6 adhere to be schematically purely, not necessarily corresponding to any physical effect.

Figure 12 is presented at the result behind the insertion liner 8.In this case, this is an annular electro insulating element 8, and it has the fluid contact layer 10 of parylene.Liner 8 have the surface 9, it can have modified surface structure or the layer to be used for suitably bonding to the electrodeposited coating 91 of outer wall 90.This surface structure or layer can be any chemical types, but also can be mechanical, such as lockout feature.In addition, liner 8 provides slit 64.This slit 64 has first advantage: electrode 2 can provide below this liner 8.Therefore, electrode 2 is positioned at the outside of light path, and this reduces the diameter of unit.Second advantage in slit is the modification of the angle of the meniscus between conductive fluid 52 and electrical insulation fluids 51.As a result, the minimum thickness of unit is reduced.The outward flange 61 of liner and substrate lumps together a part that forms inwall.

Figure 13 is presented at the later unit of the 6th manufacturing step 15.This step involves the assembling of end portion 4.End portion 4 comprises interior section, diaphragm 45 and exterior section 81.First of part 4 111 provides compression tools 70 endways.Preferably, before actual assembled, end portion 4 provides the layer of electrical insulation fluids on its second 114.This guarantees not form bubble at assembly process.End portion 4 is immersed in the fluid 51 at assembly process.As a result, unnecessary fluid layer 55 endways first of part go up and form.Electric insulation layer 51 can be from second 114 first 111 of flowing to end portion 4, because externally leave narrow passage between part 81 and the outer wall 90.

The exterior section 81 that Figure 14 is presented at end portion 4 is fixed on the unit 15 behind the body part.In fact this body part comprises liner 8 and outer wall 90.This realizes by inserting cramping body 86.This cramping body is exterior section 81 downward clampings and/or be placed into liner 8.As a result, diaphragm 45 is placed on the position of slight curvature.Cramping body has the plate surface layer 91 contacted surface with outer wall 90.Preferably, it provides one or more lockout features.If needed, it can be designed to extend to the externally passage 89 between the part 81 and outer wall 90.In this operation, inwall 80 is formed, and it is made up of the exterior section 81 and the cramping body 86 of the exterior section 61 of adhesive linkage 63, substrate 6, liner 8, end portion 4.

Unit 15 after the redundance 55 that Figure 15 is presented at instrument 70 and electrical insulation fluids 51 is removed.Remove the step back and carry out cleaning, cramping body 86 enough clean like this with surface diaphragm 45, can be used for later step.

Figure 16 shows the unit 15 after the last in the mill important step.In this step, being connected by supply sealant 95 between cramping body 86 and outer wall 90 is reinforced.Sealant 95 preferably provides by electroplating in suitable coating bath.Alternatively, it can be known technically any other protective seam itself, such as the layer based on epoxy resin.Sealant 95 extends to diaphragm 45 in this example, but this is not important.Preferably, sealant 95 is provided with suitable thickness, so that fill any turning and the smooth exterior surface face is provided.Sealant 95 is in this example from first 111 first 112 of extending to substrate of end portion.This is favourable: also have the clamping characteristic because of it, and the extension 85,86 of outer wall 90 with it lumped together.

Figure 17 shows the schematic sectional view of second embodiment of unit of the present invention.There is not to show the sealant through electroplating of the extension 85 be used to cover outer wall 80 in the present embodiment.In the present embodiment, the core 92 of outer wall is a metal dish.It comprises projection 85 inherently.Second cover plate 6, body part 8 and first cover plate 4 with through hole 62 are assembled in the mode that reference Fig. 8 to 16 describes here.Body part 8 is worked as an electrode usually, and it for example is connected to the dish 92 that is used as the contact.

First cover plate 4 here is a continuous plate, and it is selected to enough thin, so that flexible under stress, in this example, uses glass plate.Between the body part 8 and first cover plate 4, cavity 41 is arranged.(especially when temperature rises) first cover plate 4 is with bending, so that increase the volume of unit under the situation of at least one expansion of fluid 51,52.Under at least one contraction of fluid 51,52, first cover plate is with bending, so that dwindle the volume of unit.Because electrical insulation fluids 51 is oil preferably, it has bigger thermal expansivity compared with second fluid 52 of aqueous solution, therefore flexible first cover plate 4 is present on the face of electrical insulation fluids 51.

Though not shown here, use the sealant of electroplating will obtain very good result.The sealant of not getting rid of this plating can be applied to other structure of the unit that comprises fluid, and not every application all needs to have the unit of inwall 80 and outer wall 90 and expansion 85,86.Can also see that the expansion 85,86 of the outer wall 80 that extends is not an element separately on first and second 111,112, but the connector projection of parts or growth or deposition.Particularly, can be the same effective through the connector of electroplating with such expansion 86.

Claims (15)

1. the wet unit of an electricity, comprise the body part that is equipped with substrate and at least one sidewall, this substrate and sidewall lump together the cavity of having stipulated to comprise the wet fluid of electricity, and also comprise at least one end portion that is fixed on body part, wherein at least one sidewall of body part comprises inner and outer wall, the part of this end portion is the part of inwall, thereby end portion and body part have been fixed, and this outer wall configurations has the expansion that extends on second on first of inwall with on first opposite, wherein providing metal level on the outer wall and on two expansions on the inwall either side, wherein metal level extends at least one end portion from substrate, and wherein said substrate and described at least one end portion are made by glass.

2. as the wet unit of electricity of requirement in claim 1, wherein inwall comprises the part of substrate.

3. the wet unit of the electricity that requires as in claim 2, wherein inwall also is included in the liner of the electrically insulating material between the described part of the described part of substrate and end portion.

4. as the wet unit of electricity of requirement in claim 1, wherein the expansion of the outer wall that extends on first of inwall is the cramping body that is fixed on the outer wall.

5. as the wet unit of electricity of requirement in claim 4, wherein cramping body is fixed on the outer wall by means of the metal level of growing on expansion and outer wall.

6. the wet unit of the electricity that requires as in claim 1 wherein is limited on the substrate and end portion of relative two faces of cavity with first and second electrodes of the wet fluid contact of at least one electricity.

7. as the wet unit of electricity of requirement in claim 6, wherein substrate provides aperture, has described electrode in its end.

8. as the wet unit of electricity of requirement in claim 1, wherein end portion comprises submissive diaphragm, and its allows the volumetric expansion of closed cavity.

9. the wet unit of electricity as requiring in claim 2 wherein is fixed on the substrate by the metal level of growing on two faces at the expansion on second of inwall.

10. a manufacturing comprises and is equipped with a substrate and one to have the method for the wet unit of electricity of body part of the sidewall of inwall and outer wall, described outer wall provides first and second expansions that extend on two of inwall relative faces, this substrate and sidewall lump together and define the cavity that comprises the wet fluid of first and second electricity, and this method may further comprise the steps;

-outer wall and the substrate made by glass are provided, thus constitute cavity;

-with the wet fluid-filled chambers of first and second electricity;

-end portion of being made by glass is provided in cavity so that it is immersed at least one fluid at a required separation distance place from substrate, by part substrate and end portion and randomly interface form this inwall;

-end portion is fixed on body part, so that first expansion of outer wall is positioned at the top of this end portion;

-wherein providing metal level on the outer wall and on two expansions on the inwall either side, wherein metal level extends at least one end portion from substrate.

11. as the method that requires in claim 10, wherein expansion is a cramping body that separates, it only just is connected to outer wall after being placed on end portion.

12. as the method that requires in claim 11, wherein cramping body is connected with the metal level of growing on their surface with outer wall.

13. each the image-pickup device or imageing sensor of the wet unit of electricity that comprises according to claim 1 to 9.

14. one kind comprises each the optical scanner of the wet unit of electricity according to claim 1 to 9.

15. each display device of the wet unit of electricity that comprises according to claim 1 to 9.

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