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Publication numberCN100478734 C
Publication typeGrant
Application numberCN 200580014589
PCT numberPCT/IB2005/051438
Publication date15 Apr 2009
Filing date3 May 2005
Priority date7 May 2004
Also published asCN1950725A, CN1950743A, CN1973236A
Publication number200580014589.X, CN 100478734 C, CN 100478734C, CN 200580014589, CN-C-100478734, CN100478734 C, CN100478734C, CN200580014589, CN200580014589.X, PCT/2005/51438, PCT/IB/2005/051438, PCT/IB/2005/51438, PCT/IB/5/051438, PCT/IB/5/51438, PCT/IB2005/051438, PCT/IB2005/51438, PCT/IB2005051438, PCT/IB200551438, PCT/IB5/051438, PCT/IB5/51438, PCT/IB5051438, PCT/IB551438
InventorsJW维坎普
Applicant皇家飞利浦电子股份有限公司
Export CitationBiBTeX, EndNote, RefMan
External Links: SIPO, Espacenet
Electrowetting cell and method of manufacturing an electrowetting cell
CN 100478734 C
Abstract  translated from Chinese
电湿单元(15)包括外壁(90)和内壁(80),所述外壁(90)提供有在内壁(80)的相对的两个面上延伸的扩展部分(85,86)。 Electrowetting unit (15) includes an outer wall (90) and the inner wall (80), said outer wall (90) is provided with an inner wall (80) opposite extension portions (85, 86) extending on both faces. 单元还提供有用于体积膨胀的膜片(45),以及通过电镀层(95)被密封。 Unit is also provided for the volume expansion of the diaphragm (45), and is sealed by a plating layer (95).
Claims(15)  translated from Chinese
1.一种电湿单元,包括配备有基片和至少一个侧壁的本体部分,该基片和侧壁合在一起规定了包含电湿流体的腔体,以及还包括被固定在本体部分的至少一个末端部分,其中本体部分的至少一个侧壁包括内壁和外壁,该末端部分的一部分是内壁的一部分,从而固定了末端部分和本体部分,以及该外壁配置有在内壁的第一面上和在第一面的对面的第二面上延伸的扩展部分,其中在外壁上以及在内壁任一侧上的两个扩展部分上提供金属层,其中金属层从基片延伸到至少一个末端部分,其中所述基片和所述至少一个末端部分由玻璃制成。 An electrowetting cell comprising a substrate and provided with at least one side wall of the body portion, the substrate and the side wall together defines a cavity containing electrowetting fluids and further comprising a fixed body portion at least one end portion, wherein the at least one side wall of the body portion includes an inner wall and an outer wall, a portion of the end portion is part of the inner wall, thus fixing the end portion and the body portion, and the outer wall is disposed on the first side of the inner wall and In the extended portion of the second face extending opposite the first surface, wherein the outer wall and the inner wall on either side of the two extended portions provided on the metal layer, wherein the metal layer extending from the substrate to at least one end portion, wherein said substrate and said at least one end portion is made of glass.
2. 如在权利要求l中要求的电湿单元,其中内壁包括基片的一部分。 Electrowetting cell as claimed in claim 2. in claim l, wherein the inner wall comprises a portion of the substrate.
3. 如在权利要求2中要求的电湿单元,其中内壁还包括在基片的所述部分与末端部分的所述部分之间的电绝緣材料的衬垫。 3. In the claims the wet electrical unit 2, wherein the pad further comprises an inner wall portion of said portion of said substrate between the end portions of the electrically insulating material.
4. 如在权利要求l中要求的电湿单元,其中在内壁的第一面上延伸的外壁的扩展部分是固定在外壁上的夹持体. 4. The electrowetting elements in the claims in claim l, wherein the inner wall surface of the outer wall of the first extension portion extending fixed on the outer wall of the holder body.
5. 如在权利要求4中要求的电湿单元,其中夹持体藉助于在扩展部分和外壁上生长的金属层而固定在外壁上。 The electrical unit in wet as claimed in claim 4, wherein the holder body by means of the expansion portion and the outer metal layer grown on the walls of the outer wall is fixed.
6. 如在权利要求l中要求的电湿单元,其中与至少一个电湿流体接触的第一和第二电极被限定在腔体的相对两个面的基片和末端部分上。 Electrowetting cell 6. In claim l requested, wherein the first and second electrodes and the at least one electrical contact of the wet fluid is defined in the substrate and the end portions of two opposing surfaces of the cavity.
7. 如在权利要求6中要求的电湿单元,其中基片提供有小孔,在它的末端处存在所述电极. 7. As claimed in claim 6, electrical wet cell, wherein the substrate is provided with apertures, the presence of the electrode at its terminus.
8. 如在权利要求l中要求的电湿单元,其中末端部分包括柔顺的膜片,它允许封闭腔体的体积膨胀. Electrowetting cell as claimed in claim 8. In claim l, wherein the end portion comprises a compliant diaphragm, which allows the expansion of the volume of the closed cavity.
9. 如在权利要求2中要求的电湿单元,其中在内壁的第二面上的扩展部分通过在两个面上生长的金属层而固定在基片上. 9. In the electrowetting cell as claimed in claim 2, wherein the extended portion of the second surface of the inner wall is fixed on the substrate by growing a metal layer on both surfaces.
10. —种制造包括配备有一个基片和一个具有内壁与外壁的側壁的本体部分的电湿单元的方法,所述外壁提供有在内壁的两个相对的面上延伸的第一和第二扩展部分,该基片和倒壁合在一起限定了包含第一和第二电湿流体的腔体,该方法包括以下步骤;-提供由玻璃制成的外壁和基片,从而构成腔体; -用笫一和第二电湿流体填充腔体;-在腔体中提供由玻璃制成的末端部分,以使得它在离基片的一个所需距离处被浸在至少一个流体中,由部分基片和末端部分以及任选地中间衬垫形成该内壁;-把末端部分固定在本体部分,以使得外壁的第一扩展部分位于该末端部分的顶部;-其中在外壁上以及在内壁任一側上的两个扩展部分上提供金属层,其中金属层从基片延伸到至少一个末端部分。 10. - producing species comprising a substrate and provided with an electrical method body portion having inner and outer walls of the side wall of the wet unit, said outer wall is provided with first and second opposed surfaces of the inner wall extends Extension to the substrate and together defining a back wall comprising a first and a second electrowetting fluid chamber, the method comprising the steps of; - providing an outer wall and a substrate made of glass, thereby forming a cavity; - with Zi and a second electrowetting fluid-filled cavity; - providing end portion made of glass in the cavity, so that it at a desired distance from the substrate is immersed in the at least one fluid, by portion of the substrate and the end portion, and optionally an intermediate spacer forming the inner wall; - the end portion is fixed to the body portion, so that the first extension portion of the outer wall at the top end portion; - wherein the outer wall and the inner wall of any one of the provide two extended portions on the upper side of the metal layer, wherein the metal layer extends from the substrate to at least one end portion.
11. 如在权利要求10中要求的方法,其中扩展部分是一个分开的夹持体,它只有在被放置在末端部分后才被连接到外壁, 11. The method as claimed in claim 10, wherein the extension is a separate holder body, it is only after being placed at the end portion is connected to the outer wall,
12. 如在权利要求ll中要求的方法,其中夹持体和外壁与在它们的表面上生长的金属层相连接。 12. As required in claim ll, wherein the holder body and an outer wall with a metal layer grown on their surface are connected.
13. —种包含按照权利要求1到9的任一项的电湿单元的图像摄取装置或图像传感器. 13. - species comprising image pickup apparatus according to claim or an image sensor according to any one of claims 1 to 9 electrowetting cell.
14. 一种包括按照权利要求1到9的任一項的电湿单元的光学扫描装置。 14. A comprising an optical scanning device according to claim any one of claims 1 to 9, an electrical wet cells.
15. —种包含按照权利要求1到9的任一项的电湿单元的显示装置。 15. - species comprising a display device according to any one of claims 1 to 9 electrowetting cell as claimed in claim.
Description  translated from Chinese

电湿单元和制造电湿单元的方法 Electricity and manufacturing electric wet wet unit cell method

技术领域 FIELD

本发明涉及电湿单元,它包括配备有基片和至少一个側壁的本体部分,该基片和側壁合在一起规定了包含电湿流体的腔体,以及还包括被固定在本体部分的至少一个末端部分。 The present invention relates to a wet electrical unit comprising a substrate and provided with at least one side wall of the body portion, the substrate and the side wall together defines a cavity containing electrowetting fluids and further comprising a body portion fixed to at least one the end of the section.

本发明还涉及制造包括配备有基片和側壁的本体部分的电湿单元的方法,该基片和側壁合在一起规定了包含第一和笫二电湿流体的腔体。 The present invention also relates to the manufacture comprising a wet cell equipped with an electrically method body portion and the side wall of the substrate, the substrate and the side wall defines together comprising a first and a second electrowetting fluid Zi cavity.

背景技术 BACKGROUND

电湿单元是一个在其中光被两种不可互混的流体之间的弯月形液面折射的单元.两种流体中的一种流体是电绝缘的以及另一种流体是 Electrowetting cell is a light in which the meniscus is two can not be mixed in the fluid between the refracting unit. Two fluids of a fluid is electrically insulating, and another fluid is

导电的。 Conductive. 弯月形液面的形状在两个电极之间的电压的影响下是可变的, 其中一个电极被连接到导电流体以及另一个电极被连接到本体的表面.这样的单元是已知的,它例如可被应用作透镜或显示器.在应用单元的情形下,存在着穿过本体部分的光路径, Meniscus shape under the influence of a voltage between the two electrodes is variable, wherein one electrode is connected to the conductive fluid and the other electrode is connected to the surface of the body. Such a unit is known, It can be applied for example a lens or a display. In the case of the application unit, there is a light path through the body portion,

这样的电湿单元例如是从WO-A 03/069380获知的。 Such electrical units, for example, wet from WO-A 03/069380 learned. 这项专利申请公开了一种透镜,其中至少一个側壁的内表面由憎水性流体接触层所覆盖。 This patent application discloses a lens, wherein the at least one inner surface of the side wall is covered by a hydrophobic fluid contact layer. 当没有施加电压时,流体接触层相对于电绝缘流体的湿润度不同于流体接触层相对于导电流体的湿润度,在施加的电压的影响下湿润度发生改变。 When no voltage is applied, the fluid contact layer with respect to wettability of the electrically insulating fluid is different from the fluid contact layer with respect to wettability of the conductive fluid, the wettability is changed under the influence of an applied voltage. 这导致在流体接触层与流体之间的接触线上弯月形液面的接触角的改变,由此弯月形液面的形状被调节.因此,弯月形液面的形状取决于所施加的电压, This results in a change in the contact angle of the line of contact between the fluid contact layer with the fluid of the meniscus, whereby the shape of the meniscus is adjusted. Thus, the shape of the meniscus depends on the applied voltage,

由于电湿单元具有光学特性并包括流体,为达到单元的完全填充和在闭合单元后没有流体泄漏到单元外面而采取的适当的搮作是第一重要的,在现有技术中公开的单元没有给出关于如何达到这样的完全填充和阻止流体泄漏的解决方案. Since the wet cells having electrical and optical characteristics including a fluid, in order to achieve complete filling unit and the closing unit in no fluid leakage into the cell after being taken out as appropriate 搮 is the first important, as disclosed in the prior art unit is not is given on how to achieve such a complete filling and to prevent fluid leakage solutions.

发明内容 SUMMARY

所以,本发明的第一个目的是提供在开头段落中提到的那种电湿单元,它可以完全地被填充和在单元闭合后能防止流体泄漏. Therefore, a first object of the present invention is to provide a kind of electric wet unit mentioned in the opening paragraph, which can be completely filled and the unit is closed after the fluid leakage can be prevented.

本发明的第二个目的是提供在开头段落中提到的那种方法,它可以以工业上可行的方式达到完全地填充. A second object of the present invention is to provide a method of the kind mentioned in the opening paragraph, which can be industrially feasible manner completely filled.

第一目的是这样达到的,其中本体部分的至少一个側壁包括内壁和外壁,该末端部分的一部分是内壁的一部分,从而固定了末端部分和本体部分,以及该外壁配置有在内壁的第一面和在第一面的对面的第二面上延伸的扩展部分. The first object is achieved, wherein the at least one side wall of the body portion includes an inner wall and an outer wall, a portion of the end portion is part of the inner wall, thereby fixing the end portions and a body portion, said outer wall and an inner wall disposed in a first plane and the extension portion on the second face opposite the first face extends.

第二目的是在一种具有内壁和外壁的单元中达到的,所述外壁具有在内壁的两个相对的面上延伸的第一和笫二扩展部分,该方法包括 The second object is in having inner and outer walls of the cells reached, said outer wall having a surface extending in two opposite first and second extension portion Zi inner wall, the method comprising

以下步骤; The following steps;

-提供外壁和基片,形成腔体; -用第一和第二电湿流体填充腔体; - Providing the outer wall and the substrate, forming a cavity; - with a first and a second electrowetting fluid-filled cavity;

-提供腔体的末端部分,以使得它在离基片的一个所需距离处被浸入到至少一个流体中,由部分基片和末端部分以及任选地一个中间村 - Providing the end portion of the cavity, so that it at the desired distance from a substrate is immersed in the at least one fluid, the end portions of the substrate and the intermediate portion, and, optionally, a village

垫形成内壁;以及 Mat forming the inner wall; and

-把末端部分固定到本体部分,以使得外壁的第一扩展部分位于该末端部分的顶部。 - The end portion is fixed to the body portion, so that the first extension portion of the outer wall at the top end portion.

本发明的解决方案是一种双壁单元。 The solution of the invention is a double-wall unit. 外壁提供稳定性和足够的密封,而内壁由被相继地组装的組成元件所构成.由于相继的組装和双壁,电湿流体可在该末端部分之前提供,结果,末端部分可被浸入到流体中,在实践中该流体具有最低密度,部分流体将流到末端部分的上面,但无论如何保持在外壁内.这种浸没导致所需要的完全填充。 Wall provides stability and sufficient sealing, and the inner wall of the constituent elements are assembled successively constituted. Since sequential assembly and double-walled, electrical fluid prior to the wet end section provides a result, the end portion can be immersed fluid, in practice, the fluid having the lowest density, the portion of the fluid flow to upper end portions, but in any case kept within the outer wall. This leads to completely fill the immersion required. 于是达到了完全的密封,因为外壁存在于内壁的对面.这样,封装的外壁只包括两种主要的材料,它们以良好的方式互相固定在一起.适当的組合是金属和玻璃. Thus to achieve a complete sealing, because the presence of the outer wall opposite the inner wall. Thus, the outer wall of the package includes only two main materials, they are secured to each other well. Suitable combination of metal and glass.

基片可以是外壁的一部分,但优选地是一个分开的部分,它一部分是内壁的一部分.在基片的部分与末端部分之间可以存在衬垫.这是合适的但不是必须的.这样的衬垫的优点在于,它可以提供以任何所需的表面涂层,诸如上面提到的流体接触层.有利地,衬垫在它的底側提供缝隙。 The substrate may be a part of the outer wall, but preferably is a separate part, which is part of the inner wall portion may be present between the pad portion and the edge portion of the substrate. It is suitable but not necessary. Such advantage is that the liner, which may be provided in any desired surface coating, fluid contact layer such as mentioned above. Advantageously, the liner provided on its bottom side slits. 这允许减小单元的高度. This allows reduced height unit.

对于在末端部分的顶部提供的第一扩展部分可以设想几个实施例。 For the first extension portion provided at the top end portion of the several embodiments may be contemplated. 例如它可以是外壁的柔性的扩展部分.它替换地可以是通过沉积技术,可能是藉助于工具作用压力的沉积技术而设里的金属层. For example, it may be flexible extension of the outer wall. Alternatively it may be by deposition techniques, the deposition may be by means of the action of pressure and technological tools provided in the metal layer.

在优选实施例中,第一扩展部分是夹持体,它作为一个分开的部件被组装到末端部分的顶部,并且它被同时或相继连接到外壁.这提供了有效的组装方法.可靠的连接可以以机械的和化学的这两种措施来实现,诸如锁定特性、附加的夹持、粘接层和密封层.有利地,可使用在所述表面上生长的一个联合和保护层,生长层以化学方法结合在表面。 In a preferred embodiment, the first extension portion is a holder body, as a separate component is assembled to the top end portion, and it is simultaneously or sequentially connected to the outer wall. This provides an effective method of assembling. Reliable connection may be mechanically and chemically to achieve these two measures, such as a locking feature, additional clamping, adhesive layer and the sealing layer. Advantageously, a joint may be used and a protective layer on the surface of the growth, the growth layer chemically bonded to a surface. 它具有相同的热膨胀系数,并且它对于在温度的影响下的非弹性和不可逆膨胀是不敏感的,生长层可以生长到所需厚度由此使缝隙和高度差别得到平滑。 It has the same thermal expansion coefficient, and it is for non-elastic under the influence of temperature and the irreversible expansion is insensitive, the growth layer may be grown to the desired thickness of the slit and thereby obtain a smooth height difference. 而且,这样的生长层是相当惰性的,特别是如果有氧化物存在(它可以是自然氣化物),最后,生长层对于由任何电湿流体的冲击是不敏感的,并且没有引起分子扩散的开孔或多孔结构,通过这样的密封,特别是连同玻璃的基片和玻璃的末端部分一起,最终得到的单元是紧密地气密的. Moreover, such a growth layer is quite inert, especially if there is the presence of an oxide (which may be a natural vapor), and finally, the growth layer against an impact from any electrical wet fluids are insensitive, and did not cause molecular diffusion openings or porous structure, by such a seal, in particular together with the end portion of the glass substrate and glass together, the resulting unit is closely airtight.

特别适合的技术是电镀.这种技术具有优点:它可以通过把整个 A particularly suitable technique is the electroplating of this technique has the advantage: it can be the whole

单元浸入镀槽而在整块级别上施加,而且这样的整个单元的浸入具有 Immersed in the plating tank unit in the block level is applied, and the entire immersion of such units having

优点:生长层在整个外壁上和内壁的任一面的扩展部分上延伸.由此 Advantages: growth layer on either the entire outer wall and the inner wall side of the extension portion extending therefrom.

外壁的夹持特性被加强. Clamping feature wall is strengthened.

在再一个实施例中,与至少一个电湿流体接触的第一和笫二电极 The first and second electrodes Zi in a further embodiment, the wet fluid and the at least one electrical contact

被限定在腔体的相对两个面的基片和末端部分上,在电湿单元中需要 Is defined on the substrate and the end portion opposing two faces of the cavity, it is necessary electrical wet cells

至少两个电极,以便施加所需要的电压来设定弯月形液面的形状.这 At least two electrodes, so as to apply the voltage required to set the shape of the meniscus. It

样的电极可以在弯月形液面的相对的两側施加到内壁上.然而,在本 Kind of electrodes may be on opposite sides of the meniscus is applied to the inner wall. However, in the present

实施例中,电极存在于末端部分和在基片上。 Embodiment, the electrode present at the terminal portion and on the substrate. 这实际上允许使用金属 This fact allows the use of metal

封装,而不必对一个电极有绝緣的连接。 Package, without having an electrode with an insulating connection.

优选地,基片提供有小孔,在它的一端存在所述电极.电极既可 Preferably, the substrate is provided with apertures, the presence of the electrode at one end. Electrode either

以出现在面向弯月形液面的基片的表面上也可以在背离弯月形液面的 To appear on the face of the meniscus surface of the substrate may be deviated from the meniscus

相反的表面上。 Opposite the upper surface. 后者的改型是优选的,因为它在这里不需要用金属填 The latter variant is preferred because it does not require a metal filled in here

充所述小孔:流体会填充小孔,而且,这种电极的制造可以与被使用 Filling the holes: fluid will fill the hole, and manufacturing such an electrode can be used with

于把外壁固定在基片上的金属带条的提供合在一起,从而提供充分的密封。 In the outer wall is fixed on the substrate to provide a metal strip together to provide an adequate seal.

优选地,封装提供有一个体积膨胀部件.这样的膨胀部件例如从JP-A 2002/162506获知的.这个已知的封装包括特定的腔室,它出现在基片旁边,并用柔软的盖与单元分隔开.在单元中压力增加时,柔软200580014589.X Preferably, the package is provided with a volume expansion member. Such an expandable member for example, from JP-A 2002/162506 learned. This known package comprises a specific chamber, it appears next to the substrate, and with a soft cover and the unit spaced apart from the pressure increases in the cell, soft 200580014589.X

说明书第4/10页 Instructions Page 4/10

盖可以变形或甚至伸出,以便形成弯曲的表面而延伸到所迷腔室.本发明提供把这样的腔室放置在内壁与外壁之间的可能性. The cover may be deformed or even extend so as to form a curved surface extending into the fan chamber. The present invention provides such a possibility to be placed in the chamber between the inner and outer walls.

体积膨胀部件的一个更优选的实施例是作为末端部分的一部分的柔软的膜片.这样,末端部分较大的部分(即,在光的路径上出现的部分)被移动.因此,可以补偿很大的体积增加.柔软的膜片特别地是环形的。 A more preferred embodiment the volume of the expandable member as the end portion of the flexible part of the diaphragm. Thus, some of the larger end portion (i.e., appears in the path of the light portion) is moved. Accordingly, it can be compensated a large increase in volume. Particularly soft diaphragm is annular. 末端部分因此被划分成外边缘、膜片、和内部部分.末端部分的标准位置在这里不需要是平的.正如将参照附困说明的,特别地,外边缘在夹持体的压力下被向下推.这更加导致加压的封装.虽然不是优选的,但不排除末端部分的外边缘部分包括与内部部分不同的另外的材料, Thus the end portion is divided into an outer edge, the diaphragm, and the inner portion. Standard position of the end portion of the flat is not required here. As will be described in reference to the accompanying difficulties, in particular, the outer edge of the holder body under pressure is pushed down. This leads to a more pressurized package. Although not preferred, but does not exclude the outer edge portion of the end portion of the additional material and the inner portion comprises a different,

膜片较优选地由金属制成.这样的材料有效地能耐受流体.它具有附加的好处,即膜片可被用作为单元的一个电极.如果在夹持体与外壁之间的连接是通过电镀等等提供的,则膜片也将设置有金属层. 一方面具有足够稳定度和另一方面具有足够的乘顺度的膜片层的适当 Diaphragm More preferably made of metal. Such a material can withstand fluid effectively. It has the additional advantage that the diaphragm can be used as an electrode unit. If the connection between the holding member and the outer wall is provided by plating or the like, the membrane will also provided with a metal layer on the one hand has sufficient stability and ride along the other hand have a sufficient degree of appropriate membrane layer

的厚度约为5-30微米,以及更优选地在15与25微米之间.这也取决于膜片的材料,为了限制膜片的厚度,它可以设置有绝缘涂层。 A thickness of about 5-30 microns, and more preferably between 15 and 25 microns. It also depends on the membrane material, in order to limit the thickness of the diaphragm, it may be provided with an insulating coating.

基片和末端部分优选地是玻璃板.玻璃对于电湿流体是情性的, 它可以用诸如粉末喷射(blasting)那样的技术来处理,并且金属层可以附着到其上。 The substrate and the end portion preferably glass. Glass is the situation for the electrical properties of the wet fluid, which can be used such as spraying a powder (blasting) as technologies for processing, and the metal layer may be attached thereto. 如果需要, 一个或两个玻璃板可以设置有涂覆和表面层,包括IR涂復、UV-吸收涂褒、抗反射涂復,并且还有透镜.这样的透镜可以用复制技术由表面层制成.对准特性可被包括在这样的复制制成的表面层中,这提供了单元与另外的透镜在底部和顶部面上的正确的对准。 If desired, one or two glass plates may be provided with a coating and a surface layer, including the IR coating, UV- absorbing coating praise, antireflective coating, and also the lens. Such a lens may be a surface layer made by replication a. the alignment features may be included in the surface layer made of such a copy, this provides proper alignment with another lens unit at the bottom and top surfaces.

如果本发明的单元被用作为透镜,则它与另外的透镜适当地组装 If the unit of the invention is used as a lens, it is appropriately assembled with a further lens

以得到所需的路径.不排除两个电湿透镜是组件的部件;亊实上,这提供变焦特性.然而,替换实施例是一个堆叠的电湿透镜.这种堆叠电湿透镜可以通过本发明的方法适当地制成. . To give the desired path does not exclude the two mirrors are electrically soaked member assembly; 亊 fact, this provides a zoom features, however, an alternative embodiment is a stacked electronic microscope of this stacked electronic wet wet microscope. can be suitably prepared by the method of the present invention.

在堆叠单元制造的第一实施例中,基片出现在堆叠单元结构的中部。 In the first embodiment, the stacking unit manufactured, the substrate appears in the middle of the stacked cell structure. 然后在基片的一倒进行第一组装和填充,以及在结束笫一面的组装和填充后,在相对的第二面上进行第二组装和填充.优选地,两个相对的末端部分都具有柔软的膜片以补偿体积膨胀.在这种具有扩展部分的结构中提供外壁以支撑在堆叠单元中间的基片。 Then the substrate is an assembled and filled with a first down, and at the end of one side of the assembly and Zi after filling, the opposing second surface of the second assembly and filling. Preferably, two opposed end portions having flexible diaphragm to compensate for the volume expansion. In this way of providing the outer wall structure has to support the expanded portion in the middle of the stacking unit of the substrate. 在堆叠单元制造的笫二实施例中,两个单元一个接一个地在外壁内被提供.第一单元的末端部分可以是第二单元的基片,但这不是必须的.最简单地,提供衬垫以代替夹持体.在这个可以通过电镀而很好地连接到外壁的衬垫上,相继提供第二单元的另一个基片和另外的元件.这样的结构还允许使电极位于基片中而各末端部分不需要互相耦合。 In an embodiment Zi manufactured in two stacked units, two units one by one is provided in the outer wall of the end portion of the first unit may be a substrate of the second unit, but this is not necessary. The easiest way to provide liner in place of the holder body. In this well may be connected to the outer wall of the liner by plating, sequentially provides the other substrate of the second unit and the additional element. Such a structure also allows the electrode located in the substrate rather each terminal portion coupled to each other is not required.

代替堆叠几个电湿单元,外壁可被用于一个电湿单元和另外的光学和或非光学元件的堆叠.除了分开的透镜和滤色镜以外,可以设想把图像传感器也这样来组装,利用任何衬垫等使其与电湿透镜分隔开所需距离.与困像传感器的这种集成可最有效地实现,其中连接垫被设置在与光学工作面相反的表面上.替换地,图像传感器可被组装在一个介入基片的顶部,它设置有通孔以便接触到与光学工作面相反的面,介入基片的使用本身在半导体封装的技术上是已知的。 Instead of stacking several electrowetting unit, the outer wall may be used to wet an electrical unit and the further stacking the optical and non-optical elements. In addition to separate lenses and filters, it is contemplated that the image sensor can thus be assembled using any liner pads, etc. it is electrically separated wet microscope desired distance. trapped image sensor with this integration can be most effectively achieved, wherein the connection pad is provided on the working surface opposite the optical surface. Alternatively, the image sensor can be assembled on top of a substrate of intervention, it is provided with a through hole so as to contact to a working surface opposite the optical surface, the use of interventional substrate semiconductor package itself is technically known.

本发明的方法的优点在于,它可以在晶片级别或整块级别上实现. 外壁可以是诸如具有小孔的印刷电路板的平板的一部分.它只有在填充和封装步骤后才被分割成各个单独的封装.然而,即使单个地实行单元的制造,电镀步稞可以在镀槽中进行以允许同时电镀多个装置. Advantage of the method of the present invention is that it may be implemented on a wafer level or block level. Part of the outer wall may be such as having apertures of a printed circuit board plate. It is only at the individual filling and packaging steps before divided package. However, even a single unit to carry out the manufacture of wheat electroplating step can be performed to allow a plurality of devices simultaneously plated in the plating bath.

本发明还涉及在开头段落中提到的那种制造方法和单元,其中提供严密的密封.这是这样的达到的,即末端部分用金属层固定在本体部分上,该金属层同时施加到末端部分和接合部分的表面.如上所述, 施加上金属层将导致气密的密封.如果金属层或其一部分是金属层的结构延伸到单元的两面,就可实现夹持'优选的施加方法是电镀,但不排除其它方法,诸如金属凝胶溶液沉积、溅射或化学汽相沉积、或这样的沉积方法的组合,金属层被合适地附着在末端部分的表面上和在本体部分的表面上的金属部件上. The present invention also relates to a manufacturing method and the kind of unit mentioned in the opening paragraph, which provide tight seal. This is achieved such that the end portion of the metal layer is secured to the body portion, while the metal layer is applied to the end part of the surface and the engaging portion described above, is applied on the metal layer will cause an airtight seal. If the metal layer is a structure or a portion thereof extending to both sides of the metal layer unit, the clamping can be achieved 'preferred method of application is electroplating, but does not exclude other methods, such as a metal gel solution deposition, sputtering, or chemical vapor deposition, or a combination of such a deposition method, a metal layer is suitably attached to the surface of the end portion and the upper surface of the body portion metal parts.

该单元可被用作为在照相机、光学记录设备或任何其它光学设备中使用的透镜.该单元可以与另外的透镜一起组装,以便按需要得到光学路径,或甚至得到变焦透镜'替换地,该单元被用作为显示器, 在这种情形下,只需要晶片或末端部分是光学透明的。 The unit may be. The unit can be assembled with as a lens used in a camera, the optical recording device, or any other optical devices with additional lens together so as necessary to obtain the optical path, or even to obtain a zoom lens' Alternatively, the unit is used as a display, in this case, only the end portion of the wafer or is optically transparent. 单元还可被用作为传感器。 Unit can also be used as a sensor.

附图说明参照附困将进一步阐述本发明的单元和方法的这些和其它方面, BRIEF DESCRIPTION further described with reference to attached trapped These and other aspects of the present unit and the method of the invention,

其中: Among them:

图1以示意性截面圃显示本发明的单元,其中仅仅显示左面部分; 图2-7显示在单元中使用的末端部分的制造中相继各级的示意性 In Figure 1 a schematic cross-sectional view of the display unit of the invention po, which only the left part of the display; Figure 2-7 shows schematically the end portion of the manufacturing unit used in successive levels in

截面图; Cross-sectional view;

图8-16显示在单元的制造方法中相继各级的示意性截面困,在图上只显示单元的左面部分. Figure 8-16 show the method for manufacturing unit in schematic cross-section trapped successive levels, only the left portion of the display unit in FIG.

图17显示本发明的单元的第二实施例的示意性截面图。 Figure 17 shows a schematic cross-sectional view of an embodiment of the present invention the second unit.

具体实施方式 DETAILED DESCRIPTION

附图是示意的,不是按比例画出的.在不同的图上相同的标号是指相似的部件. The drawings are schematic and not drawn to scale. In the different figures same reference numerals refer to like parts.

图1显示按照本发明的电湿单元15的实施例.在这个图l上,仅仅显示局部截面图,即,仅仅是单元15的左面部分.然而,单元15 是对称结构的,这样,未显示的右面部分是左面部分的镜像.透镜包括流体腔室,具有第一流体51和第二流体S2,第一和第二流体是不可互混的并通过弯月形液面14互相接触.笫一流体51在本例中是硅油、 烷烃、或另外的适用的电绝緣流体。 Figure 1 shows an embodiment according to the present invention the electrical wet unit 15. In this Figure l, the sectional view shows only partial, i.e., only the left part of unit 15, however, unit 15 is a symmetrical structure, so that, not shown The right part is a mirror image of the left part of the lens includes a fluid chamber having a first fluid 51 and second fluid S2, the first and second fluids being non-miscible and in contact with each other through the meniscus 14. Zi 51 In this case the fluid is a silicone oil, an alkane, or another suitable electrically insulating fluid. 第二流体52在本例中是包含盐溶液的水或其他合适的导电流体.腔室的各个面具有电绝缘层8和流体接触层IO,例如聚对亚苯基二甲基, The second fluid 52 in this embodiment is comprising water or other conductive fluid suitable salt solution. Each side of the chamber has an electrically insulating layer 8 and the fluid contact layer IO, such as poly-dimethyl-p-phenylene,

按照这个实施例,本体部分17包括内壁80和外壁90,以及—在单元15的第二面112上—第二盖板6。 According to this embodiment, the body portion 17 includes an inner wall 80 and outer wall 90, and - on the second surface unit 15 112 - second cover plate 6. 内壁80包括电绝缘部件8,上面涂覆着流体接触层IO.内壁80还包括末端部分4的一部分,这个末端部分(或第一盖板)4包括环形玻璃部件81,它经由可扩展的接合件45被连接到内側部分.在优选实施例中,这个环形玻璃部件81和末端部分4的内側部分用单个玻璃板制成,将参照图2到7作说明.内壁80还包括笫二盖板6的末端61.这个第二盖板6提供有通孔62、电极2和金属化层63.在替换实施例中,板6可以用类似于和等同于单元15的第一面111的结构所替代,即,环形玻璃部件、可扩展的接合件和盖板, The inner wall 80 includes an electrical insulating member 8, the above coating fluid contact layer IO. 80 further includes an inner wall portion of the end portion 4, the end portion (or the first cover plate) 4 comprises an annular glass member 81 that extends through the engagement member 45 is attached to the inside portion. embodiment, the glass member 81 and the annular end portion of the inner portion 4 is made of a single glass plate in a preferred embodiment, 2-7 as will be explained with reference to FIG. Zi inner wall 80 also includes two cover 61. The second end 6 of the cover 6 is provided with a through hole 62, the electrode 2 and the metal layer 63. In an alternative embodiment, the plate 6 can be used similar to the structure and identical to unit 15 of the first surface 111 Alternatively, i.e., an annular glass member, the engaging member may be extended and a cover plate,

内壁80的这三个部分—环形玻璃部件81、(也是环形的)绝蟓部件8 和末端61—被夹持在外壁90的凸起85与环形闭合部件86之间。 These three parts of the inner wall 80 - annular glass member 81 (also annular) must Drury member 8 and the end of the 61- 90 is sandwiched between the outer wall of the annular projection 85 and the closing member 86 between. 环形闭合部件86在这里是金属片,但它可以是具有导电表面的任何物体。 An annular closure member 86 here is a metal sheet, but it can be any object having a conductive surface. 外壁90包括塑料或其它材料的内芯92,它具有金属化表面91.这个金属化表面91还包闺笫二盖板6的金属化层63.这样,提供了机械上稳定的连接. The outer wall 90 comprises an inner core of plastic or other material 92, which has a metallized surface 91. The metallized surface 91 further Gui Zi metallization layer 63. The second cover 6 such, provides a stable mechanical connection.

内壁80和外壁90互相固定并固定在接合件45和末端部分4,以使得密封层95包围它.密封层95由适当的材料制成.可以使用本身作为保护涂覆层已知的橡胶、环氣树脂等的聚合物涂覆.然而,优选地,密封层95包含金属.这允许提供气密的封装,使空气、水或流体不易扩散。 An inner wall 80 and outer wall 90 is fixed to each other and fixed in the engaging member 45 and the end portion 4, so that the seal layer 95 surrounding it. Seal layer 95 is made of a suitable material may be used as a protective coating is known per se a rubber ring polymer coated gas resins and the like. Preferably, however, the sealing layer 95 comprises a metal. This allows to provide an airtight package, so that air, water or fluid is not easy to spread. 提供这种金属密封层95的特别优选的方法是电镀,这个方法可以例如在镀槽中在三维表面上实现, To provide such a metal seal layer 95 is particularly preferred method is electroplating, for example, in this method the plating bath may be implemented on a three-dimensional surface,

图2到7以示意性截面困显示在基片200的制造方法中相继的步骤,该基片具有被用作为可膨胀的接合件46的集成的膜片210。 2-7 show in schematic cross-section trapped in the successive step of the manufacturing method of the substrate in Fig. 200, the substrate has been used as an expandable engagement member 46 integrated diaphragm 210. 图2 显示基片200,具有第一表面201和相对的笫二表面202.基片200在本例中是具有适当的厚度(例如约0.1mm)的玻璃板. Figure 2 shows a substrate 200 having a first surface 201 and an opposite second surface 202. Zi substrate 200 in this embodiment is having an appropriate thickness (e.g., about 0.1mm) of the glass plate.

图3显示在两个表面201, 202上施加上光致抗蚀刑材料205后的基片200。 Figure 3 shows the two surfaces 201, 202 on the photoresist coating is applied after the sentence material 205 substrate 200. 光致抗蚀剂材料本身在技术上是已知的。 Photoresist material itself is technically known.

图4显示对光致抗蚀刑材料205制作图案和显影后的基片200.在第一面201上制作闺案导致小孔214.在第二面202上制作图案导致: 还使得光致抗蚀剂材料205的表面215具有三维结构。 Figure 4 shows sentence a photoresist material 205 is patterned and after development substrate 200. In the case of the production of the Inner lead on the first surface 201 on the second surface 214. The apertures 202 patterned cause: also such that the light-induced anti- surface 215 of etchant material 205 having a three-dimensional structure. 这个表面215 在本例中是波浪的形式.这种表面结构可以通过锻压或另一个种机械变形的方式来提供。 The surface 215 in this case is in the form of waves. This surface structure can be another kind of forging or mechanical deformation of the way to provide. 替换地,可使用先进的光刻技术.在另一个实施例中,使用模压技术来提供具有想要的形状的光致抗蚀刑层205,正如将会看到的,在这种情形下不需要特定的光致抗蚀剂材料。 Alternatively, advanced lithography techniques may be used. In another embodiment, the use of molding techniques to provide a desired shape of the photoresist layer 205 sentence, as will be seen, in this case no requires specific photoresist material.

图5显示在施加上膜片层225后的基片200,膜片层例如包括具有一定弹性的金属,不过任何其它材料也是适用的,只要它与光致抗蚀剂层205是兼容的。 Figure 5 shows the membrane layer 225 is applied on the rear substrate 200, e.g., a membrane layer comprising a metal having a certain elasticity, but any other materials are also suitable, so long as it is with the photoresist layer 205 is compatible. 许多金属原来是具有足够的柔软性,如果以薄层形式应用的话。 Many metals originally having sufficient flexibility, if applied in a thin layer in the form of words. 例子包括金、铜、镍、铝以及它们的适当的合金.金属层可以用适当的沉积技术(诸如溅射、化学汽相沉积和湿化学技术) 而被施加上。 Examples include gold, copper, nickel, aluminum, and alloys thereof suitable metal layer may be deposited by a suitable technique (such as sputtering, chemical vapor deposition, and wet chemical techniques) is applied. 在本例中,膜片层225被显示为做成困案的,但这不是必须的。 In the present embodiment, the diaphragm layer 225 is shown as formed trapped case, but this is not necessary.

图6显示在第一面201上通过有困案的光致抗蚀刑材料205被制作成图案后的基片200.在玻璃板200的情形下,可以有利地应用粉末喷射技术,然而,不排除诸如蚀刻的任何其它技术。 Figure 6 displayed on the first surface 201 200. In the case of a glass plate 200, can be advantageously applied by spraying a powder technical difficulties have criminal cases photoresist material 205 is made into a pattern after the substrate, however, does not exclusion of any other technique, such as etching.

图7显示在去除光致抗蚀刑材料205后的基片200,和得到具有集成的膜片220的基片200.正如将会看到的,基片200可以在橫向上延伸.膜片220可以具有适当的形状.特别优选地是环形.基片可包括多个膜片,并适合于在另一个步骤中进行晶片级处理,或被分隔开, 这样的分开步槺可以在光致抗蚀剂材料205去除之前施加.虽然这里未示出,但不排除基片包括在它的第一或第二面201, 202上的另外的层。 Figure 7 shows the removal of photoresist material 205 sentence after the substrate 200, and to obtain a substrate having an integrated diaphragm 220 200. As will be seen, the substrate 200 may extend in the transverse direction. Diaphragm 220 may have a suitable shape. Especially preferred are annular. substrate may include a plurality of diaphragms, and adapted to perform a wafer-level processing in another step, or separated, such separate step 槺 can cause anti-light Before applying the corrosion inhibitor material 205 is removed. While not illustrated here, but does not exclude the substrate comprises at its 201, another layer 202 on the first or second surface. 如果半导体基片被用作为基片200,则可以在其上规定半导体元件, 诸如二极管和晶体管或沟槽电容器. If the semiconductor substrate is used as the substrate 200, it may be provided a semiconductor element thereon, such as diodes and transistors or trench capacitors.

图8到16显示电湿单元15的制造方法的示意性截面图.困上显示图1的实施例的制造,但在本发明的范围内修改方案和替换例是可能的。 Figure 8-16 shows a schematic sectional view showing a manufacturing method of a wet electrical unit 15. Manufacture of the embodiment of Figure 1 shows the trapped, but within the scope of the present invention embodiment are possible modifications and substitutions.

图8显示组装时的第一步骤。 Figure 8 shows a first step of assembly. 这里,玻璃基片6以环形部件90形式提供。 Here, the glass substrate 6 to 90 form an annular components available. 环形部件90用作为外壁,以及提供有导电表面.虽然允许, 但不一定必须全部表面是导电的.部件90提供有扩展部分85。 The annular member 90 is used as an outer wall, and provided with a conductive surface. Although allowed, but not necessarily the entire surface is conductive. Member 90 is provided with extension 85. 它存在于基片6的第一面112上,并与基片6的粘接层63接触.粘接层63 在这里是诸如铜那样的金属.电极2存在在基片6的同一个第一面112 上。 It is present on the substrate 6 of the first surface 112, and in contact with the adhesive layer 6 of the substrate 63. The adhesive layer 63 is here a metal, such as copper electrode 2 is present in the same first substrate 6 surface 112. 这个电极2覆盖基片6的小孔62。 The electrode substrate 2 covering 62 holes 6. 小孔62可以用导电材料填充, 但在本例中不是这种情形,例如与外壁卯相反,孔径62不是环形的而只局部地被提供。 Apertures 62 may be filled with a conductive material, but in this case is not the case, e.g., with the outer wall sockets contrast, the aperture 62 is not circular but is provided only locally. 可以使用另外的材料而不用玻璃.在单元不是透镜的情形下,基片不需要是光学透明的。 Additional materials may be used instead of glass. In the case of the lens unit is not, the substrate need not be optically transparent. 为了保持基片6与外壁固定在一起,可以使用例如粘接层. In order to keep the substrate 6 and the outer wall are fixed together, for example, an adhesive layer.

图9显示在组装时第二步骤以后的结果。 Figure 9 shows a second step in assembling the subsequent results. 这里,基片6和外壁90 互相与金属层91相连.这个金属层91是通过在镀槽中电镀而被适当提供的。 Here, the substrate 6 and an outer wall 90 connected to each other and the metal layer 91. The metal layer 91 is formed by plating while the plating bath is suitably provided. 金属层91沿外壁90延伸,以及被连接到基片的粘接层63。 Metal layer 91 extends along the outer wall 90, and is connected to the substrate of the adhesive layer 63. 连接不单存在于基片的笫一面112,而且也存在于倒面115.在这里显示了但在另外的图上没有显示的是:电极2还提供有电镀层。 Exist not only connected to the substrate 112 side sleeping mat, but also in down surface 115. However, here shown on the other figures do not show that: the electrode 2 is also provided with the plating layer. 电极2 的位置被选择为使得在电极与外壁之间没有形成桥.可在电极2提供绝缘涂层,以避免它加厚。 Position of the electrode 2 is selected to be such that the outer wall is not formed between the electrodes and the bridge may be provided an insulating coating on the electrode 2, to prevent it thickened.

图10显示在导电流体52施加到外壁卯和基片6的第二面113后的结果.在本例中,流体52是盐的水溶液.也可以使用酒精等等作为另外的溶剂.流体延伸到孔径62,由此造成与电极2接触。 Figure 10 shows the conductive fluid 52 is applied to the outer wall of the sockets 113 and the substrate results after the second surface 6. In this example, the fluid 52 is an aqueous solution of a salt. Alcohol and the like may also be used as additional solvent. Fluid extends into aperture 62, resulting in contact with the two electrodes. 电极2同时用作为单元的外壳. Electrode 2 are simultaneously used as housing unit.

困11显示在提供电绝緣流体51后的结杲.这是一种油例如烷烃或硅油,从它的较低的密度看来,它在导电流体51后被提供.所显示的弯月形液面的形状以及到基片6的第二面113的附着纯粹是示意性的,不一定相应于任何物理效果. 11 is displayed in the trapped fluid 51 to provide electrical insulation after the junction Gao. This is an alkane or an oil such as silicone oil, from its lower density appears, which provides the conductive fluid 51 after. Meniscus shown attaching the second surface 113 and the shape of the liquid surface to the substrate 6 is purely schematic and not necessarily correspond to any physical effect.

图12显示在插入衬垫8后的结果.在这种情形下,这是环形电绝缘部件8,它具有聚对亚苯基二甲基的流体接触层10.衬垫8具有表面9,它可以具有经修改的表面结构或层以用于适当地粘接到外壁卯的电镀层91。 Figure 12 shows the results after the pad 8 is inserted. In this case, which is electrically insulating annular member 8 having polyparaphenylene dimethyl fluid contact layer 10. The packing member 8 has a surface 9, it surface structure or layer may have a modified appropriately for bonding to the outer wall sockets of the plating layer 91. 这种表面结构或层可以是任何化学类型的,但也可以是机械的,诸如锁定特性。 Such a surface structure or layer may be any type of chemical, but also may be mechanical, such as a locking feature. 另外,衬垫8提供有缝咪64.这个缝隙64具有第一个优点:电极2可以在这个衬垫8的下面提供。 In addition, the pad 8 is provided with slits 64. The microphone 64 having a first slit advantages: electrode 2 may be provided in the pad 8 below. 因此,电极2 位于光路径的外面,这减小单元的直径。 Thus, the electrode 2 is located outside the optical path, which reduces the diameter of cell. 缝隙的笫二优点是在导电流体52与电绝缘流体51之间的弯月形液面的角度的修改.结果,单元的最小厚度被减小,衬垫与基片的外边缘61合在一起形成内壁的一部分. The second advantage is that the gap Zi modify the meniscus 52 and the electrically conductive fluid between the insulating fluid 51 angle. As a result, the minimum thickness of the cell is reduced, the liner and the outer edge of the substrate 61 together a portion of the inner wall is formed.

图13显示在笫六制造步驟以后的单元15.这个步驟牵涉到末端部分4的组装.末端部分4包括内部部分、膜片45和外部部分81。 Figure 13 shows a manufacturing step in the undertaking of six subsequent unit 15. This step involves the assembly of the end portion 4. The end portion 4 includes an inner part, the diaphragm 45 and the outer portion 81. 在末端部分4的第一面Ul提供压力工具70.优选地,在实际组装之前, 末端部分4在它的笫二面114上提供有电绝缘流体的层.这保证在组装期间不形成气泡.末端部分4在组装期间浸在流体51中。 Providing a pressure tool 70. Preferably, at the end of the first surface Ul portion 4, before the actual assembly, the end portion 4 is provided with an electrically insulating fluid layer on its second surface 114 of Zi. This ensures that bubbles do not form during assembly. end portion 4 during the assembly immersed in the fluid 51. 结果,多余的流体层55在末端部分的第一面上形成。 As a result, the excess fluid layer on the first surface of the end portion 55 is formed. 电绝缘层51能够从第二面114流到末端部分4的第一面111,因为在外部部分81与外壁90之间留有窄的通道. An electrically insulating layer 51 of the first end surface 111 can flow from the second face portion 4 114, because between the external portion 81 and the outer wall 90 leaving a narrow passage.

图14显示在末端部分4的外部部分81被闺定在本体部分后的单元15,这个本体部分实际上包括衬垫8和外壁卯,这是通过插入夹持体86而实现的.这个夹持体把外部部分81向下夹持和/或放置到衬垫8, 结果,膜片45被放置在稍微弯曲的位置,夹持体具有与外壁卯的电镀表面层91相接触的表面.优选地,它提供有一个或多个锁定特性. 如有需要,它可被设计成延伸到在外部部分81与外壁90之间的通道89.在这种搮作中,内壁80被形成,它由粘接层63、基片6的外部部分61、衬垫8、末端部分4的外部部分81和夹持体86组成. Figure 14 shows the outer end portion 4 of the Inner portion 81 is fixed in the body portion of the unit 15, the pad 8 includes a body portion and an outer wall actually d, which is inserted through the holder body 86 realized. This clamping The outer body portion 81 to the lower holder and / or placed into the liner 8, a result, the diaphragm 45 is placed in a slightly bent position, the clamping member having an outer wall 91 d of the surface layer in contact with the plating surface. Preferably It is provided with one or more locking features, if necessary, it may be designed to extend to the outer portion 81 between the outer wall 90 of the channel 89. In this 搮 as, the inner wall 80 is formed, which consists of stick contact layer 63, the substrate 6 of the outer portion 61, the pad 8, the end portion 81 and the outer portion 4 of the holder body 86 composition.

图15显示在工具70和电绝缘流体51的多余部分55被去除后的单元15,去除步骤后面进行清洁步骤,这样,夹持体86的和膜片45的表面足够干净,可用于以后的步骤. Figure 15 shows the removal of the excess being removed after the step behind the tool units 70 and 51 of electrically insulating fluid 15 for cleaning the step portion 55, so that the diaphragm 45 and the surface of the holder body 86 clean enough to be used in the subsequent step .

图16显示在制造中最后的重要的步骤后的羊元15,在这个步骤中, 在夹持体86与外壁90之间的连接通过供应密封层95而被加强.密封层95优选地通过在适当的镀槽中电镀提供.替换地,它可以是本身在技术上已知的任何其它保护层,诸如基于环氧树脂的层。 Figure 16 shows the manufacturing steps after the last important sheep element 15, in this step, the connection between the holding member 86 and the outer wall 90 of the sealing layer 95 by supplying be strengthened. Seal layer 95 preferably by providing appropriate plating bath plating. Alternatively, it may be known in the art per se in any other protective layer, such as an epoxy resin-based layer. 密封层95在本例中延伸到膜片45,但这并不是重要的。 A sealing layer 95 extends in this example to the diaphragm 45, but this is not important. 优选地,密封层95以适当的厚度被提供,以便填充任何拐角和提供平滑的外表面。 Preferably, the sealing layer 95 with an appropriate thickness is provided so as to fill any corners and provide a smooth outer surface. 密封层95在本例中从末端部分的笫一面lll延伸到基片的第一面112,这是有利的: 因为它也具有夹持特性,以及把外壁卯与它的延伸部分85, 86合在一起' Sealing the first surface layer 95 in this embodiment extends from one side lll Zi end portion to the substrate 112, which is advantageous: because it also has a gripping features, as well as the outer wall sockets and its extension 85, 86 together together '

图n显示本发明的单元的第二实施例的示意性截面困。 Figure n shows a schematic cross section of an embodiment of the present invention is the second unit of the storm. 在本实施 In the present embodiment

例中没有显示用于袭盖外壁80的延伸部分85的经电镀的密封层.在本实施例中,外壁的核心92是一个金属盘.它固有地包括凸起85.具有通孔62的第二盖板6、本体部件8和第一盖板4在这里以参照用8 到16描述的方式被组装,本体部件8通常作为一个电极而工作,并且它例如被连接到用作为触点的盘92。 Example 80 is not shown in the outer wall portion 85 extending through a sealing layer for the passage of the plating cover. In this embodiment, the outer wall of the core 92 is a metal plate which inherently includes a projection 85. The through-hole 62 having a first Second cover 6, the body member 8 and cover plate 4 at the first reference herein in the manner described with 8 to 16 are assembled, the body member 8 is generally used as a working electrode, and it is used as an example, is connected to the contact plate 92.

第一盖板4在这里是一个连续的板,它被选择成足够薄,以便在应力下可弯曲,在本例中,使用玻璃板.在本体部件8与笫一盖板4 之间有腔体41。 First cover 4 here is a continuous sheet, it is chosen to be sufficiently thin so as to be bent under stress, in this example, a glass plate. In between the body member 8 and cover plate 4 has a cavity Zi 41. 在流体51, 52的至少一个膨胀的情形下(尤其是在温度上升时)笫一盖板4将弯曲,以便增大单元的体积.在流体51, 52 的至少一个收缩下,第一盖板将弯曲,以便缩小单元的体积.由于电绝缘流体51优选地是油,它比起水溶液的第二流体52具有更大的热膨胀系数,因此优选地使可弯曲的笫一盖板4存在于电绝缘流体51的面上。 In the fluid 51, at least one expansion of the case 52 (especially when the temperature rises) Zi a cover plate 4 is bent, so as to increase the volume of the unit. In the fluid 51, at least one contraction (52), the first cover plate The curved to reduce the volume of the unit. Since the fluid 51 is preferably an electrically insulating oil, it is compared to an aqueous solution of the second fluid 52 has a larger thermal expansion coefficient, and therefore is preferable to make bendable Zi a cap 4 is present in the electrical surface of the insulating fluid (51).

虽然这里未示出,但使用电镀的密封层将得到非常良好的结果, 不排除这个电镀的密封层能够应用到包含流体的单元的其它结构,以及不是所有的应用都需要具有内壁80和外壁90与扩展部分85, 86的单元-还可以看到,在第一和第二面111, 112上延伸的外壁80的扩展部分85, 86不是分开的元件,而是部件的凸起或是生长的或沉积的连接物.具体地,经电镀的连接物可以和这样的扩展部分86—样有效。 Although not illustrated here, but a sealing layer using the plating obtained very good results, does not exclude the electroplated sealing layer can be applied to other structural units containing a fluid, and not all applications need to have an inner wall 80 and outer wall 90 and the expansion unit section 85, 86 - can also be seen, the outer wall on the first and second faces 111, 112 extending extension 80 of section 85, 86 is not a separate element, but part of the projection or growth or deposit linker. Specifically, the linker can be electroplated and such-like extension portion 86- effective.

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Classifications
International ClassificationG02B3/14, G02B26/02
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